公开(公告)号：US20240047390A1

公开(公告)日：2024-02-08

申请号：US18377530

申请日：2023-10-06

Applicant: Samsung Electronics Co., Ltd.

Inventor： Minjung CHOI ,  Sooho SHIN ,  Yeonjin LEE ,  Junghoon HAN

IPC: H01L23/00 ,  H01L21/56

CPC classification number: H01L24/05 ,  H01L21/561 ,  H01L24/13 ,  H01L24/96 ,  H01L24/73 ,  H01L2224/81801 ,  H01L2924/1304 ,  H01L2924/18162 ,  H01L2224/0401 ,  H01L2224/13099 ,  H01L2224/12105

Abstract: A semiconductor device includes an interlayer insulating layer disposed on a substrate; a plurality of middle interconnections disposed in the interlayer insulating layer; a pad disposed on the interlayer insulating layer; an upper interconnection disposed on the interlayer insulating layer; a protective insulating layer covering an edge of the pad, the upper interconnection, and a horizontal gap between the pad and the upper interconnection, the protective insulating layer having an opening on the pad; and a bump disposed on the pad, the bump extending on the protective insulating layer and overlapping the upper interconnection from a top-down view. At least one of the plurality of middle interconnections from among middle interconnections vertically closest to the pad has a first vertical thickness, the pad has a second vertical thickness that is twice to 100 times the first vertical thickness, a length of the gap between the pad and the upper interconnection is 1 μm or more, and an upper surface of the protective insulating layer is planar.

公开(公告)号：US20230354590A1

公开(公告)日：2023-11-02

申请号：US18220327

申请日：2023-07-11

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Dongoh KIM ,  Gyuhyun KIL ,  Junghoon HAN ,  Doosan BACK

IPC: H10B12/00 ,  H01L27/092

CPC classification number: H10B12/50 ,  H01L27/092 ,  H10B12/315

Abstract: A semiconductor device includes first and second trenches in respective first and second regions in a substrate, a first isolation structure having a first inner wall oxide pattern, a first liner, and a first filling insulation pattern sequentially stacked I the first trench, a second isolation structure having a second inner wall oxide pattern, a second liner, and a second filling insulation pattern sequentially stacked I the second trench, a first gate structure having a first high-k dielectric pattern, a first P-type metal pattern, and a first N-type metal pattern sequentially stacked on the first region, and a second gate structure having a second high-k dielectric pattern and a second N-type metal pattern sequentially stacked on the second region, wherein the first and second liners protrude above upper surfaces of the first and second inner wall oxide patterns and the first and second filling insulation patterns, respectively.

公开(公告)号：US20230178634A1

公开(公告)日：2023-06-08

申请号：US18072784

申请日：2022-12-01

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jeonil LEE ,  Gyuhyun KIL ,  Doosan BACK ,  Chansic YOON ,  Junghoon HAN

IPC: H01L29/66 ,  H10B12/00 ,  H01L29/78 ,  H01L29/423

CPC classification number: H01L29/6656 ,  H01L27/10897 ,  H01L27/10894 ,  H01L29/7833 ,  H01L29/6659 ,  H01L29/42364 ,  H01L27/10814 ,  H01L27/10885 ,  H01L27/10823

Abstract: A semiconductor device includes a substrate, a gate dielectric layer on the substrate, the gate dielectric layer including a recess at a side surface thereof, a gate electrode structure on the gate dielectric layer, a gate capping layer on the gate electrode structure, and a spacer structure on the substrate and covering side surfaces of the gate dielectric layer, the gate electrode structure, and the gate capping layer, the spacer structure including a first spacer, a second spacer on the first spacer and covering the recess, and a third spacer on the second spacer, the second spacer and the third spacer including silicon nitride.

公开(公告)号：US20220189969A1

公开(公告)日：2022-06-16

申请号：US17386008

申请日：2021-07-27

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Dongoh KIM ,  Gyuhyun KIL ,  Junghoon HAN ,  Doosan BACK

IPC: H01L27/108 ,  H01L27/092

Abstract: A semiconductor device includes first and second trenches in respective first and second regions in a substrate, a first isolation structure having a first inner wall oxide pattern, a first liner, and a first filling insulation pattern sequentially stacked I the first trench, a second isolation structure having a second inner wall oxide pattern, a second liner, and a second filling insulation pattern sequentially stacked I the second trench, a first gate structure having a first high-k dielectric pattern, a first P-type metal pattern, and a first N-type metal pattern sequentially stacked on the first region, and a second gate structure having a second high-k dielectric pattern and a second N-type metal pattern sequentially stacked on the second region, wherein the first and second liners protrude above upper surfaces of the first and second inner wall oxide patterns and the first and second filling insulation patterns, respectively.

公开(公告)号：US20220189967A1

公开(公告)日：2022-06-16

申请号：US17371558

申请日：2021-07-09

Applicant: Samsung Electronics Co., Ltd.

Inventor： Dongoh KIM ,  Gyuhyun KIL ,  Junghoon HAN ,  Doosan BACK

IPC: H01L27/108

Abstract: A semiconductor memory device may have a substrate including an active region in a memory cell region and a logic active region in a peripheral region, an element isolation structure between the active region and the logic active region, an insulating layer pattern covering the active region, and a support insulating layer. The insulating layer pattern may include an extension portion that extends along the element isolation structure, may be spaced apart from the element isolation structure, and may overhang over the element isolation structure. The support insulating layer may fill a recess space defined between the extension portion and the element isolation structure.

公开(公告)号：US20210280541A1

公开(公告)日：2021-09-09

申请号：US17328365

申请日：2021-05-24

Applicant: Samsung Electronics Co., Ltd.

Inventor： Minjung CHOI ,  Sooho SHIN ,  Yeonjin LEE ,  Junghoon HAN

IPC: H01L23/00 ,  H01L21/56

Abstract: A semiconductor device includes an interlayer insulating layer disposed on a substrate; a plurality of middle interconnections disposed in the interlayer insulating layer; a pad disposed on the interlayer insulating layer; an upper interconnection disposed on the interlayer insulating layer; a protective insulating layer covering an edge of the pad, the upper interconnection, and a horizontal gap between the pad and the upper interconnection, the protective insulating layer having an opening on the pad; and a bump disposed on the pad, the bump extending on the protective insulating layer and overlapping the upper interconnection from a top-down view. At least one of the plurality of middle interconnections from among middle interconnections vertically closest to the pad has a first vertical thickness, the pad has a second vertical thickness that is twice to 100 times the first vertical thickness, a length of the gap between the pad and the upper interconnection is 1 μm or more, and an upper surface of the protective insulating layer is planar.

公开(公告)号：US20230354589A1

公开(公告)日：2023-11-02

申请号：US18220323

申请日：2023-07-11

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Dongoh KIM ,  Gyuhyun KIL ,  Junghoon HAN ,  Doosan BACK

IPC: H01L27/108 ,  H01L27/092

CPC classification number: H10B12/50 ,  H01L27/092 ,  H10B12/315

Abstract: A semiconductor device includes first and second trenches in respective first and second regions in a substrate, a first isolation structure having a first inner wall oxide pattern, a first liner, and a first filling insulation pattern sequentially stacked I the first trench, a second isolation structure having a second inner wall oxide pattern, a second liner, and a second filling insulation pattern sequentially stacked I the second trench, a first gate structure having a first high-k dielectric pattern, a first P-type metal pattern, and a first N-type metal pattern sequentially stacked on the first region, and a second gate structure having a second high-k dielectric pattern and a second N-type metal pattern sequentially stacked on the second region, wherein the first and second liners protrude above upper surfaces of the first and second inner wall oxide patterns and the first and second filling insulation patterns, respectively.

公开(公告)号：US20230113028A1

公开(公告)日：2023-04-13

申请号：US17750723

申请日：2022-05-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyebin CHOI ,  Chansic YOON ,  Gyuhyun KIL ,  Doosan BACK ,  Hyungki CHO ,  Junghoon HAN

IPC: H01L27/108 ,  H01L29/66

Abstract: A semiconductor device including a gate structure on a substrate, a first gate spacer, and a second gate spacer may be provided. A sidewall of the gate structure includes a concave lower sidewall portion and an upper sidewall portion that is vertical with respect to an upper surface of the substrate. The first gate spacer is formed on the upper sidewall portion of the sidewall of the gate structure. The second gate spacer is formed on the concave lower sidewall portion of the sidewall of the gate structure and an outer sidewall of the first gate spacer. The second gate spacer contacts a lower surface of the first gate spacer and includes nitride.

公开(公告)号：US20220223485A1

公开(公告)日：2022-07-14

申请号：US17706401

申请日：2022-03-28

Applicant: Samsung Electronics Co., Ltd.

Inventor： Minjung CHOI ,  Junyong NOH ,  Yeonjin LEE ,  Junghoon HAN

IPC: H01L21/66 ,  H01L21/78

Abstract: A semiconductor device includes a substrate including a first part and a second part, a memory cell disposed on the first part, an insulation layer disposed on the first part and the second part, the insulation layer covering the memory cell, a portion of the insulation layer on the second part including a stepped sidewall, and a first pattern group disposed on the second part and in the portion of the insulation layer and the substrate. A first sidewall of the semiconductor device corresponds to the stepped sidewall including an upper sidewall, a lower sidewall and a connecting surface connecting the upper sidewall to the lower sidewall. The lower sidewall disposed under the upper sidewall is closer to the substrate than the upper sidewall, and has surface roughness different from surface roughness of the upper sidewall.

公开(公告)号：US20220115333A1

公开(公告)日：2022-04-14

申请号：US17319232

申请日：2021-05-13

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Junghoon HAN ,  Jongmin LEE

IPC: H01L23/00 ,  H01L23/31 ,  H01L23/13 ,  H01L23/498 ,  H01L21/48 ,  H01L21/56

Abstract: A semiconductor package includes an upper conductive pattern and a redistribution layer on a first surface of a substrate, a semiconductor chip facing the first surface of the substrate, the semiconductor chip being spaced apart from the first surface of the substrate, a conductive bump bonding between the semiconductor chip and the upper conductive pattern, the conductive bump electrically connecting the semiconductor chip and the upper conductive pattern, and an upper passivation layer on the redistribution layer, a portion of the upper passivation layer facing an edge of a lower surface of the semiconductor chip.