公开(公告)号：US09315006B2

公开(公告)日：2016-04-19

申请号：US14245699

申请日：2014-04-04

Applicant: Samsung Display Co., Ltd.

Inventor： Byungchul Lee ,  Dong Sul Kim ,  JaeSeok Park ,  Jinhan Park

IPC: B32B38/10 ,  B32B43/00 ,  H01L51/56 ,  H01L51/00

CPC classification number: B32B38/10 ,  B32B43/006 ,  B32B2310/025 ,  B32B2457/20 ,  B32B2457/206 ,  H01L51/0013 ,  H01L51/56 ,  Y10T156/1126 ,  Y10T156/1153 ,  Y10T156/1174 ,  Y10T156/1911 ,  Y10T156/1944 ,  Y10T156/1956 ,  Y10T156/1978

Abstract: A film peeling apparatus that peels a film attached to a substrate includes a chamber, a transfer unit, and first peeling rollers. The transfer unit is disposed in the chamber to transfer the substrate. The first peeling rollers are disposed in the chamber, each of the first peeling rollers includes a first electrostatic chuck to adsorb a first film attached to the substrate. The first peeling rollers roll the adsorbed first film to peel the first film from the substrate.

Abstract translation: 剥离附着于基板的膜的膜剥离装置包括室，转印单元和第一剥离辊。 转移单元设置在室中以转移基底。 第一剥离辊设置在室中，每个第一剥离辊包括第一静电卡盘，以吸附附着到基板的第一膜。 第一剥离辊滚动吸附的第一膜以从基底剥离第一膜。