公开(公告)号：US20250138088A1

公开(公告)日：2025-05-01

申请号：US18671017

申请日：2024-05-22

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seongkwan Lee ,  Minho Kang ,  Jongpill Park ,  Cheolmin Park ,  Jaemoo Choi

IPC: G01R31/317 ,  G01R1/073

Abstract: A probe card includes a plurality of power lines that are electrically connected to the plurality of DUTs, a plurality of ground lines that are electrically connected to the plurality of DUTs and to each other, and a plurality of power compensation circuits that are electrically connected to respective ones of the plurality of power lines and respective ones of the plurality of ground lines, where the plurality of power compensation circuits are configured to generate and provide a plurality of compensated power supply voltages to the respective ones of the plurality of power lines, and where the plurality of compensated power supply voltages are configured to inhibit a variation of a ground voltage of the respective ones of the plurality of ground lines.