公开(公告)号：US20240322713A1

公开(公告)日：2024-09-26

申请号：US18396845

申请日：2023-12-27

Applicant: Samsung Display Co., LTD.

Inventor： MINCHUL SONG ,  MINGOO KANG ,  JUNHYEUK KO ,  Eui Gyu KIM ,  Sukha RYU ,  SANGHEON JEON

IPC: H02N13/00 ,  B05C13/00 ,  B05C21/00

CPC classification number: H02N13/00 ,  B05C13/00 ,  B05C21/005

Abstract: A thin film deposition apparatus according to an embodiment includes a chamber, a deposition source disposed in a chamber and that supplies a deposition material to the substrate, a mask assembly comprising pattern holes through which the deposition material passes, and an electrostatic chuck facing the mask assembly and that fixes the substrate. The electrostatic chuck comprises a body that supports the substrate, an insulating layer disposed on the body, a first electrode disposed in the insulating layer and spaced apart from the body by a first distance, a second electrode disposed in the insulating layer and spaced apart from the body by a second distance, and a conductive layer disposed in the insulating layer and spaced apart from the body by a third distance. The first electrode and the second electrode are supplied with different voltages, and the third distance is greater than the first distance.