公开(公告)号：US11921270B2

公开(公告)日：2024-03-05

申请号：US17561276

申请日：2021-12-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sungil Choi ,  Yeeun Park ,  Kyungbeom Kim ,  Sungyoon Ryu ,  Jinwoo Ahn ,  Sunhong Jun

IPC: G02B21/02 ,  G01J3/28 ,  G02B21/00 ,  G02B21/36

CPC classification number: G02B21/0004 ,  G01J3/2823 ,  G02B21/02 ,  G02B21/36

Abstract: An inspection system includes a main support die configured to receive a target specimen; an auxiliary support die adjacent to the main support die and configured to receive a reference specimen; a cleaning device configured to remove contaminants from the reference specimen; an objective lens unit configured to direct light to main support die from a light source adjacent to the objective lens unit; a spectroscope between the objective lens unit and the light source; a detector adjacent to the objective lens unit; an imaging device between the objective lens unit and the detector; and a computer system in communication with the detector.

公开(公告)号：US20230008686A1

公开(公告)日：2023-01-12

申请号：US17561276

申请日：2021-12-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sungil Choi ,  Yeeun Park ,  Kyungbeom Kim ,  Sungyoon Ryu ,  Jinwoo Ahn ,  Sunhong Jun

IPC: G02B21/00 ,  G01J3/28 ,  G02B21/36 ,  G02B21/02

Abstract: An inspection system includes a main support die configured to receive a target specimen; an auxiliary support die adjacent to the main support die and configured to receive a reference specimen; a cleaning device configured to remove contaminants from the reference specimen; an objective lens unit configured to direct light to main support die from a light source adjacent to the objective lens unit; a spectroscope between the objective lens unit and the light source; a detector adjacent to the objective lens unit; an imaging device between the objective lens unit and the detector; and a computer system in communication with the detector.

公开(公告)号：US20250035564A1

公开(公告)日：2025-01-30

申请号：US18441476

申请日：2024-02-14

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sung-Il Choi ,  Byeongkwan Song ,  Chulmoo Kang ,  Kang-Woong Ko ,  Kyungbeom Kim ,  Mira Park ,  Yongseok Won ,  Younsub Lee ,  Jeonghoo Jo

IPC: H01L21/66 ,  G06T7/00 ,  G06T7/13

Abstract: The present disclosure relates to substrate test methods. An example substrate test method comprises loading a substrate into a substrate test apparatus and testing the substrate in the substrate test apparatus. The step of testing the substrate includes testing a first region of the substrate, and testing a second region of the substrate after testing the first region. The step of testing the first region includes determining that the first region is aligned and irradiating light to the first region. The step of testing the second region includes determining that the second region is aligned and irradiating light to the second region.