Electronic device and control method therefor

    公开(公告)号:US11693469B2

    公开(公告)日:2023-07-04

    申请号:US17965751

    申请日:2022-10-13

    Abstract: An example electronic apparatus includes a communication circuitry; a power supply; a first processor configured to have a first mode which receives first power from the power supply and connects with a server through the communication circuitry to transmit and receive information, and a second mode which receives no power or second power lower than the first power from the power supply; and a second processor configured to repetitively output a mode switching signal within a preset range of time interval based on the second mode of the first processor, wherein the first processor is switched over to the first mode based on the mode switching signal, is configured to transmit connectivity keeping information to the server through the communication circuitry and is switched over to the second mode.

    SEMICONDUCTOR PROCESS DEVICE AND METHOD OF MONITORING SEMICONDUCTOR PROCESS

    公开(公告)号:US20250087509A1

    公开(公告)日:2025-03-13

    申请号:US18647044

    申请日:2024-04-26

    Abstract: A semiconductor process device includes a housing including a chamber where a substrate is processed, a viewport in a side wall of the housing, an adapter configured to receive reflected light in which light generated from plasma generated inside the chamber is reflected at a target position on a surface of a structure provided on an upper surface of the substrate, a polarization beam splitter configured to separate the reflected light received from the adapter into P-polarized light and S-polarized light, a spectroscope configured to analyze spectra of the P-polarized light and the S-polarized light, and a control unit configured to monitor a thickness of the structure based on luminous intensity over time at one or more wavelengths of each of the P-polarized light and the S-polarized light, based on results of analyzing the spectra.

    Electronic device and control method therefor

    公开(公告)号:US11500441B2

    公开(公告)日:2022-11-15

    申请号:US16960747

    申请日:2019-01-14

    Abstract: Disclosed is an electronic apparatus, the electronic apparatus including: a communication circuitry; a power supply; a first processor configured to have a first mode which receives first power from the power supply and connects with a server through the communication circuitry to transmit and receive information, and a second mode which receives no power or second power lower than the first power from the power supply; and a second processor configured to repetitively output a mode switching signal within a preset range of time interval based on the second mode of the first processor, wherein the first processor is switched over to the first mode based on the mode switching signal, is configured to transmit connectivity keeping information to the server through the communication circuitry and is switched over to the second mode.

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