公开(公告)号：US20240085777A1

公开(公告)日：2024-03-14

申请号：US18326659

申请日：2023-05-31

Applicant: Samsung Electronics Co., Ltd.

Inventor： Dae Young PARK ,  Jeong Hoon KO ,  Seong Ryeol KIM ,  Young-Gu KIM ,  Tae Hoon KIM ,  Hyun Joong KIM ,  Young Ju LEE

IPC: G03F1/36 ,  G03F1/80 ,  G03F1/84 ,  G03F7/00 ,  G03F7/20

CPC classification number: G03F1/36 ,  G03F1/80 ,  G03F1/84 ,  G03F7/70625 ,  G03F7/70683 ,  G03F7/706841

Abstract: Provided is a process proximity effect correction method capable of efficiently improving the dispersion of patterns. There is a process proximity effect correction method according to some embodiments, the process proximity effect correction method of a process proximity effect correction device for performing process proximity effect correction (PPC) of a plurality of patterns using a machine learning module executed by a processor, comprising: training a sensitivity model by inputting a layout image of the plurality of patterns and a layout critical dimension (CD) of the plurality of patterns into the machine learning module; estimating an after cleaning inspection critical dimension (ACI-CD) sensitivity prediction value of the plurality of patterns by inferring an ACI-CD prediction value of the plurality of patterns; and determining a correction rate of the layout CD of the plurality of patterns using the estimated sensitivity prediction value.

公开(公告)号：US20180351763A1

公开(公告)日：2018-12-06

申请号：US15778801

申请日：2016-11-24

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyun-Woo OCK ,  Sung Bin IM ,  Young Min KO ,  Hyun Joong KIM ,  Hyun Jin OH ,  Young Seon KONG ,  Min Su KIM ,  Seok Min BAE ,  Suk Tae CHOI ,  Jung Mo YEON ,  Lye Suk LEE

IPC: H04L12/28 ,  H04W12/08 ,  H04W12/06 ,  H04L29/06 ,  H04L29/08 ,  H04W4/70

Abstract: A smart home service which is capable of providing an environment in which calling a control command for a device is available via a user terminal protocol to control between the device and a user terminal based on different type of protocol and a control method for the same. The smart home service server connecting at least one device operated based on a first protocol to at least one user terminal operated based on a second protocol, includes an application programming interface (API) controller configured to allow a control command for the at least one device to be called via the second protocol of the at least one user terminal; a filter configured to convert the called control command according to the first protocol; and a control command transmitter configured to transmit the control command converted according to the first protocol, to the at least one device.