公开(公告)号：US20230349038A1

公开(公告)日：2023-11-02

申请号：US18347956

申请日：2023-07-06

Applicant: Samsung Display Co., LTD.

Inventor： Hyosung KIM ,  JinYoung CHOI ,  SUNGMIN HUR ,  HYUNSANG SEO ,  Hyun-Ju LEE ,  Manjae PARK ,  NARI AHN ,  HYEONGSUK YOO ,  DONGWON HAN

IPC: C23C16/04 ,  C22C38/08 ,  H10K50/844 ,  H10K59/12 ,  H10K71/00 ,  H10K71/10

CPC classification number: C23C16/042 ,  C22C38/08 ,  H10K50/844 ,  H10K59/12 ,  H10K71/00 ,  H10K71/10 ,  H10K59/1201

Abstract: A deposition mask includes a metal mask body in which a deposition opening is defined; and a coating layer including aluminum oxynitride, on an outer surface of the metal mask body.

公开(公告)号：US20210079518A1

公开(公告)日：2021-03-18

申请号：US16892415

申请日：2020-06-04

Applicant: Samsung Display Co., LTD.

Inventor： Hyosung KIM ,  JinYoung CHOI ,  SUNGMIN HUR ,  HYUNSANG SEO ,  Hyun-Ju LEE ,  Manjae PARK ,  NARI AHN ,  HYEONGSUK YOO ,  DONGWON HAN

IPC: C23C16/04 ,  H01L51/56 ,  H01L51/00 ,  H01L27/32 ,  H01L51/52 ,  C22C38/08

Abstract: A deposition mask includes a metal mask body in which a deposition opening is defined; and a coating layer including aluminum oxynitride, on an outer surface of the metal mask body.