公开(公告)号：US11990362B2

公开(公告)日：2024-05-21

申请号：US17612173

申请日：2020-05-21

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Nobuhiro Hidaka ,  Megumi Ootomo ,  Jun Arikawa

IPC: H01L21/68 ,  C04B35/505 ,  C04B35/565 ,  C04B35/645 ,  H01J37/32 ,  H01L21/683 ,  H01L21/687

CPC classification number: H01L21/6833 ,  C04B35/505 ,  C04B35/565 ,  C04B35/645 ,  H01J37/32724 ,  H01L21/68757 ,  C04B2235/549 ,  H01J2237/334

Abstract: A composite sintered body including: a metal oxide as a main phase; silicon carbide as a sub-phase; and silicate of a metal element that is included in the metal oxide, in which the average aggregation diameter of the silicate in the field of view of 600 μm2 at a magnification of 1000 times is 5 μm or lower.