公开(公告)号：US20240044001A1

公开(公告)日：2024-02-08

申请号：US18336207

申请日：2023-06-16

Applicant: Samsung Display Co., LTD.

Inventor： YOUNGSUN CHO ,  JUNHYEUK KO ,  MYUNGKYU KIM ,  YOUNG KWANG LEE ,  Seung Min JIN ,  Jae Min HONG

IPC: C23C16/458 ,  C23C16/04

CPC classification number: C23C16/458 ,  C23C16/042

Abstract: A deposition apparatus according to an embodiment includes a deposition source, and a deposition portion that faces the deposition source. The deposition portion is disposed at an angle of about 4 degrees to about 14 degrees with respect to an imaginary vertical line that is perpendicular to ground. The deposition portion includes a frame including an opening, and an outer portion disposed around the opening, a substrate disposed on a first side of the frame, and a plurality of back stages disposed on a second side opposite to the first side of the frame. The frame moves by movement of the plurality of back stages.

公开(公告)号：US20240131555A1

公开(公告)日：2024-04-25

申请号：US18234937

申请日：2023-08-16

Applicant: Samsung Display Co., LTD.

Inventor： MINCHUL SONG ,  MINGOO KANG ,  JUNHYEUK KO ,  EUIGYU KIM ,  SUKHA RYU ,  YOUNGSUN CHO

IPC: B05C13/02 ,  B05C21/00 ,  H01L21/683 ,  H10K71/16

CPC classification number: B05C13/02 ,  B05C21/005 ,  H01L21/6833 ,  H10K71/166

Abstract: A deposition apparatus includes: a support module having a plurality of support parts coupled to a target substrate; a base substrate coupled to the support module; a connection member for connecting the plurality of support parts to the base substrate; and a mask assembly configured to mask a deposition material provided to the target substrate. The support module further includes position control parts, which control the plurality of support parts to be movable along a direction axis perpendicular to a major surface of each of the support parts, respectively.

公开(公告)号：US20240226955A9

公开(公告)日：2024-07-11

申请号：US18234937

申请日：2023-08-17

Applicant: Samsung Display Co., LTD.

Inventor： MINCHUL SONG ,  MINGOO KANG ,  JUNHYEUK KO ,  EUIGYU KIM ,  SUKHA RYU ,  YOUNGSUN CHO

IPC: B05C13/02 ,  B05C21/00 ,  H01L21/683 ,  H10K71/16

CPC classification number: B05C13/02 ,  B05C21/005 ,  H01L21/6833 ,  H10K71/166

Abstract: A deposition apparatus includes: a support module having a plurality of support parts coupled to a target substrate; a base substrate coupled to the support module; a connection member for connecting the plurality of support parts to the base substrate; and a mask assembly configured to mask a deposition material provided to the target substrate. The support module further includes position control parts, which control the plurality of support parts to be movable along a direction axis perpendicular to a major surface of each of the support parts, respectively.

公开(公告)号：US20240146214A1

公开(公告)日：2024-05-02

申请号：US18446274

申请日：2023-08-08

Applicant: Samsung Display Co., LTD.

Inventor： MINCHUL SONG ,  JUNHYEUK KO ,  MINGOO KANG ,  EUIGYU KIM ,  Sukha Ryu ,  YOUNGSUN CHO

IPC: H02N13/00 ,  C23C14/50

CPC classification number: H02N13/00 ,  C23C14/50

Abstract: An electrostatic chuck unit includes: a first plate having a first surface and a second surface facing each other and a first hole extending from the first surface to the second surface; a second plate on the first surface of the first plate and having a groove corresponding to the first hole; a coupling bolt inserted into the first hole and the groove; and a height adjusting member spaced apart from the coupling bolt in a plan view.