公开(公告)号：US20230008686A1

公开(公告)日：2023-01-12

申请号：US17561276

申请日：2021-12-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sungil Choi ,  Yeeun Park ,  Kyungbeom Kim ,  Sungyoon Ryu ,  Jinwoo Ahn ,  Sunhong Jun

IPC: G02B21/00 ,  G01J3/28 ,  G02B21/36 ,  G02B21/02

Abstract: An inspection system includes a main support die configured to receive a target specimen; an auxiliary support die adjacent to the main support die and configured to receive a reference specimen; a cleaning device configured to remove contaminants from the reference specimen; an objective lens unit configured to direct light to main support die from a light source adjacent to the objective lens unit; a spectroscope between the objective lens unit and the light source; a detector adjacent to the objective lens unit; an imaging device between the objective lens unit and the detector; and a computer system in communication with the detector.

公开(公告)号：US20250060276A1

公开(公告)日：2025-02-20

申请号：US18651417

申请日：2024-04-30

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Yeeun Park ,  Seungwoo Lee ,  Taejoong Kim ,  Jinwoo Ahn ,  Seoyeon Jeong ,  Taeyong Jo

IPC: G01M11/02

Abstract: An optical measurement system includes a hemispherical mirror including a planar portion and a spherical portion having a hemispherical recessed shape in the planar portion. In the spherical portion are latitude markers formed with a different reflectance from the rest of the spherical portion. The system includes an optical unit with an objective lens and at least one beam splitter. The optical unit transmits light reflected from the hemispherical mirror through the objective lens to a first sensor. A controller measures a numerical aperture of the objective lens by aligning the hemispherical mirror to be at the focus of the objective lens, detecting a back focal image of the objective lens in which the latitude markers appear as darker circular lines, and performing calculations on the image.

公开(公告)号：US11921270B2

公开(公告)日：2024-03-05

申请号：US17561276

申请日：2021-12-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sungil Choi ,  Yeeun Park ,  Kyungbeom Kim ,  Sungyoon Ryu ,  Jinwoo Ahn ,  Sunhong Jun

IPC: G02B21/02 ,  G01J3/28 ,  G02B21/00 ,  G02B21/36

CPC classification number: G02B21/0004 ,  G01J3/2823 ,  G02B21/02 ,  G02B21/36

Abstract: An inspection system includes a main support die configured to receive a target specimen; an auxiliary support die adjacent to the main support die and configured to receive a reference specimen; a cleaning device configured to remove contaminants from the reference specimen; an objective lens unit configured to direct light to main support die from a light source adjacent to the objective lens unit; a spectroscope between the objective lens unit and the light source; a detector adjacent to the objective lens unit; an imaging device between the objective lens unit and the detector; and a computer system in communication with the detector.