公开(公告)号：US20150275347A1

公开(公告)日：2015-10-01

申请号：US14740201

申请日：2015-06-15

Applicant: Samsung Display Co., Ltd.

Inventor： Sang-Yong Jeong ,  Myung-Ki Lee ,  Sang-Youn Kim ,  You-Sung Jeon

IPC: C23C14/04

CPC classification number: C23C14/042 ,  C23C14/54 ,  G01B11/14 ,  H01L21/67288 ,  H01L51/0011 ,  H01L51/56

Abstract: A thin film deposition apparatus includes: a chamber; a mask stage in the chamber and configured to support a mask; a jig in the chamber and above the mask stage, the jig being configured to move in a direction of the mask stage; and a rail in the chamber and configured to support the movement of the jig. Another thin film deposition apparatus includes a chamber, a mask stage positioned within the chamber and configured to support a mask, a camera part proximate to a side of the mask stage, and a jig above the mask stage and configured to move in a direction of the mask stage and over the camera part. The jig is further configured to radiate laser beams in a downward direction from the jig to obtain first scanning data regarding the mask stage and second scanning data regarding the camera part.

Abstract translation: 薄膜沉积设备包括：室; 在所述室中的掩模台，并且构造成支撑掩模; 在所述腔室中和所述掩模台上方的夹具，所述夹具被构造成沿所述掩模台的方向移动; 以及所述腔室中的导轨，并且构造成支撑所述夹具的移动。 另一薄膜沉积装置包括一个腔室，一个位于该腔室内并配置成支撑一个掩模，一个靠近该掩模台一侧的照相机部件和一个位于掩模台上方的夹具的掩模台， 面具舞台和相机部分。 夹具进一步构造成从夹具向下辐射激光束，以获得关于掩模台的第一扫描数据和关于相机部件的第二扫描数据。

公开(公告)号：US09435020B2

公开(公告)日：2016-09-06

申请号：US14740201

申请日：2015-06-15

Applicant: Samsung Display Co., Ltd.

Inventor： Sang-Yong Jeong ,  Myung-Ki Lee ,  Sang-Youn Kim ,  You-Sung Jeon

IPC: C23C14/56 ,  C23C14/04 ,  G01B11/14 ,  H01L51/00 ,  H01L51/56 ,  H01L21/67 ,  C23C14/54

CPC classification number: C23C14/042 ,  C23C14/54 ,  G01B11/14 ,  H01L21/67288 ,  H01L51/0011 ,  H01L51/56

Abstract: A thin film deposition apparatus includes: a chamber; a mask stage in the chamber and configured to support a mask; a jig in the chamber and above the mask stage, the jig being configured to move in a direction of the mask stage; and a rail in the chamber and configured to support the movement of the jig. Another thin film deposition apparatus includes a chamber, a mask stage positioned within the chamber and configured to support a mask, a camera part proximate to a side of the mask stage, and a jig above the mask stage and configured to move in a direction of the mask stage and over the camera part. The jig is further configured to radiate laser beams in a downward direction from the jig to obtain first scanning data regarding the mask stage and second scanning data regarding the camera part.

公开(公告)号：US09115427B2

公开(公告)日：2015-08-25

申请号：US14042413

申请日：2013-09-30

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Sang-Yong Jeong ,  Myung-Ki Lee ,  Sang-Youn Kim ,  You-Sung Jeon

IPC: C23C14/54 ,  G01B11/14 ,  H01L51/00 ,  H01L51/56 ,  H01L21/67 ,  C23C14/04

CPC classification number: C23C14/042 ,  C23C14/54 ,  G01B11/14 ,  H01L21/67288 ,  H01L51/0011 ,  H01L51/56

Abstract: A thin film deposition apparatus includes: a chamber; a mask stage in the chamber and configured to support a mask; a jig in the chamber and above the mask stage, the jig being configured to move in a direction of the mask stage; and a rail in the chamber and configured to support the movement of the jig. Another thin film deposition apparatus includes a chamber, a mask stage positioned within the chamber and configured to support a mask, a camera part proximate to a side of the mask stage, and a jig above the mask stage and configured to move in a direction of the mask stage and over the camera part. The jig is further configured to radiate laser beams in a downward direction from the jig to obtain first scanning data regarding the mask stage and second scanning data regarding the camera part.

Abstract translation: 薄膜沉积设备包括：室; 在所述室中的掩模台，并且构造成支撑掩模; 在所述腔室中和所述掩模台上方的夹具，所述夹具被构造成沿所述掩模台的方向移动; 以及所述腔室中的导轨，并且构造成支撑所述夹具的移动。 另一薄膜沉积装置包括一个腔室，一个位于该腔室内并配置成支撑一个掩模，一个靠近该掩模台一侧的照相机部件和一个位于掩模台上方的夹具的掩模台， 面具舞台和相机部分。 该夹具进一步构造成从夹具沿向下的方向辐射激光束，以获得关于掩模台的第一扫描数据和关于相机部件的第二扫描数据。

公开(公告)号：US20140308763A1

公开(公告)日：2014-10-16

申请号：US14042413

申请日：2013-09-30

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Sang-Yong Jeong ,  Myung-Ki Lee ,  Sang-Youn Kim ,  You-Sung Jeon

IPC: H01L21/66 ,  H01L21/68 ,  H01L21/02

CPC classification number: C23C14/042 ,  C23C14/54 ,  G01B11/14 ,  H01L21/67288 ,  H01L51/0011 ,  H01L51/56

Abstract: A thin film deposition apparatus includes: a chamber; a mask stage in the chamber and configured to support a mask; a jig in the chamber and above the mask stage, the jig being configured to move in a direction of the mask stage; and a rail in the chamber and configured to support the movement of the jig. Another thin film deposition apparatus includes a chamber, a mask stage positioned within the chamber and configured to support a mask, a camera part proximate to a side of the mask stage, and a jig above the mask stage and configured to move in a direction of the mask stage and over the camera part. The jig is further configured to radiate laser beams in a downward direction from the jig to obtain first scanning data regarding the mask stage and second scanning data regarding the camera part.

Abstract translation: 薄膜沉积设备包括：室; 在所述室中的掩模台，并且构造成支撑掩模; 在所述腔室中和所述掩模台上方的夹具，所述夹具被构造成沿所述掩模台的方向移动; 以及所述腔室中的导轨，并且构造成支撑所述夹具的移动。 另一薄膜沉积装置包括一个腔室，一个位于该腔室内并配置成支撑一个掩模，一个靠近该掩模台一侧的照相机部件和一个位于掩模台上方的夹具的掩模台， 面具舞台和相机部分。 夹具进一步构造成从夹具向下辐射激光束，以获得关于掩模台的第一扫描数据和关于相机部件的第二扫描数据。