Semiconductor device and method for manufacturing same

    公开(公告)号:US12062655B2

    公开(公告)日:2024-08-13

    申请号:US17615390

    申请日:2020-05-21

    Applicant: ROHM CO., LTD.

    Inventor: Jun Takaoka

    Abstract: A method for manufacturing a semiconductor device is provided in which a semiconductor element that generates heat during operation is formed in an active region of a semiconductor substrate and a temperature sensitive diode sensor arranged to detect temperature is formed in a temperature sensitive diode region of the semiconductor substrate. The method includes: forming a polysilicon layer that composes the temperature sensitive diode sensor in the temperature sensitive diode region, forming a mask, and introducing impurities through the mask into the semiconductor substrate and the polysilicon layer. The mask has an element pattern having an element opening through which a region composing the semiconductor element is exposed in the active region, a diode pattern having a diode opening through which a portion of the temperature sensitive diode region is exposed, and a monitoring pattern provided within the diode pattern with a size smaller than that of the diode opening.

    THERMAL SENSOR DEVICE BY BACK END OF LINE METAL RESISTOR

    公开(公告)号:US20240249991A1

    公开(公告)日:2024-07-25

    申请号:US18156779

    申请日:2023-01-19

    CPC classification number: H01L23/34 H01L23/5226 H01L23/5228 H01L23/5283

    Abstract: A semiconductor structure includes a substrate having a front side and a back side, one or more dielectric layers over the front side, and a conductive structure. The one or more dielectric layers include a thermal sensor region and two dummy regions sandwiching the thermal sensor region along a second direction from a top view. The thermal sensor region and the two dummy regions extend longitudinally along a first direction generally perpendicular to the second direction from the top view. The conductive structure is embedded in the thermal sensor region of the one or more dielectric layers. The conductive structure includes conductive lines parallel to each other and extending longitudinally along the first direction, and conductive bars and vias electrically connecting the conductive lines. The conductive lines in a same dielectric layer of the one or more dielectric layers are electrically connected one by one zigzaggedly from the top view.

    SEMICONDUCTOR DEVICE
    7.
    发明公开

    公开(公告)号:US20240170376A1

    公开(公告)日:2024-05-23

    申请号:US18495043

    申请日:2023-10-26

    Abstract: A semiconductor device includes: a conductive substrate; a plurality of semiconductor chips each having a first main electrode on a bottom surface side and a second main electrode on a top surface side, the plural semiconductor chips being arranged to form a first column and a second column connected parallel to each other on the conductive substrate; and a control wiring substrate including an insulating layer, a plurality of top-surface conductive layers provided on a top surface of the insulating layer, and a plurality of bottom-surface conductive layers each having a narrower width than the insulating layer and provided on a bottom surface of the insulating layer, the bottom-surface conductive layers being arranged on the conductive substrate between the first column and the second column of the semiconductor chips.

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