公开(公告)号：US09261532B1

公开(公告)日：2016-02-16

申请号：US14694115

申请日：2015-04-23

申请人： Samsung Electronics Co., Ltd.

发明人： Hyun-woo Kim ,  Woo-seok Ko ,  Young-hwan Kim ,  Jeong-hoi Kim ,  Baek-man Sung ,  Hyung-su Son ,  Chae-ho Shin ,  Yu-sin Yang ,  Jae-youn Wi ,  Sang-kil Lee ,  Chung-sam Jun

IPC分类号： G01Q60/40

CPC分类号： G01Q60/40 ,  G01Q70/06

摘要： A conductive atomic force microscope including a plurality of probe structures each including a probe and a cantilever connected thereto, a power supplier applying a bias voltage, a current detector detecting a first current flowing between a sample object and each of the probes and a second current flowing between a measurement object and each of the probes, and calculating representative currents for the sample and measurement objects based on the first and second currents, respectively, and a controller calculating a ratio between representative currents of the sample object measured by each of the probe structures, calculating a scaling factor for scaling the representative current with respect to the measurement object measured by each of the probes, and determine a reproducible current measurement value based on the second measurement current and the scaling factor may be provided.

摘要翻译： 一种导电原子力显微镜，包括多个探针结构，每个探针结构包括探针和连接到其上的悬臂，施加偏置电压的电源，检测在样品物体和每个探针之间流动的第一电流的电流检测器和第二电流 在测量对象和每个探针之间流动，并且基于第一和第二电流分别计算样本和测量对象的代表性电流，以及控制器，计算由每个探针测量的样本对象的代表性电流之间的比率 计算相对于由每个探针测量的测量对象的代表性电流的缩放因子，并且可以提供基于第二测量电流和缩放因子来确定可重现的电流测量值。