HUMIDITY SENSOR AND MANUFACTURING METHOD THEREOF
    2.
    发明申请
    HUMIDITY SENSOR AND MANUFACTURING METHOD THEREOF 审中-公开
    湿度传感器及其制造方法

    公开(公告)号:US20150185176A1

    公开(公告)日:2015-07-02

    申请号:US14221007

    申请日:2014-03-20

    CPC classification number: G01N27/223

    Abstract: There is provided a humidity sensor including: a substrate including an insulation film deposited on a surface thereof; a lower electrode formed on the substrate and including a contact extension part; a moisture sensing layer formed of a polymer material, provided on the lower electrode, and partially exposed through the contact extension part; and an upper electrode formed on the moisture sensing layer and including an open portion so as to partially expose the moisture sensing layer, wherein the contact extension part is in communication with the outside so that external air contacts the moisture sensing layer exposed through the contact extension part.

    Abstract translation: 提供了一种湿度传感器,包括:基板,其包括沉积在其表面上的绝缘膜; 形成在所述基板上并包括接触延伸部的下电极; 由聚合物材料形成的湿度感测层,设置在下部电极上,并通过接触延伸部分露出; 以及形成在所述湿度感测层上的上电极,并且包括开口部分以部分地暴露所述湿度感测层,其中所述接触延伸部分与外部连通,使得外部空气接触通过所述接触延伸部暴露的湿度感测层 部分。

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