公开(公告)号：US20180022133A1

公开(公告)日：2018-01-25

申请号：US15628083

申请日：2017-06-20

Applicant: Samsung Display Co., Ltd.

Inventor： Min-Uk KIM ,  Moonjung AN ,  Dongeon LEE ,  Kang Soo HAN ,  Gugrae JO

IPC: B41K1/50 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/00 ,  B41K1/04

CPC classification number: B41K1/50 ,  B41K1/04 ,  B82Y10/00 ,  B82Y40/00 ,  G02B5/3058 ,  G03F7/0002

Abstract: A method of manufacturing an imprint stamp including forming an imprint resist only in a second area of a sample substrate including a first area and the second area, pressing the imprint resist with the imprint stamp and curing the imprint resist, in which the imprint stamp includes a fine protrusion pattern that corresponds to the first area and the second area of the sample substrate, and separating the imprint stamp from the sample substrate such that a portion of the fine protrusion pattern corresponding to the second area is separated from the imprint stamp by the cured imprint resist.

公开(公告)号：US20160237384A1

公开(公告)日：2016-08-18

申请号：US14972351

申请日：2015-12-17

Applicant: LTCAM CO., LTD. ,  Samsung Display Co., Ltd.

Inventor： Dongeon LEE ,  Jinho JU ,  Junhyuk WOO ,  Seokho LEE

IPC: C11D11/00 ,  C11D7/26 ,  C11D7/08 ,  C11D7/32

CPC classification number: C11D11/0047 ,  C11D7/08 ,  C11D7/265 ,  C11D7/3209 ,  C11D7/3245 ,  H01L21/02057

Abstract: Provided is a cleaning composition, including, from about 0.01 weight % to about 10.0 weight % of a chelating agent, from about 0.01 weight to about 3.0 weight % of an organic acid containing a carboxyl group, from about 0.01 weight % to about 2.0 weight % of an inorganic acid, from about 1.0 weight % to about 15.0 weight % of an amine and water in an amount sufficient to bring the total weight of the cleaning composition to 100 weight %.

Abstract translation: 提供了一种清洁组合物，其包含约0.01重量％至约10.0重量％的螯合剂，约0.01重量％至约3.0重量％的含羧基的有机酸，约0.01重量％至约2.0重量％ ％的无机酸，约1.0重量％至约15.0重量％的胺和水，其量足以使清洁组合物的总重量达到100重量％。