-
公开(公告)号：US10741591B2
公开(公告)日：2020-08-11
申请号：US16283191
申请日：2019-02-22
发明人： Hideki Yagi , Naoko Konishi , Koji Ebihara , Takuya Okimoto
IPC分类号： H01L27/144 , H01L31/0352 , H01L31/0232 , H01L31/105 , H01L31/0304 , H01L31/18 , G02B6/12 , G02B6/13 , G02B6/136
摘要： A semiconductor integrated optical device includes: a supporting base including semi-insulating semiconductor; a first photoelectric convertor having first photodiode mesas; a second photoelectric convertor having second photodiode mesas; a first 90° optical hybrid having at least one first multimode waveguide mesa; a second 90° optical hybrid having at least one second multimode waveguide mesa; an optical divider mesa; first and second input waveguide mesas coupling the first and second 90° optical hybrids with the optical divider mesa, respectively; a conductive semiconductor region disposed on the supporting base, the conductive semiconductor region mounting the first photodiode mesas, the second photodiode mesas, the first multimode waveguide mesas, the second multimode waveguide mesas, and the optical divider mesa; a first island semiconductor mesa extending between the first and second multimode waveguide mesas; and a first groove extending through the first island semiconductor mesa and the conductive semiconductor region to the semi-insulating semiconductor.
-
2.发明申请公开(公告)号：US20180252865A1
公开(公告)日：2018-09-06
申请号：US15909263
申请日：2018-03-01
发明人： Yoshihiro Yoneda , Takuya Okimoto
CPC分类号： G02F1/2257 , G02B6/12004 , G02B6/14 , G02B6/2813 , G02B2006/12078 , G02B2006/12097 , G02B2006/12123 , G02B2006/1215 , G02B2006/12152 , G02F1/0353 , G02F1/21 , G02F2201/07 , G02F2202/06
摘要： A functional optical device is disclosed. The optical functional device integrates a coupling unit, a light-receiving element and an optical waveguide on a semiconductor substrate. The coupling unit extracts an optical signal by interfering between signal light and local light. The optical waveguide carries the optical signal from the coupling unit to the light-receiving element. The light-receiving element receives the optical signal. The semiconductor substrate provides a heavily doped conducting layer and a buffer layer that is un-doped or lightly doped with impurities by density smaller than density of impurities in the conducting layer. The conducting layer and the buffer layer continuously and evenly expand from the optical waveguide to the light-receiving element.
-
公开(公告)号：US11757052B2
公开(公告)日：2023-09-12
申请号：US17188335
申请日：2021-03-01
发明人： Yoshihiro Yoneda , Koji Ebihara , Takuya Okimoto
IPC分类号： H01L31/0232 , H01L31/0304 , H01L31/0352 , H01L31/109
CPC分类号： H01L31/02327 , H01L31/03046 , H01L31/035281 , H01L31/109
摘要： A semiconductor light receiving element includes a first semiconductor layer, a waveguide type photodiode structure, an optical waveguide structure, and a fourth semiconductor layer. The waveguide type photodiode structure is provided on the first semiconductor layer. The waveguide type photodiode structure includes an optical absorption layer, a second semiconductor layer, a multiplication layer, and a third semiconductor layer. The optical waveguide structure is provided on the first semiconductor layer. The optical waveguide structure includes an optical waveguiding core layer and a cladding layer. An end face of the waveguide type photodiode structure faces to an end face of the optical waveguide structure. The fourth semiconductor layer is located between the end face of the waveguide type photodiode structure and the end face of the optical waveguide structure. The fourth semiconductor layer contacts the multiplication layer at the end face of the waveguide type photodiode structure.
-
公开(公告)号：US11552206B2
公开(公告)日：2023-01-10
申请号：US17188393
申请日：2021-03-01
发明人： Yoshihiro Yoneda , Takuya Okimoto
IPC分类号： H01L31/102 , H01L31/0232 , H01L31/109 , H01L31/0304
摘要： An optical waveguide type photodetector includes a first semiconductor layer of a first conductive type, a multiplication layer of a first conductive type on the first semiconductor layer, an optical waveguide structure, and a photodiode structure. The photodiode structure has a third semiconductor layer of a second conductive type, an optical absorption layer of an intrinsic conductive type or of a second conductive type, and a second semiconductor layer of a second conductive type. The optical waveguide structure includes an optical waveguiding core layer and a cladding layer. An end face of the photodiode structure located in a second region of the first semiconductor layer and an end face of the optical waveguide structure located in a first region of the first semiconductor layer are in contact.
-
公开(公告)号：US10514516B2
公开(公告)日：2019-12-24
申请号：US15909235
申请日：2018-03-01
发明人： Yoshihiro Yoneda , Ryuji Masuyama , Takuya Okimoto
IPC分类号： G02B6/42 , G02B6/26 , H01L31/0232 , H01L31/101 , H01L31/0224 , H04B10/69 , H01L31/0304 , H01L31/105 , G02B6/12
摘要： A functional optical device applicable to a coherent optical communication system as a front end device is disclosed. The functional optical device includes a pair of light-receiving elements of a type of waveguide photodiode (PD), a pair of signal pads, a pair of ground pads, a bias pad, and a substrate that monolithically integrates those elements thereon. The light-receiving elements generate a photocurrent complementary to each other in respective anodes thereof; while, receive biases through the bias pad common to the light-receiving elements. Those pads are disposed along an edge of the substrate such that the signal pads put the bias pads therebetween, and the ground pads put the signal pads and the bias pad therebetween.
-
6.发明申请公开(公告)号：US20190271808A1
公开(公告)日：2019-09-05
申请号：US16290671
申请日：2019-03-01
发明人： Yoshihiro Yoneda , Takuya Okimoto , Kenji Sakurai
IPC分类号： G02B6/12 , G02B6/42 , H01L31/0232 , H01L31/105 , H01L31/0304
摘要： A photodiode (PD) device that monolithically integrates a PD element with a waveguide element is disclosed. The PD device includes a conducting layer with a first region and a second region next to the first region, where the PD element exists in the first region, while, the waveguide element exists in the second region and optically couples with the PD element. The waveguide element includes a core layer and a cladding layer on the conducting layer, which forms an optical confinement structure. The PD element includes an absorption layer on the conducting layer and a p-type cladding layer on the absorption layer, which form another optical confinement structure. The absorption layer has a length at least 12 μm measured from the interface against the core layer.
-
公开(公告)号：US10331007B2
公开(公告)日：2019-06-25
申请号：US15909263
申请日：2018-03-01
发明人： Yoshihiro Yoneda , Takuya Okimoto
摘要： A functional optical device is disclosed. The functional optical device integrates a coupling unit, a waveguide photodiode (PD) and an optical waveguide on a semiconductor substrate. The coupling unit extracts an optical signal by performing interference of signal light with local light. The optical waveguide carries the optical signal from the coupling unit to the waveguide PD. The semiconductor substrate provides a heavily doped conducting layer and a buffer layer that is un-doped or lightly doped with n-type impurities by density smaller than density of impurities in the heavily doped conducting layer. The conducting layer and the buffer layer continuously and evenly extend from the optical waveguide to the waveguide PD.
-
公开(公告)号：US20180252881A1
公开(公告)日：2018-09-06
申请号：US15909235
申请日：2018-03-01
发明人： Yoshihiro Yoneda , Ryuji Masuyama , Takuya Okimoto
IPC分类号： G02B6/42 , G02B6/26 , H01L31/0224 , H01L31/101 , H01L31/0232
CPC分类号： G02B6/4295 , G02B6/12004 , G02B6/26 , H01L31/022408 , H01L31/02327 , H01L31/03046 , H01L31/101 , H01L31/105 , H04B10/691
摘要： A functional optical device applicable to a coherent optical communication system as a front end device is disclosed. The functional optical device includes a pair of light-receiving elements of a type of waveguide photodiode (PD), a pair of signal pads, a pair of ground pads, a bias pad, and a substrate that monolithically integrates those elements thereon. The light-receiving elements generate a photocurrent complementary to each other in respective anodes thereof; while, receive biases through the bias pad common to the light-receiving elements. Those pads are disposed along an edge of the substrate such that the signal pads put the bias pads therebetween, and the ground pads put the signal pads and the bias pad therebetween.
-
公开(公告)号：US10921516B2
公开(公告)日：2021-02-16
申请号：US16747933
申请日：2020-01-21
发明人： Yoshihiro Yoneda , Takuya Okimoto , Kenji Sakurai
IPC分类号： G02B6/12 , G02B6/42 , H01L31/105 , H01L31/0304 , H01L31/0232
摘要： A photodiode (PD) device that monolithically integrates a PD element with a waveguide element is disclosed. The PD device includes a conducting layer with a first region and a second region next to the first region, where the PD element exists in the first region, while, the waveguide element exists in the second region and optically couples with the PD element. The waveguide element includes a core layer and a cladding layer on the conducting layer, which forms an optical confinement structure. The PD element includes an absorption layer on the conducting layer and a p-type cladding layer on the absorption layer, which form another optical confinement structure. The absorption layer has a length at least 12 μm measured from the interface against the core layer.
-
公开(公告)号：US10859766B2
公开(公告)日：2020-12-08
申请号：US16548171
申请日：2019-08-22
发明人： Yoshihiro Yoneda , Takuya Okimoto , Koji Ebihara , Hideki Yagi
摘要： An optical semiconductor device comprises a semiconductor substrate, an optical 90-degree hybrid circuit provided on the substrate, a plurality of input optical waveguides provided on the substrate, and a plurality of output optical waveguides provided on the substrate. The plurality of input optical waveguides is optically coupled to input ends of the optical 90-degree hybrid circuit. The plurality of output optical waveguides is optically coupled to output ends of the optical 90-degree hybrid circuit. Each of the plurality of input optical waveguides includes a first curving portion and a first straight portion adjacent to the first curving portion, and each of the plurality of output optical waveguides includes a second curving portion. A central axis of the first curving portion is inwardly offset with respect to a central axis of the first straight portion, and a central axis of the second curving portion follows a raised sine curve.
-
-
-
-
-
-
-
-
-
搜索结果
12 条记录 (耗时 0.018 秒)
