公开(公告)号：US10892171B2

公开(公告)日：2021-01-12

申请号：US15859480

申请日：2017-12-30

Applicant: Samsung Electronics Co., Ltd. ,  CYMECHS Inc.

Inventor： Heokjae Lee ,  Hahn Park ,  Jae Boo Kim ,  Dongil Yoon ,  MinYoung Hwang ,  Se Un Park ,  Kang-Min Park ,  Yongjoon Hong ,  Sung Baek Kim ,  Woo Jin Park

IPC: B08B7/00 ,  H01L21/67 ,  H01L21/677

Abstract: A removal apparatus for removing residual gases and a substrate treating facility for removing residual gases is disclosed. The residual gas removal apparatus includes a housing, a gas supply for providing a non-reactive gas into the housing, a supporting member provided to support a substrate and positioned in the housing, a heat radiating member spaced apart from the supporting member and positioned in the housing, and a heating unit for providing heat toward the supporting member and positioned between the heat radiating member and the supporting member.

公开(公告)号：US09381653B2

公开(公告)日：2016-07-05

申请号：US14643702

申请日：2015-03-10

Applicant: Samsung Electronics Co., Ltd.

Inventor： Byeongsang Kim ,  Kang-Min Park ,  Jungjun Park ,  JaeChul Hwang

IPC: H01L21/677 ,  B25J19/00 ,  B25J15/00 ,  B25J11/00

CPC classification number: B25J19/0091 ,  B25J11/0095 ,  B25J15/0014 ,  H01L21/67766

Abstract: The robot including a main body, an arm connected to the main body, a hand connected to the arm, the hand including a hand base and a finger, and a hand bracket unit between the hand base and the finger or between the hand base and the arm, may be provided. The hand bracket unit may include a vibration damping member provided between the hand base and the finger or between the hand base and the arm, thereby damping vibration of the hand base or the finger.

Abstract translation: 该机器人包括主体，连接到主体的臂，连接到手臂的手，手包括手基座和手指，以及在手基座和手指之间或手基座和手指之间的手托架单元， 可以提供手臂。 手托架单元可以包括设置在手基座和手指之间或手基座和手臂之间的减震构件，从而阻止手基座或手指的振动。