公开(公告)号：US12283502B2

公开(公告)日：2025-04-22

申请号：US17543025

申请日：2021-12-06

Applicant: Samsung Electronics Co., Ltd.

Inventor： Young Wook Kim ,  Sang Min Kim ,  Ji Hun Kim ,  Gi-Nam Park ,  Chul-Jun Park ,  Yong-Jun Ahn ,  Youn Gon Oh ,  Byung Kook Yoo ,  Hyun Woo Lee ,  Jeong Hun Lim

IPC: G06F7/00 ,  H01L21/67 ,  H01L21/677

Abstract: A substrate transfer device includes a transfer unit configured to transfer, in a first direction, a carrier in which substrates are stored, an upper interface unit configured to move the transfer unit, a lower interface unit configured to receive the carrier from the transfer unit, and a controller configured to control the upper interface unit and the lower interface unit integrally such that the transfer unit and the carrier move in the first direction at the same time.

公开(公告)号：US20220336241A1

公开(公告)日：2022-10-20

申请号：US17543025

申请日：2021-12-06

Applicant: Samsung Electronics Co., Ltd.

Inventor： Young Wook Kim ,  Sang Min Kim ,  Ji Hun Kim ,  Gi-Nam Park ,  Chul-Jun Park ,  Yong-Jun Ahn ,  Youn Gon Oh ,  Byung Kook Yoo ,  Hyun Woo Lee ,  Jeong Hun Lim

IPC: H01L21/67 ,  H01L21/677

Abstract: A substrate transfer device includes a transfer unit configured to transfer, in a first direction, a carrier in which substrates are stored, an upper interface unit configured to move the transfer unit, a lower interface unit configured to receive the carrier from the transfer unit, and a controller configured to control the upper interface unit and the lower interface unit integrally such that the transfer unit and the carrier move in the first direction at the same time.