Methods of Fabricating Nonvolatile Memory Devices and Related Devices
    3.
    发明申请
    Methods of Fabricating Nonvolatile Memory Devices and Related Devices 有权
    制造非易失性存储器件和相关器件的方法

    公开(公告)号:US20130183818A1

    公开(公告)日:2013-07-18

    申请号:US13742554

    申请日:2013-01-16

    Abstract: Provided is a fabricating method of a nonvolatile memory. The fabricating method includes forming a plurality of gates extending in a first direction on a substrate to be adjacent to each other, forming a gap-fill layer filling at least a portion of a space between the plurality of gates, forming a supporter pattern supporting the plurality of gates on the plurality of gates and the gap-fill layer, and forming an air gap in the space between the plurality of gates by removing the gap-fill layer.

    Abstract translation: 提供了一种非易失性存储器的制造方法。 该制造方法包括:形成在基板上沿第一方向延伸的多个栅极彼此相邻,形成填充多个栅极之间的空间的至少一部分的间隙填充层,形成支撑图案的支撑图案 多个栅极上的多个栅极和间隙填充层,并且通过去除间隙填充层在多个栅极之间的空间中形成气隙。

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