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公开(公告)号:US20190109175A1
公开(公告)日:2019-04-11
申请号:US15953573
申请日:2018-04-16
Applicant: Samsung Electronics Co., Ltd.
Inventor: Kyo Seop Kim , Chang Woo Sun , Gyu Hwan Oh , Joon Kim , Joon Youn Hwang
IPC: H01L27/24 , H01L45/00 , H01L23/525
CPC classification number: H01L27/2427 , H01L23/525 , H01L27/2463 , H01L27/2481 , H01L45/06 , H01L45/1233 , H01L45/144
Abstract: A semiconductor device is provided including a base insulating layer on a substrate; a first conductive line that extends in a first direction on the base insulating layer; data storage structures on the first conductive line; selector structures on the data storage structures, each of the selector structures including a lower selector electrode, a selector, and an upper selector electrode; an insulating layer in a space between the selector structures; and a second conductive line disposed on the selector structures and the insulating layer and extended in a second direction intersecting the first direction. An upper surface of the insulating layer is higher than an upper surface of the upper selector electrode.
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公开(公告)号:US20250107066A1
公开(公告)日:2025-03-27
申请号:US18643311
申请日:2024-04-23
Applicant: Samsung Electronics Co., Ltd.
Inventor: Bo Won Yoo , Jin Woo Han , Seok Han Park , Sung-Min Park , Gyu Hwan Oh
Abstract: A semiconductor memory device includes a cell region element separation film that is on a substrate and includes first and second cell region side walls; an active pattern that is on the substrate; a word line that is on the first side wall of the active pattern; a back gate electrode that is on the second side wall of the active pattern; a bit line that is electrically connected to the first side of the active pattern; and a data storage pattern that is electrically connected to the second side of the active pattern, where the word line includes an electrode part and a plug connecting part, and where the plug connecting part of the word line includes a first connecting extending part and a second connecting extending part.
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公开(公告)号:US10833124B2
公开(公告)日:2020-11-10
申请号:US15953573
申请日:2018-04-16
Applicant: Samsung Electronics Co., Ltd.
Inventor: Kyo Seop Kim , Chang Woo Sun , Gyu Hwan Oh , Joon Kim , Joon Youn Hwang
IPC: H01L23/525 , H01L27/24 , H01L45/00
Abstract: A semiconductor device is provided including a base insulating layer on a substrate; a first conductive line that extends in a first direction on the base insulating layer; data storage structures on the first conductive line; selector structures on the data storage structures, each of the selector structures including a lower selector electrode, a selector, and an upper selector electrode; an insulating layer in a space between the selector structures; and a second conductive line disposed on the selector structures and the insulating layer and extended in a second direction intersecting the first direction. An upper surface of the insulating layer is higher than an upper surface of the upper selector electrode.
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公开(公告)号:US20250081445A1
公开(公告)日:2025-03-06
申请号:US18660803
申请日:2024-05-10
Applicant: Samsung Electronics Co., Ltd.
Inventor: Bo Won Yoo , Seok Han Park , Keun Ui Kim , Yu Jin Kim , Joong Chan Shin , Gyu Hwan Oh , Eun Suk Jang , Jin Woo Han
IPC: H10B12/00
Abstract: A semiconductor memory device includes a bit line extending in a first direction on a substrate, an active pattern on the bit line, a word line on a first sidewall of the active pattern and extending in a second direction, a back gate electrode on a second sidewall of the active pattern and extending in the second direction, a gate isolation pattern on the first sidewall of the active pattern and including a low-k pattern extending in the second direction, and a data storage pattern connected to the second surface of the active pattern. The word line is between the active pattern and the gate isolation pattern, and a vertical distance between the bit line and the word line is greater than a vertical distance between the bit line and the low-k pattern.
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