公开(公告)号：US11253952B2

公开(公告)日：2022-02-22

申请号：US16408276

申请日：2019-05-09

Applicant: Samsung Display Co., Ltd.

Inventor： Akifumi Sangu ,  Alexander Voronov ,  Hyoung-Joo Kim ,  Eun Sun Choi ,  Emil Aslanov ,  Gyoo Wan Han

IPC: B23K26/064 ,  G02B27/00 ,  B23K26/06 ,  G02B26/10 ,  B23K26/0622 ,  B23K26/08 ,  B23K26/073 ,  B23K26/082

Abstract: A laser processing apparatus includes a light source configured to generate a laser beam, and a light converging optical system configured to converge laser beam to a focal point at an object to be processed, the light converging optical system including a through-hole optical element and a composite optical element under the through-hole optical element, wherein the through-hole optical element includes a first recess portion configured as a concave mirror at a lower surface of the through-hole optical element, and wherein an upper surface of the composite optical element is convex and includes a first region configured to reflect the laser beam and a second region configured to transmit the laser beam.

公开(公告)号：US20200180069A1

公开(公告)日：2020-06-11

申请号：US16657222

申请日：2019-10-18

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Akifumi Sangu ,  Hyoung-Joo Kim ,  Alexander Voronov ,  Eun Sun Choi ,  Gyoo Wan Han

IPC: B23K26/06 ,  B23K26/352

Abstract: A laser processing apparatus according to an exemplary embodiment includes: a light source generating a laser beam; and a light converging unit converging the laser beam to a focal point on an object to be processed, wherein the light converging unit includes a first optical element including a through hole penetrating the first optical element; a second optical element including a first region reflecting the laser beam and a second region transmitting the laser beam; and a third optical element including a focusing lens as a convex lens, a lower surface of the first optical element is a concave mirror, and an upper surface of the second optical element is convex and a lower surface thereof is concave.

公开(公告)号：US12269115B2

公开(公告)日：2025-04-08

申请号：US16657222

申请日：2019-10-18

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Akifumi Sangu ,  Hyoung-Joo Kim ,  Alexander Voronov ,  Eun Sun Choi ,  Gyoo Wan Han

IPC: B23K26/06 ,  B23K26/0622 ,  B23K26/352 ,  G02B5/10 ,  G02B17/08 ,  G02B19/00 ,  G02B26/10

Abstract: A laser processing apparatus according to an exemplary embodiment includes: a light source generating a laser beam; and a light converging unit converging the laser beam to a focal point on an object to be processed, wherein the light converging unit includes a first optical element including a through hole penetrating the first optical element; a second optical element including a first region reflecting the laser beam and a second region transmitting the laser beam; and a third optical element including a focusing lens as a convex lens, a lower surface of the first optical element is a concave mirror, and an upper surface of the second optical element is convex and a lower surface thereof is concave.