公开(公告)号：US20140158662A1

公开(公告)日：2014-06-12

申请号：US13920503

申请日：2013-06-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： Du-hyun LEE ,  Woong KO ,  Jae-kwan KIM ,  Ki-yeon YANG ,  Byung-kyu LEE

IPC: B29C59/00

CPC classification number: B82Y40/00 ,  B29C33/424 ,  B82Y10/00 ,  G03F7/0002

Abstract: A nanoimprint stamp having an alignment mark includes a transparent substrate having a plurality of convex portions, and a semitransparent layer on each of the plurality of convex portions. The semitransparent layer has a transmittance of about 20% to about 80% with respect to ultraviolet rays.

Abstract translation: 具有对准标记的纳米压印印模包括具有多个凸部的透明基板和在所述多个凸部中的每一个上的半透明层。 半透明层相对于紫外线具有约20％至约80％的透射率。

公开(公告)号：US20140130691A1

公开(公告)日：2014-05-15

申请号：US14078763

申请日：2013-11-13

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Ki-yeon YANG ,  Yun-Woo NAM

IPC: B41N6/00

CPC classification number: B41N6/00 ,  H01L21/6838

Abstract: A stamp structure includes a stamp frame having a plate part. The plate part includes a plurality of holes. The plurality of holes are configured to facilitate the adsorption of an object to the plate part during a transfer of the object from a donor substrate to a target substrate.

Abstract translation: 邮票结构包括具有板部的印章框架。 板部包括多个孔。 多个孔构造成便于在将物体从施主衬底转移到目标衬底期间吸附物体到板部件。

公开(公告)号：US20130292865A1

公开(公告)日：2013-11-07

申请号：US13707690

申请日：2012-12-07

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Ki-yeon YANG ,  Woong KO ,  Jae-kwan KIM ,  Du-hyun LEE ,  Byung-kyu LEE

IPC: B29C59/02

CPC classification number: B29C59/026 ,  G03F7/0002

Abstract: A template system, and a nano-imprint method using the same, include a template having a nano-pattern and configured to transfer the nano-pattern to a resin material on a substrate, and a pressure controlling apparatus configured to change a pressure of the template with respect to the substrate according to an intensity of bubbles captured between the substrate and the template.

Abstract translation: 模板系统和使用其的纳米压印方法包括具有纳米图案并被配置为将纳米图案转印到基板上的树脂材料的模板，以及压力控制装置，其被配置为改变 根据在基板和模板之间捕获的气泡的强度相对于基板的模板。