公开(公告)号：US20210219408A1

公开(公告)日：2021-07-15

申请号：US16927050

申请日：2020-07-13

Applicant: Samsung Electronics Co., Ltd.

Inventor： Dohyung KIM ,  Seongchul HONG ,  Kyungsik KANG ,  Insung KIM ,  Motoshi SAKAI ,  Seulgi LEE ,  Jungchul LEE

IPC: H05G2/00 ,  H01S3/23 ,  G02B19/00 ,  H01S3/00 ,  G02B26/08

Abstract: A laser beam delivery apparatus of an extreme ultra violet light source may include a high power seed module configured to generate a laser beam, a power amplifier configured to amplify the laser beam generated by the high power seed module, a beam transfer module configured to collect and move the laser beam amplified by the power amplifier, a final focusing assembly optical platform configured to adjust focus of the laser beam collected and moved by the beam transfer module, and a focusing unit configured to focus the laser beam with the focus adjusted by the final focusing assembly optical platform to a target droplet. The power amplifier may include a position adjuster configured to adjust a position of the laser beam. The position adjuster may include a refraction plate having a flat surface. The power amplifier may include a pointing adjuster, which may include a mirror.