公开(公告)号：US09982165B2

公开(公告)日：2018-05-29

申请号：US15355917

申请日：2016-11-18

Applicant: SAMSUNG DISPLAY CO., LTD. ,  UBmaterials Inc.

Inventor： Byoung-Kwon Choo ,  Jin-Hyung Park ,  Jeong-Kyun Na ,  Joon-Hwa Bae ,  Byoung-Ho Cheong ,  Joo-Woan Cho ,  In-Sun Hwang

IPC: C09K13/04 ,  C09G1/02 ,  C09K3/14 ,  H01L27/12 ,  H01L29/786 ,  H01L21/321 ,  H01L27/32 ,  G02F1/1368

CPC classification number: C09G1/02 ,  B81C2201/0104 ,  C09K3/1409 ,  G02F1/1368 ,  G02F2202/104 ,  H01L21/3212 ,  H01L27/1222 ,  H01L27/1274 ,  H01L27/3262 ,  H01L29/66757 ,  H01L29/78675

Abstract: A polishing slurry for silicon, a method of polishing polysilicon, and a method of manufacturing a thin film transistor substrate, the slurry including a polishing particle; a dispersing agent including an anionic polymer, a hydroxyl acid, or an amino acid; a stabilizing agent including an organic acid, the organic acid including a carboxyl group; a hydrophilic agent including a hydrophilic group and a hydrophobic group, and water, wherein the polishing particle is included in the polishing slurry in an amount of about 0.1% by weight to about 10% by weight, based on a total weight of the slurry, a weight ratio of the polishing particle and the dispersing agent is about 1:0.01 to about 1:0.2, a weight ratio of the polishing particle and the stabilizing agent is about 1:0.001 to about 1:0.1, and a weight ratio of the polishing particle and the hydrophilic agent is about 1:0.01 to about 1:3.

公开(公告)号：US20160079338A1

公开(公告)日：2016-03-17

申请号：US14946231

申请日：2015-11-19

Applicant: Samsung Display Co., Ltd.

Inventor： Kyu-Sik Cho ,  Won-Kyu Lee ,  Tae-Hoon Yang ,  Byoung-Kwon Choo ,  Sang-Ho Moon ,  Bo-Kyung Choi ,  Yong-Hwan Park ,  Joon-Hoo Choi ,  Min-Chul Shin ,  Yun-Gyu Lee

IPC: H01L27/32

CPC classification number: H01L27/3279 ,  H01L27/124 ,  H01L27/1248 ,  H01L27/3244 ,  H01L27/3262 ,  H01L27/3265

Abstract: An organic light emitting diode display includes: a substrate including a first and a second gate electrode formed over a first and a second region, respectively, a first and a second gate insulator formed on the first and the second gate electrode, respectively, a first and a second semiconductor layer formed on the first and the second gate insulator, respectively, the first semiconductor layer including a first channel region, the second semiconductor layer including a second channel region, an interlayer insulator formed over the substrate and over at least part of the first and second semiconductor layers, a first and a second etching stop layer formed over the first and second channel regions, respectively, and surrounded by the interlayer insulator, and a first and a second source electrode and a first and a second drain electrode contacting the first and the second semiconductor layer, respectively, through the interlayer insulator.

Abstract translation: 一种有机发光二极管显示器包括：基板，分别包括形成在第一和第二区域上的第一和第二栅电极，分别形成在第一和第二栅电极上的第一和第二栅极绝缘体， 以及分别形成在所述第一和第二栅极绝缘体上的第二半导体层，所述第一半导体层分别包括第一沟道区，所述第二半导体层包括第二沟道区，在所述衬底上形成的层间绝缘体，以及至少部分 第一和第二半导体层，分别形成在第一和第二沟道区上并由层间绝缘体包围的第一和第二蚀刻停止层，以及第一和第二源电极和第一和第二漏电极接触 第一和第二半导体层分别通过层间绝缘体。

公开(公告)号：US20140202213A1

公开(公告)日：2014-07-24

申请号：US13889152

申请日：2013-05-07

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Cheol-Ho Park ,  Byoung-Kwon Choo ,  Eun-Cheol Kim ,  Hee-Geun Son ,  Jong-Hyun Yun

IPC: C01B33/02

CPC classification number: C01B33/021 ,  B23K26/128 ,  B23K26/704

Abstract: A laser annealing apparatus includes a lens unit configured to transmit a laser beam to be irradiated onto an irradiation target; a lens unit housing accommodating the lens unit and having an opening configured to allow the laser beam to pass through the opening; a blocking plate configured to block at least a portion of the laser beam reflected by the irradiation target after being transmitted through the lens unit to the irradiation target; and a cooling unit between the blocking plate and the lens unit housing.

Abstract translation: 激光退火装置包括：透镜单元，被配置为将要照射的激光束透射到照射目标上; 容纳透镜单元并具有允许激光束穿过开口的开口的透镜单元壳体; 阻挡板，被配置为在被透射到所述照射目标之后，阻挡由所述照射目标物反射的所述激光束的至少一部分; 以及在所述阻挡板和所述透镜单元壳体之间的冷却单元。

公开(公告)号：US09070904B2

公开(公告)日：2015-06-30

申请号：US14193227

申请日：2014-02-28

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Kyu-Sik Cho ,  Joon-Hoo Choi ,  Byoung-Kwon Choo ,  Min-Chul Shin ,  Tae-Hoon Yang ,  Won-Kyu Lee ,  Yun-Gyu Lee ,  Bo-Kyung Choi ,  Yong-Hwan Park ,  Sang-Ho Moon

IPC: H01L51/40 ,  H01L51/56 ,  H01L27/12 ,  H01L27/32

CPC classification number: H01L51/56 ,  H01L27/1255 ,  H01L27/1288 ,  H01L27/3262 ,  H01L27/3265

Abstract: An OLED display includes a first polysilicon layer pattern on a substrate having a first gate electrode, a second gate electrode, and a first capacitor electrode, a gate insulating layer pattern, a second polysilicon layer pattern including a first active layer, a second active layer, and a capacitor polycrystalline dummy layer, a third amorphous silicon layer pattern including first source and drain resistant contact layers on a predetermined region of the first active layer, second source and drain resistant contact layers on a predetermined region of the second active layer, and a capacitor amorphous dummy layer on the capacitor polycrystalline dummy layer, and a data metal layer pattern including first source/drain electrodes, second source/drain electrodes, and a second capacitor electrode.

Abstract translation: OLED显示器包括在具有第一栅电极，第二栅极和第一电容器电极的基板上的第一多晶硅层图案，栅极绝缘层图案，包括第一有源层的第二多晶硅层图案，第二有源层 以及电容器多晶虚拟层，在第一有源层的预定区域上包括第一源极和漏极接触层的第三非晶硅层图案，在第二有源层的预定区域上的第二源极和漏极接触层，以及 电容器多晶虚拟层上的电容器非晶虚拟层，以及包括第一源极/漏极，第二源极/漏极和第二电容器电极的数据金属层图案。

公开(公告)号：US20140260430A1

公开(公告)日：2014-09-18

申请号：US13923346

申请日：2013-06-20

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Byoung-Kwon Choo ,  Cheol-Ho Park ,  Hee-Geun Son ,  Do-Yeob Kim

IPC: H01S3/00

CPC classification number: B23K26/048 ,  B23K26/032

Abstract: A laser beam annealing apparatus includes a substrate support configured to support a substrate on which a silicon layer is formed, a laser beam irradiator configured to irradiate a laser beam onto the silicon layer, a photographic unit configured to obtain data with respect to at least a part of the substrate, and a position adjuster configured to adjust a position of at least one of the substrate support or the laser beam irradiator based on the data obtained by the photographic unit.

Abstract translation: 一种激光束退火装置，包括：基板支撑体，被配置为支撑其上形成有硅层的基板;激光束照射器，被配置为将激光束照射到所述硅层上;照相单元，被配置为获得关于至少 基板的一部分，以及位置调整器，其配置为基于由所述照相单元获得的数据来调整所述基板支撑件或所述激光束照射器中的至少一个的位置。

公开(公告)号：US20140226155A1

公开(公告)日：2014-08-14

申请号：US13922075

申请日：2013-06-19

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Byoung-Kwon Choo ,  Cheol-Ho Park ,  Hee-Geun Son ,  Do-Yeob Kim

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/956 ,  G01N2021/9513 ,  G06T2207/30148

Abstract: An apparatus for inspecting crystallization includes a substrate including a semiconductor layer, the semiconductor layer includes a plurality of crystallized regions separated from each other; a stage configured to change a position of the substrate, the substrate being seated thereon; a photographing unit configured to acquire image data regarding the semiconductor layer; an inspection unit configured to obtain inspection data regarding the semiconductor layer; and a control unit configured to output change data regarding a change in the position of the substrate according to the image data acquired by the photographing unit.

Abstract translation: 一种用于检查结晶的装置包括：包括半导体层的衬底，所述半导体层包括彼此分离的多个结晶区域; 被配置为改变所述基板的位置的台，所述基板位于其上; 拍摄单元，被配置为获取关于半导体层的图像数据; 检查单元，被配置为获得关于半导体层的检查数据; 以及控制单元，被配置为根据由所述拍摄单元获取的图像数据输出关于所述基板的位置的变化的改变数据。

公开(公告)号：US09620361B2

公开(公告)日：2017-04-11

申请号：US14600113

申请日：2015-01-20

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Byoung-Kwon Choo ,  Sang-Hoon Ahn ,  Byoung-Ho Cheong ,  Joo-Woan Cho ,  Hyun-Jin Cho ,  Soo-Yeon Han

IPC: H01L21/02 ,  H01L27/146

CPC classification number: H01L21/02683 ,  H01L21/02532 ,  H01L21/02686 ,  H01L21/02691 ,  H01L27/14698

Abstract: An apparatus for crystallizing an active layer of a thin film transistor, the apparatus includes a first laser irradiating a first beam toward a substrate, an amorphous layer on the substrate being crystallizable into the active layer of the thin film transistor by the first beam, and a second laser irradiating a second beam toward the substrate to heat the active layer, the second beam having an asymmetric intensity profile in a scanning direction of the first and second beams.

公开(公告)号：US09570534B2

公开(公告)日：2017-02-14

申请号：US14946231

申请日：2015-11-19

Applicant: Samsung Display Co., Ltd.

Inventor： Kyu-Sik Cho ,  Won-Kyu Lee ,  Tae-Hoon Yang ,  Byoung-Kwon Choo ,  Sang-Ho Moon ,  Bo-Kyung Choi ,  Yong-Hwan Park ,  Joon-Hoo Choi ,  Min-Chul Shin ,  Yun-Gyu Lee

IPC: H01L27/32 ,  H01L27/12

CPC classification number: H01L27/3279 ,  H01L27/124 ,  H01L27/1248 ,  H01L27/3244 ,  H01L27/3262 ,  H01L27/3265

Abstract: An organic light emitting diode display includes: a substrate including a first and a second gate electrode formed over a first and a second region, respectively, a first and a second gate insulator formed on the first and the second gate electrode, respectively, a first and a second semiconductor layer formed on the first and the second gate insulator, respectively, the first semiconductor layer including a first channel region, the second semiconductor layer including a second channel region, an interlayer insulator formed over the substrate and over at least part of the first and second semiconductor layers, a first and a second etching stop layer formed over the first and second channel regions, respectively, and surrounded by the interlayer insulator, and a first and a second source electrode and a first and a second drain electrode contacting the first and the second semiconductor layer, respectively, through the interlayer insulator.

Abstract translation: 一种有机发光二极管显示器包括：基板，分别包括形成在第一和第二区域上的第一和第二栅电极，分别形成在第一和第二栅电极上的第一和第二栅极绝缘体， 以及分别形成在所述第一和第二栅极绝缘体上的第二半导体层，所述第一半导体层分别包括第一沟道区，所述第二半导体层包括第二沟道区，在所述衬底上形成的层间绝缘体，以及至少部分 第一和第二半导体层，分别形成在第一和第二沟道区上并由层间绝缘体包围的第一和第二蚀刻停止层，以及第一和第二源电极和第一和第二漏电极接触 第一和第二半导体层分别通过层间绝缘体。

公开(公告)号：US09221122B2

公开(公告)日：2015-12-29

申请号：US13923346

申请日：2013-06-20

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Byoung-Kwon Choo ,  Cheol-Ho Park ,  Hee-Geun Son ,  Do-Yeob Kim

IPC: H01S3/00 ,  B23K26/04 ,  B23K26/03

CPC classification number: B23K26/048 ,  B23K26/032

Abstract: A method of controlling a laser beam annealing apparatus to manufacture a thin film transistor substrate, the method including: irradiating a laser beam emitted from a laser beam irradiator onto an amorphous silicon layer on a substrate supported by a substrate support; obtaining photographic data with respect to at least a part of the substrate by using a photographic unit; and adjusting a position of at least one of the substrate support or the laser beam irradiator by using a position adjuster based on the photographic data obtained by the photographic unit.

Abstract translation: 一种控制激光束退火装置来制造薄膜晶体管基板的方法，所述方法包括：将从激光束照射器发射的激光束照射到由基板支撑件支撑的基板上的非晶硅层上; 通过使用照相单元获得关于至少一部分基底的照相数据; 以及通过使用基于由所述照相单元获得的摄影数据的位置调节器来调整所述基板支撑件或所述激光束照射器中的至少一个的位置。

公开(公告)号：US09194815B2

公开(公告)日：2015-11-24

申请号：US13922075

申请日：2013-06-19

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Byoung-Kwon Choo ,  Cheol-Ho Park ,  Hee-Geun Son ,  Do-Yeob Kim

IPC: G01N21/95 ,  G01N21/956

CPC classification number: G01N21/9501 ,  G01N21/956 ,  G01N2021/9513 ,  G06T2207/30148

Abstract: An apparatus for inspecting crystallization includes a substrate including a semiconductor layer, the semiconductor layer includes a plurality of crystallized regions separated from each other; a stage configured to change a position of the substrate, the substrate being seated thereon; a photographing unit configured to acquire image data regarding the semiconductor layer; an inspection unit configured to obtain inspection data regarding the semiconductor layer; and a control unit configured to output change data regarding a change in the position of the substrate according to the image data acquired by the photographing unit.

Abstract translation: 一种用于检查结晶的装置包括：包括半导体层的衬底，所述半导体层包括彼此分离的多个结晶区域; 被配置为改变所述基板的位置的台，所述基板位于其上; 拍摄单元，被配置为获取关于半导体层的图像数据; 检查单元，被配置为获得关于半导体层的检查数据; 以及控制单元，被配置为根据由所述拍摄单元获取的图像数据输出关于所述基板的位置的变化的改变数据。