公开(公告)号：US11990362B2

公开(公告)日：2024-05-21

申请号：US17612173

申请日：2020-05-21

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Nobuhiro Hidaka ,  Megumi Ootomo ,  Jun Arikawa

IPC: H01L21/68 ,  C04B35/505 ,  C04B35/565 ,  C04B35/645 ,  H01J37/32 ,  H01L21/683 ,  H01L21/687

CPC classification number: H01L21/6833 ,  C04B35/505 ,  C04B35/565 ,  C04B35/645 ,  H01J37/32724 ,  H01L21/68757 ,  C04B2235/549 ,  H01J2237/334

Abstract: A composite sintered body including: a metal oxide as a main phase; silicon carbide as a sub-phase; and silicate of a metal element that is included in the metal oxide, in which the average aggregation diameter of the silicate in the field of view of 600 μm2 at a magnification of 1000 times is 5 μm or lower.

公开(公告)号：US20160251265A1

公开(公告)日：2016-09-01

申请号：US15027339

申请日：2014-10-15

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Kentaro Takahashi ,  Yoshiaki Moriya ,  Megumi Ootomo

IPC: C04B35/44 ,  H05K7/20 ,  H01L21/683 ,  C04B35/645 ,  H02N13/00

CPC classification number: C04B35/44 ,  C04B35/6261 ,  C04B35/6262 ,  C04B35/62655 ,  C04B35/62675 ,  C04B35/645 ,  C04B2235/3217 ,  C04B2235/3222 ,  C04B2235/3224 ,  C04B2235/3225 ,  C04B2235/3227 ,  C04B2235/5436 ,  C04B2235/5445 ,  C04B2235/761 ,  C04B2235/764 ,  C04B2235/768 ,  C04B2235/77 ,  C04B2235/9669 ,  C04B2235/9684 ,  C04B2235/9692 ,  H01L21/6831 ,  H01L21/6833 ,  H01L21/68757 ,  H02N13/00 ,  H05K7/2039

Abstract: Provided are a corrosion-resistant member and an electrostatic chuck device using the same, in which corrosion resistance to halogen corrosive gas such as fluorine corrosive gas or chlorine corrosive gas and plasma thereof is high, dielectric constant and volume resistivity are high, and dielectric loss is low. The corrosion-resistant member is formed of a composite oxide sintered compact containing aluminum, samarium, and a rare earth metal element other than samarium, in which the rare earth metal element other than samarium has an ionic radius of 0.88×10−10 m or more.

Abstract translation: 提供一种耐蚀性构件和使用其的静电吸盘装置，其中对氟腐蚀性气体或氯气腐蚀性气体及其等离子体的卤素腐蚀性气体的耐腐蚀性高，介电常数和体积电阻率高，并且介电损耗 低。 耐腐蚀部件由含有钐，钐以外的稀土元素的复合氧化物烧结体形成，其中钐以外的稀土金属元素的离子半径为0.88×10 -10 m，或 更多。

公开(公告)号：US09378862B2

公开(公告)日：2016-06-28

申请号：US14760160

申请日：2014-01-14

Applicant: Sumitomo Osaka Cement Co., Ltd.

Inventor： Megumi Ootomo ,  Yoshiki Yoshioka

IPC: C04B35/00 ,  H01B3/12 ,  C04B35/10 ,  C04B35/505 ,  C04B35/584 ,  H01B3/00

CPC classification number: H01B3/12 ,  C04B35/10 ,  C04B35/117 ,  C04B35/505 ,  C04B35/584 ,  C04B35/587 ,  C04B35/593 ,  C04B35/62655 ,  C04B35/645 ,  C04B2235/3225 ,  C04B2235/3826 ,  C04B2235/5445 ,  C04B2235/5454 ,  C04B2235/5472 ,  C04B2235/6586 ,  C04B2235/80 ,  H01B3/004

Abstract: A dielectric material which is able to detect a sign of insulation breakdown before use or while in use, and thus is able to predict the insulation breakdown in advance is provided. Such a dielectric material is made of a composite sintered compact in which conductive particles are dispersed in an insulating material, in which in the conductive particles, a particle diameter D10 having a cumulative volume percentage of 10% by volume in a volume particle size distribution is 0.2 μm or less, a particle diameter D90 having a cumulative volume percentage of 90% by volume is 2 μm or less, a ratio (D90/D10) of the particle diameter D90 having a cumulative volume percentage of 90% by volume to the particle diameter D10 having a cumulative volume percentage of 10% by volume is 3.0 or more, and a ratio (D90/D50) of the particle diameter D90 having a cumulative volume percentage of 90% by volume to the particle diameter D50 having a cumulative volume percentage of 50% by volume is 1.4 or more.

Abstract translation: 提供一种电介质材料，其能够在使用之前或在使用时检测绝缘击穿的迹象，并且因此能够预先预测绝缘击穿。 这种介电材料由导电粒子分散在绝缘材料中的复合烧结体构成，其中在导电性粒子中，体积粒径分布中累积体积百分比为10体积％的粒径D10为 累积体积百分比为90体积％的粒径D90为2μm以下，与颗粒的累积体积比为90体积％的粒径D90的比（D90 / D10）为0.2μm以下 具有10体积％的累积体积百分比的直径D10为3.0以上，累积体积比为90体积％的粒径D90与具有累积体积百分比的粒径D50的比（D90 / D50） 50体积％为1.4以上。

公开(公告)号：US10703677B2

公开(公告)日：2020-07-07

申请号：US16494852

申请日：2018-07-11

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Megumi Ootomo ,  Hiroaki Nagatomo ,  Kentaro Takahashi

IPC: C04B35/565 ,  C04B35/575 ,  H05B3/14 ,  C04B35/584

Abstract: Provided is a SiC sintered body which contains nitrogen atoms, wherein a ratio Rmax/Rave of a maximum volume resistivity Rmax of the sintered body to an average volume resistivity Rave of the sintered body is 1.5 or lower; a ratio Rmin/Rave of a minimum volume resistivity Rmin of the sintered body to the average volume resistivity Rave is 0.7 or higher; and a relative density of the sintered body is 98% or higher.

公开(公告)号：US10189745B2

公开(公告)日：2019-01-29

申请号：US15027339

申请日：2014-10-15

Applicant: Sumitomo Osaka Cement Co., Ltd.

Inventor： Kentaro Takahashi ,  Yoshiaki Moriya ,  Megumi Ootomo

IPC: C04B35/44 ,  H01L21/683 ,  C04B35/645 ,  H02N13/00 ,  H05K7/20 ,  H01L21/687 ,  C04B35/626

Abstract: Provided are a corrosion-resistant member and an electrostatic chuck device using the same, in which corrosion resistance to halogen corrosive gas such as fluorine corrosive gas or chlorine corrosive gas and plasma thereof is high, dielectric constant and volume resistivity are high, and dielectric loss is low. The corrosion-resistant member is formed of a composite oxide sintered compact containing aluminum, samarium, and a rare earth metal element other than samarium, in which the rare earth metal element other than samarium has an ionic radius of 0.88×10−10 m or more.

公开(公告)号：US10147629B2

公开(公告)日：2018-12-04

申请号：US15027026

申请日：2014-10-15

Applicant: Sumitomo Osaka Cement Co., Ltd.

Inventor： Kentaro Takahashi ,  Megumi Ootomo

IPC: H01L21/683 ,  H01L21/67 ,  H02N13/00

Abstract: Provided is an electrostatic chuck device in which breakdown between an electrostatic chuck portion and a cooling base portion can be prevented, voltage endurance can be improved, uniformity in the in-plane temperature of a mounting surface of the electrostatic chuck portion where a plate-shaped sample is mounted can be improved, and voltage endurance of a heating member can be improved by applying a uniform voltage between the electrostatic chuck portion and the cooling base portion. An electrostatic chuck device (10) includes: an electrostatic chuck portion (11) that includes a ceramic plate-shaped body and an internal electrode 18 for electrostatic adsorption; and a cooling base portion (12) that adjusts a temperature of the internal electrode (18) for electrostatic adsorption, in which a first insulating member (20) is adhered to a second main surface of the ceramic plate-shaped body through a first adhesive (19) so as to cover a periphery of the internal electrode for electrostatic adsorption (18), a second insulating member (14) is adhered to a top surface of the cooling base portion (12) through a second adhesive (13), a heating member (15) is provided on a top surface of the second insulating member (14), and the electrostatic chuck portion (11) and the cooling base portion (12) are adhered to each other and integrated through an organic adhesive layer (16).

公开(公告)号：US20150340121A1

公开(公告)日：2015-11-26

申请号：US14760160

申请日：2014-01-14

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Megumi Ootomo ,  Yoshiki Yoshioka

IPC: H01B3/12 ,  C04B35/505 ,  C04B35/584 ,  C04B35/10

CPC classification number: H01B3/12 ,  C04B35/10 ,  C04B35/117 ,  C04B35/505 ,  C04B35/584 ,  C04B35/587 ,  C04B35/593 ,  C04B35/62655 ,  C04B35/645 ,  C04B2235/3225 ,  C04B2235/3826 ,  C04B2235/5445 ,  C04B2235/5454 ,  C04B2235/5472 ,  C04B2235/6586 ,  C04B2235/80 ,  H01B3/004

Abstract: A dielectric material which is able to detect a sign of insulation breakdown before use or while in use, and thus is able to predict the insulation breakdown in advance is provided. Such a dielectric material is made of a composite sintered compact in which conductive particles are dispersed in an insulating material, in which in the conductive particles, a particle diameter D10 having a cumulative volume percentage of 10% by volume in a volume particle size distribution is 0.2 μm or less, a particle diameter D90 having a cumulative volume percentage of 90% by volume is 2 μm or less, a ratio (D90/D10) of the particle diameter D90 having a cumulative volume percentage of 90% by volume to the particle diameter D10 having a cumulative volume percentage of 10% by volume is 3.0 or more, and a ratio (D90/D50) of the particle diameter D90 having a cumulative volume percentage of 90% by volume to the particle diameter D50 having a cumulative volume percentage of 50% by volume is 1.4 or more.

Abstract translation: 提供一种电介质材料，其能够在使用之前或在使用时检测绝缘击穿的迹象，并且因此能够预先预测绝缘击穿。 这种介电材料由导电粒子分散在绝缘材料中的复合烧结体构成，其中在导电性粒子中，体积粒径分布中累积体积百分比为10体积％的粒径D10为 累积体积百分比为90体积％的粒径D90为2μm以下，与颗粒的累积体积比为90体积％的粒径D90的比（D90 / D10）为0.2μm以下 具有10体积％的累积体积百分比的直径D10为3.0以上，累积体积比为90体积％的粒径D90与具有累积体积百分比的粒径D50的比（D90 / D50） 50体积％为1.4以上。