公开(公告)号：US20180122676A1

公开(公告)日：2018-05-03

申请号：US15707023

申请日：2017-09-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： Dae Wee Kong ,  Kang Min Park ,  Chul Hwan Choi ,  Yong Joon Hong ,  Kang Soo Kim ,  Sang-Ho Roh ,  Heok Jae Lee ,  Sang Jin Choi

IPC: H01L21/677 ,  H01L21/673 ,  F24F3/16 ,  F04D29/70

Abstract: A substrate transfer apparatus includes: a chamber including a lower surface, an upper surface opposing the lower surface, and a side surface extending between the lower surface and the upper surface; and a fan filter unit disposed on the upper surface of the chamber and configured to introduce air into the chamber. The chamber includes an inclined surface extending from the upper surface to the side surface and positioned to a side of the fan filter unit.

公开(公告)号：US10522379B2

公开(公告)日：2019-12-31

申请号：US15707023

申请日：2017-09-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： Dae Wee Kong ,  Kang Min Park ,  Chul Hwan Choi ,  Yong Joon Hong ,  Kang Soo Kim ,  Sang Ho Roh ,  Heok Jae Lee ,  Sang Jin Choi

IPC: B01D9/00 ,  H01L21/677 ,  H01L21/673 ,  F24F3/16 ,  F04D29/70 ,  F04D25/16 ,  F24F13/08 ,  B01D50/00 ,  B01D46/10 ,  B01D46/00 ,  F04D29/66 ,  F24F1/0071

Abstract: A substrate transfer apparatus includes: a chamber including a lower surface, an upper surface opposing the lower surface, and a side surface extending between the lower surface and the upper surface; and a fan filter unit disposed on the upper surface of the chamber and configured to introduce air into the chamber. The chamber includes an inclined surface extending from the upper surface to the side surface and positioned to a side of the fan filter unit.