公开(公告)号：US12269115B2

公开(公告)日：2025-04-08

申请号：US16657222

申请日：2019-10-18

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Akifumi Sangu ,  Hyoung-Joo Kim ,  Alexander Voronov ,  Eun Sun Choi ,  Gyoo Wan Han

IPC: B23K26/06 ,  B23K26/0622 ,  B23K26/352 ,  G02B5/10 ,  G02B17/08 ,  G02B19/00 ,  G02B26/10

Abstract: A laser processing apparatus according to an exemplary embodiment includes: a light source generating a laser beam; and a light converging unit converging the laser beam to a focal point on an object to be processed, wherein the light converging unit includes a first optical element including a through hole penetrating the first optical element; a second optical element including a first region reflecting the laser beam and a second region transmitting the laser beam; and a third optical element including a focusing lens as a convex lens, a lower surface of the first optical element is a concave mirror, and an upper surface of the second optical element is convex and a lower surface thereof is concave.

公开(公告)号：US20200180069A1

公开(公告)日：2020-06-11

申请号：US16657222

申请日：2019-10-18

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Akifumi Sangu ,  Hyoung-Joo Kim ,  Alexander Voronov ,  Eun Sun Choi ,  Gyoo Wan Han

IPC: B23K26/06 ,  B23K26/352

Abstract: A laser processing apparatus according to an exemplary embodiment includes: a light source generating a laser beam; and a light converging unit converging the laser beam to a focal point on an object to be processed, wherein the light converging unit includes a first optical element including a through hole penetrating the first optical element; a second optical element including a first region reflecting the laser beam and a second region transmitting the laser beam; and a third optical element including a focusing lens as a convex lens, a lower surface of the first optical element is a concave mirror, and an upper surface of the second optical element is convex and a lower surface thereof is concave.

公开(公告)号：US20220212291A1

公开(公告)日：2022-07-07

申请号：US17503363

申请日：2021-10-18

Applicant: Samsung Display Co., LTD.

Inventor： Akifumi Sangu ,  Je Kil Ryu ,  Cheol Ho Park ,  Hae Sook Lee ,  Jin Hong Jeun ,  Young Su Chae ,  Gyoo Wan Han

IPC: B23K26/50 ,  B23K26/06

Abstract: A laser crystallization apparatus according to an embodiment includes a light source unit irradiating a laser beam; and an optical unit to which the laser beam is incident, wherein the optical unit includes a first portion and a second portion bonded to each other on a bonded surface, and a first width of the first portion and a second width of the second portion are the same as each other on the bonded surface based on a direction parallel to the incident direction of the laser beam.

公开(公告)号：US10991580B2

公开(公告)日：2021-04-27

申请号：US16204850

申请日：2018-11-29

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Akifumi Sangu ,  Gyoowan Han ,  Jekil Ryu ,  Kyungjae Lee

IPC: B23K26/064 ,  H01L21/02 ,  G02B27/28 ,  G01J1/42 ,  G02B27/10 ,  H01L27/12 ,  B23K26/067 ,  H01L21/67 ,  B23K26/03 ,  B23K26/08 ,  B23K26/70 ,  B23K26/352 ,  B23K26/06 ,  B23K26/354 ,  B23K26/00 ,  B23K101/40 ,  B23K103/00

Abstract: A laser crystallizing apparatus includes a first light source unit configured to emit a first input light having a linearly polarized laser beam shape. A second light source unit is configured to emit a second input light having a linearly polarized laser beam shape. A polarization optical system is configured to rotate the first input light and/or the second input light at a predetermined rotation angle. An optical system is configured to convert the first input light and the second input light, which pass through the polarization optical system, into an output light. A target substrate is seated on a stage and output light is directed onto the target substrate. A monitoring unit is configured to receive the first input light or the second input light from the polarization optical system and measure a laser beam quality thereof.

公开(公告)号：US11532476B2

公开(公告)日：2022-12-20

申请号：US17235178

申请日：2021-04-20

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Akifumi Sangu ,  Gyoowan Han ,  Jekil Ryu ,  Kyungjae Lee

IPC: H01L21/02 ,  G02B27/28 ,  G01J1/42 ,  G02B27/10 ,  B23K26/064 ,  H01L27/12 ,  B23K26/067 ,  H01L21/67 ,  B23K26/03 ,  B23K26/08 ,  B23K26/70 ,  B23K26/352 ,  B23K26/06 ,  B23K26/354 ,  B23K26/00 ,  B23K101/40 ,  B23K103/00

Abstract: A laser crystallizing apparatus includes a first light source unit configured to emit a first input light having a linearly polarized laser beam shape. A second light source unit is configured to emit a second input light having a linearly polarized laser beam shape. A polarization optical system is configured to rotate the first input light and/or the second input light at a predetermined rotation angle. An optical system is configured to convert the first input light and the second input light, which pass through the polarization optical system, into an output light. A target substrate is seated on a stage and output light is directed onto the target substrate. A monitoring unit is configured to receive the first input light or the second input light from the polarization optical system and measure a laser beam quality thereof.

公开(公告)号：US11253952B2

公开(公告)日：2022-02-22

申请号：US16408276

申请日：2019-05-09

Applicant: Samsung Display Co., Ltd.

Inventor： Akifumi Sangu ,  Alexander Voronov ,  Hyoung-Joo Kim ,  Eun Sun Choi ,  Emil Aslanov ,  Gyoo Wan Han

IPC: B23K26/064 ,  G02B27/00 ,  B23K26/06 ,  G02B26/10 ,  B23K26/0622 ,  B23K26/08 ,  B23K26/073 ,  B23K26/082

Abstract: A laser processing apparatus includes a light source configured to generate a laser beam, and a light converging optical system configured to converge laser beam to a focal point at an object to be processed, the light converging optical system including a through-hole optical element and a composite optical element under the through-hole optical element, wherein the through-hole optical element includes a first recess portion configured as a concave mirror at a lower surface of the through-hole optical element, and wherein an upper surface of the composite optical element is convex and includes a first region configured to reflect the laser beam and a second region configured to transmit the laser beam.