SEMICONDUCTOR DEVICE
    1.
    发明公开

    公开(公告)号:US20240213146A1

    公开(公告)日:2024-06-27

    申请号:US18352552

    申请日:2023-07-14

    CPC classification number: H01L23/5226 H01L23/528 H01L27/0924

    Abstract: A semiconductor device according to the disclosure includes: a substrate including a first side and a second side opposite each other with a thickness therebetween, a first wire disposed on the first side of the substrate, a first dummy wire disposed on the first side of the substrate and spaced apart from the first wire, a second wire disposed on the second side of the substrate, a second dummy wire disposed on the second side of the substrate and spaced apart from the second wire, a through via passing through the substrate and connecting the first wire and the second wire, and a plurality of dummy through vias passing through the substrate , wherein the plurality of dummy through vias are laterally offset and physically separated from the first wire and the second wire, wherein a center of at least one of the plurality of dummy through vias is laterally offset from an edge of at least one of the first dummy wire and the second dummy wire.

    SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
    3.
    发明申请
    SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME 有权
    半导体器件及其制造方法

    公开(公告)号:US20160043197A1

    公开(公告)日:2016-02-11

    申请号:US14820564

    申请日:2015-08-07

    CPC classification number: H01L29/6681 H01L21/31116 H01L21/76897 H01L29/6656

    Abstract: Provided are a semiconductor device and a fabrication method thereof. The semiconductor device may include a fin-shaped active pattern and a gate electrode provided on a substrate, first and second spacers provided on a sidewall of the gate electrode, impurity regions provided at both sides of the gate electrode, a contact plug electrically connected to one of the impurity regions, and a third spacer enclosing the contact plug and having a top surface positioned at substantially the same level as a top surface of the contact plug.

    Abstract translation: 提供半导体器件及其制造方法。 半导体器件可以包括鳍形有源图案和设置在基板上的栅电极,设置在栅电极的侧壁上的第一和第二间隔物,设置在栅电极两侧的杂质区,电连接到 一个杂质区,以及包围该接触插塞的第三间隔件,并且具有位于该接触插塞顶表面基本相同高度的顶表面。

    SEMICONDUCTOR DEVICE AND FABRICATING METHOD THEREOF
    4.
    发明申请
    SEMICONDUCTOR DEVICE AND FABRICATING METHOD THEREOF 有权
    半导体器件及其制造方法

    公开(公告)号:US20140374830A1

    公开(公告)日:2014-12-25

    申请号:US14313435

    申请日:2014-06-24

    Abstract: A semiconductor device includes a fin region with long and short sides, a first field insulating layer including a top surface lower than that of the fin region and adjacent to a side surface of the short side of the fin region, a second field insulating layer including a top surface lower than that of the fin region and adjacent to a side surface of the long side of the fin region, an etch barrier pattern on the first field insulating layer, a first gate on the fin region and the second field insulating layer to face a top surface of the fin region and side surfaces of the long sides of the fin region. A second gate is on the etch barrier pattern overlapping the first field insulating layer. A source/drain region is between the first gate and the second gate, in contact with the etch barrier pattern.

    Abstract translation: 半导体器件包括具有短边和短边的鳍片区域,第一场绝缘层,其包括比鳍片区域的顶表面低的顶表面,并且与鳍片区域的短边的侧表面相邻;第二场绝缘层,包括 与翅片区域相比较靠近散热片区域的长边侧表面的顶表面,第一场绝缘层上的蚀刻阻挡图案,鳍状区域上的第一栅极和第二场绝缘层, 面对翅片区域的顶表面和翅片区域的长边的侧表面。 第二栅极位于与第一场绝缘层重叠的蚀刻阻挡图案上。 源极/漏极区在第一栅极和第二栅极之间,与蚀刻阻挡图案接触。

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