SENSOR
    2.
    发明申请
    SENSOR 有权
    传感器

    公开(公告)号:US20130319115A1

    公开(公告)日:2013-12-05

    申请号:US13899204

    申请日:2013-05-21

    Abstract: Disclosed herein is a sensor. A sensor according to the present invention includes a mass body, a fixing part disposed so as to be spaced apart from the mass body, a first flexible part connecting the mass body with the fixing part in a Y-axis direction, a second flexible part connecting the mass body with the fixing part in an X-axis direction, and a membrane disposed over the second flexible part and having a width in a Y-axis direction larger than a width in a Y-axis direction of the second flexible part. Here, a width of an X-axis direction of the first flexible part is larger than a thickness in a Z-axis direction thereof and a thickness in a Z-axis direction of the second flexible part is larger than a width in a Y-axis direction thereof.

    Abstract translation: 这里公开了一种传感器。 根据本发明的传感器包括质量体,与质量体隔开设置的固定部,将质量体与固定部在Y轴方向连接的第一柔性部,第二挠性部 将所述质量体与所述固定部在X轴方向上连接,以及设置在所述第二柔性部上并具有比所述第二柔性部的Y轴方向的宽度大的Y轴方向的膜。 这里,第一柔性部的X轴方向的宽度大于其Z轴方向的厚度,第二柔性部的Z轴方向的厚度大于Y轴方向的宽度, 轴方向。

    Acceleration sensor
    4.
    发明授权
    Acceleration sensor 有权
    加速度传感器

    公开(公告)号:US09389241B2

    公开(公告)日:2016-07-12

    申请号:US13899204

    申请日:2013-05-21

    Abstract: Disclosed herein is a sensor. A sensor according to the present invention includes a mass body, a fixing part disposed so as to be spaced apart from the mass body, a first flexible part connecting the mass body with the fixing part in a Y-axis direction, a second flexible part connecting the mass body with the fixing part in an X-axis direction, and a membrane disposed over the second flexible part and having a width in a Y-axis direction larger than a width in a Y-axis direction of the second flexible part. Here, a width of an X-axis direction of the first flexible part is larger than a thickness in a Z-axis direction thereof and a thickness in a Z-axis direction of the second flexible part is larger than a width in a Y-axis direction thereof.

    Abstract translation: 这里公开了一种传感器。 根据本发明的传感器包括质量体,与质量体隔开设置的固定部,将质量体与固定部在Y轴方向连接的第一柔性部,第二挠性部 将所述质量体与所述固定部在X轴方向上连接,以及设置在所述第二柔性部上并具有比所述第二柔性部的Y轴方向的宽度大的Y轴方向的膜。 这里,第一柔性部的X轴方向的宽度大于其Z轴方向的厚度,第二柔性部的Z轴方向的厚度大于Y轴方向的宽度, 轴方向。

    Angular velocity sensor
    5.
    发明授权
    Angular velocity sensor 有权
    角速度传感器

    公开(公告)号:US09038464B2

    公开(公告)日:2015-05-26

    申请号:US14140917

    申请日:2013-12-26

    CPC classification number: G01C19/56 G01C19/5712

    Abstract: Disclosed herein is an angular velocity sensor including: first and second mass bodies; a first frame provided at an outer side of the first and second mass bodies; a first flexible part connecting the first and second mass bodies to the first frame in a Y axis direction, respectively; a second flexible part connecting the first and second mass bodies to the first frame in an X axis direction, respectively; a second frame provided at an outer side of the first frame; a third flexible part connecting the first and second frames to each other in the X axis direction; and a fourth flexible part connecting the first and second frames to each other in the Y axis direction, wherein the first frame has a thickness in a Z axis direction thinner than that of the second frame.

    Abstract translation: 本文公开了一种角速度传感器,包括:第一和第二质量体; 设置在所述第一和第二质量体的外侧的第一框架; 分别将第一和第二质量体连接到第一框架的Y轴方向上的第一柔性部分; 分别在X轴方向上将所述第一和第二质量体连接到所述第一框架的第二挠性部分; 设置在所述第一框架的外侧的第二框架; 将所述第一和第二框架在X轴方向上彼此连接的第三柔性部件; 以及将第一和第二框架在Y轴方向上彼此连接的第四柔性部件,其中第一框架的Z轴方向的厚度比第二框架的厚度薄。

    ANGULAR VELOCITY SENSOR
    7.
    发明申请
    ANGULAR VELOCITY SENSOR 有权
    角速度传感器

    公开(公告)号:US20140182375A1

    公开(公告)日:2014-07-03

    申请号:US14140917

    申请日:2013-12-26

    CPC classification number: G01C19/56 G01C19/5712

    Abstract: Disclosed herein is an angular velocity sensor including: first and second mass bodies; a first frame provided at an outer side of the first and second mass bodies; a first flexible part connecting the first and second mass bodies to the first frame in a Y axis direction, respectively; a second flexible part connecting the first and second mass bodies to the first frame in an X axis direction, respectively; a second frame provided at an outer side of the first frame; a third flexible part connecting the first and second frames to each other in the X axis direction; and a fourth flexible part connecting the first and second frames to each other in the Y axis direction, wherein the first frame has a thickness in a Z axis direction thinner than that of the second frame.

    Abstract translation: 本文公开了一种角速度传感器,包括:第一和第二质量体; 设置在所述第一和第二质量体的外侧的第一框架; 分别将第一和第二质量体连接到第一框架的Y轴方向上的第一柔性部分; 分别在X轴方向上将所述第一和第二质量体连接到所述第一框架的第二挠性部分; 设置在所述第一框架的外侧的第二框架; 将所述第一和第二框架在X轴方向上彼此连接的第三柔性部件; 以及将第一和第二框架在Y轴方向上彼此连接的第四柔性部件,其中,第一框架的Z轴方向的厚度比第二框架的厚度薄。

    MICRO ELECTRO MECHANICAL SYSTEMS DEVICE
    8.
    发明申请
    MICRO ELECTRO MECHANICAL SYSTEMS DEVICE 有权
    微电子机械系统设备

    公开(公告)号:US20140084393A1

    公开(公告)日:2014-03-27

    申请号:US14030541

    申请日:2013-09-18

    Abstract: Disclosed herein is a micro electro mechanical systems (MEMS) device including: a mass body; a first fixed part provided at an outer side of the mass body; and a first flexible part having one end connected to a distal end of the mass body and the other end connected to the first fixed part, wherein the mass body is rotatably connected to the first flexible part.

    Abstract translation: 本文公开了一种微机电系统(MEMS)装置,包括:质量体; 设置在所述质量体的外侧的第一固定部; 以及第一柔性部件,其一端连接到质量体的远端,另一端连接到第一固定部分,其中质量体可旋转地连接到第一柔性部分。

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