公开(公告)号：US09315006B2

公开(公告)日：2016-04-19

申请号：US14245699

申请日：2014-04-04

Applicant: Samsung Display Co., Ltd.

Inventor： Byungchul Lee ,  Dong Sul Kim ,  JaeSeok Park ,  Jinhan Park

IPC: B32B38/10 ,  B32B43/00 ,  H01L51/56 ,  H01L51/00

CPC classification number: B32B38/10 ,  B32B43/006 ,  B32B2310/025 ,  B32B2457/20 ,  B32B2457/206 ,  H01L51/0013 ,  H01L51/56 ,  Y10T156/1126 ,  Y10T156/1153 ,  Y10T156/1174 ,  Y10T156/1911 ,  Y10T156/1944 ,  Y10T156/1956 ,  Y10T156/1978

Abstract: A film peeling apparatus that peels a film attached to a substrate includes a chamber, a transfer unit, and first peeling rollers. The transfer unit is disposed in the chamber to transfer the substrate. The first peeling rollers are disposed in the chamber, each of the first peeling rollers includes a first electrostatic chuck to adsorb a first film attached to the substrate. The first peeling rollers roll the adsorbed first film to peel the first film from the substrate.

Abstract translation: 剥离附着于基板的膜的膜剥离装置包括室，转印单元和第一剥离辊。 转移单元设置在室中以转移基底。 第一剥离辊设置在室中，每个第一剥离辊包括第一静电卡盘，以吸附附着到基板的第一膜。 第一剥离辊滚动吸附的第一膜以从基底剥离第一膜。

公开(公告)号：US10686133B2

公开(公告)日：2020-06-16

申请号：US16667117

申请日：2019-10-29

Applicant: Samsung Display Co., Ltd.

Inventor： Byungchul Lee ,  Heungcheol Jeong ,  Myungsoo Huh ,  Jongsung Kim ,  Byoung-hoon Choi

IPC: H01L21/00 ,  H01L51/00 ,  H01L51/56 ,  G01N21/956 ,  G01B11/27 ,  B41J25/00 ,  B41J2/21 ,  B41J2/01 ,  H01L27/32

Abstract: A display panel manufacturing system includes a substrate providing module configured to provide a substrate including an active region on which thin-film transistors are disposed, and a peripheral region adjacent to the active region, a test substrate providing module configured to provide a test substrate, an organic film forming module configured to form an ink pattern on each of the substrate and the test substrate, the organic film forming module including a plurality of heads, each of which is configured to drop an ink, an offset inspection module configured to inspect the ink pattern on the substrate, a pattern inspection module configured to inspect the ink pattern on the test substrate, and a droplet inspection module configured to inspect an ink, which is dropped from a head selected from the heads.