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公开(公告)号:US10921516B2
公开(公告)日:2021-02-16
申请号:US16747933
申请日:2020-01-21
发明人: Yoshihiro Yoneda , Takuya Okimoto , Kenji Sakurai
IPC分类号: G02B6/12 , G02B6/42 , H01L31/105 , H01L31/0304 , H01L31/0232
摘要: A photodiode (PD) device that monolithically integrates a PD element with a waveguide element is disclosed. The PD device includes a conducting layer with a first region and a second region next to the first region, where the PD element exists in the first region, while, the waveguide element exists in the second region and optically couples with the PD element. The waveguide element includes a core layer and a cladding layer on the conducting layer, which forms an optical confinement structure. The PD element includes an absorption layer on the conducting layer and a p-type cladding layer on the absorption layer, which form another optical confinement structure. The absorption layer has a length at least 12 μm measured from the interface against the core layer.
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公开(公告)号:US10585239B2
公开(公告)日:2020-03-10
申请号:US16290671
申请日:2019-03-01
发明人: Yoshihiro Yoneda , Takuya Okimoto , Kenji Sakurai
IPC分类号: G02B6/12 , G02B6/42 , H01L31/105 , H01L31/0304 , H01L31/0232
摘要: A photodiode (PD) device that monolithically integrates a PD element with a waveguide element is disclosed. The PD device includes a conducting layer with a first region and a second region next to the first region, where the PD element exists in the first region, while, the waveguide element exists in the second region and optically couples with the PD element. The waveguide element includes a core layer and a cladding layer on the conducting layer, which forms an optical confinement structure. The PD element includes an absorption layer on the conducting layer and a p-type cladding layer on the absorption layer, which form another optical confinement structure. The absorption layer has a length at least 12 μm measured from the interface against the core layer.
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3.
公开(公告)号:US20190271808A1
公开(公告)日:2019-09-05
申请号:US16290671
申请日:2019-03-01
发明人: Yoshihiro Yoneda , Takuya Okimoto , Kenji Sakurai
IPC分类号: G02B6/12 , G02B6/42 , H01L31/0232 , H01L31/105 , H01L31/0304
摘要: A photodiode (PD) device that monolithically integrates a PD element with a waveguide element is disclosed. The PD device includes a conducting layer with a first region and a second region next to the first region, where the PD element exists in the first region, while, the waveguide element exists in the second region and optically couples with the PD element. The waveguide element includes a core layer and a cladding layer on the conducting layer, which forms an optical confinement structure. The PD element includes an absorption layer on the conducting layer and a p-type cladding layer on the absorption layer, which form another optical confinement structure. The absorption layer has a length at least 12 μm measured from the interface against the core layer.
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