公开(公告)号：US10982782B2

公开(公告)日：2021-04-20

申请号：US16544513

申请日：2019-08-19

Applicant: Samsung Electronics Co., Ltd.

Inventor： Dae Wee Kong ,  Se Jin Kyung ,  Chul Hwan Choi

IPC: F16K11/10 ,  F15D1/02

Abstract: A valve apparatus includes a valve block with a main flow path, a first valve installed on the valve block and connected to the main flow path so that when the first valve turns on, a first fluid is supplied from the main flow path to a process chamber via the first valve, and a second valve installed on the valve block and connected to the main flow path so that when the first valve turns off and the second valve turns on, a second fluid is supplied from the main flow path to a waste gas treatment system via the second valve. The main flow path is disposed parallel to a central axis passing through a center of the valve block and two opposing surfaces of the valve block perpendicularly thereto. The main flow path is disposed to be offset from the central axis toward the first valve.

公开(公告)号：US10522379B2

公开(公告)日：2019-12-31

申请号：US15707023

申请日：2017-09-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： Dae Wee Kong ,  Kang Min Park ,  Chul Hwan Choi ,  Yong Joon Hong ,  Kang Soo Kim ,  Sang Ho Roh ,  Heok Jae Lee ,  Sang Jin Choi

IPC: B01D9/00 ,  H01L21/677 ,  H01L21/673 ,  F24F3/16 ,  F04D29/70 ,  F04D25/16 ,  F24F13/08 ,  B01D50/00 ,  B01D46/10 ,  B01D46/00 ,  F04D29/66 ,  F24F1/0071

Abstract: A substrate transfer apparatus includes: a chamber including a lower surface, an upper surface opposing the lower surface, and a side surface extending between the lower surface and the upper surface; and a fan filter unit disposed on the upper surface of the chamber and configured to introduce air into the chamber. The chamber includes an inclined surface extending from the upper surface to the side surface and positioned to a side of the fan filter unit.

公开(公告)号：US20240200190A1

公开(公告)日：2024-06-20

申请号：US18381006

申请日：2023-10-17

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Dae Wee Kong ,  Taewon Lee ,  Sangho Roh ,  SongYi Baek

IPC: C23C16/455 ,  H01J37/32

CPC classification number: C23C16/45565 ,  H01J37/3244 ,  H01J37/32091 ,  H01J2237/3321

Abstract: A shower head may include a lower shower head part including a lower plate. The lower plate includes a lower plate, the lower plate includes a plurality of gas holes, the plurality of gas holes includes: a vertical hole vertically penetrating the lower plate in a first direction; and an inclined hole penetrating the lower plate in a second direction, which is inclined at an acute angle with respect to the first direction of the vertical hole, the vertical hole has a first diameter and the inclined hole has a second diameter which is different than the first diameter.

公开(公告)号：US20180122676A1

公开(公告)日：2018-05-03

申请号：US15707023

申请日：2017-09-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： Dae Wee Kong ,  Kang Min Park ,  Chul Hwan Choi ,  Yong Joon Hong ,  Kang Soo Kim ,  Sang-Ho Roh ,  Heok Jae Lee ,  Sang Jin Choi

IPC: H01L21/677 ,  H01L21/673 ,  F24F3/16 ,  F04D29/70

Abstract: A substrate transfer apparatus includes: a chamber including a lower surface, an upper surface opposing the lower surface, and a side surface extending between the lower surface and the upper surface; and a fan filter unit disposed on the upper surface of the chamber and configured to introduce air into the chamber. The chamber includes an inclined surface extending from the upper surface to the side surface and positioned to a side of the fan filter unit.