METHOD FOR MANUFACTURING SEMICONDUCTOR MEMORY DEVICE

    公开(公告)号:US20230200059A1

    公开(公告)日:2023-06-22

    申请号:US17929270

    申请日:2022-09-01

    CPC classification number: H01L27/10897 H01L27/10814 H01L27/10894

    Abstract: A method for manufacturing a semiconductor memory device comprises providing a substrate, etching a portion of the substrate that forms a trench therein, forming an element isolation film that fills the trench and defines an active area, herein the element isolation film includes a first liner that covers an inner sidewall and a bottom surface of the trench, wherein the first liner is recessed and exposes a corner portion of the substrate, doping nitrogen into the substrate, and forming a pre-gate insulating film that extends along and on the exposed corner portion of the substrate and an upper surface of the substrate. The pre-gate insulating film includes a first portion on the upper surface of the substrate, and a second portion on the corner portion of the substrate. A thickness of the first portion is less than a thickness of the second portion.

    Touch screen controller using adaptive filter control and touch screen system having the same

    公开(公告)号:US09886136B2

    公开(公告)日:2018-02-06

    申请号:US15189647

    申请日:2016-06-22

    CPC classification number: G06F3/0418 G06F3/044

    Abstract: A touch screen controller controlling a capacitive touch screen includes a first comparator that compares a reference signal with a sensing signal, and generates a first output signal. The capacitive touch screen includes capacitive touch sensors connected to a sensing line and a drive line, and that sense a touch event. The sensing signal is output from the sensing line. The touch screen controller further includes a filter that generates a second output signal by integrating the first output signal in each sensing cycle of the filter, an analog-to-digital converter that converts the second output signal to a digital signal, and a controller that determines at least one of whether a noise is generated and whether the touch event is generated based on a reference digital signal and the digital signal, and that adjusts the number of the sensing cycles of the filter based on a result of the determination.

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