公开(公告)号：US20210219408A1

公开(公告)日：2021-07-15

申请号：US16927050

申请日：2020-07-13

Applicant: Samsung Electronics Co., Ltd.

Inventor： Dohyung KIM ,  Seongchul HONG ,  Kyungsik KANG ,  Insung KIM ,  Motoshi SAKAI ,  Seulgi LEE ,  Jungchul LEE

IPC: H05G2/00 ,  H01S3/23 ,  G02B19/00 ,  H01S3/00 ,  G02B26/08

Abstract: A laser beam delivery apparatus of an extreme ultra violet light source may include a high power seed module configured to generate a laser beam, a power amplifier configured to amplify the laser beam generated by the high power seed module, a beam transfer module configured to collect and move the laser beam amplified by the power amplifier, a final focusing assembly optical platform configured to adjust focus of the laser beam collected and moved by the beam transfer module, and a focusing unit configured to focus the laser beam with the focus adjusted by the final focusing assembly optical platform to a target droplet. The power amplifier may include a position adjuster configured to adjust a position of the laser beam. The position adjuster may include a refraction plate having a flat surface. The power amplifier may include a pointing adjuster, which may include a mirror.

公开(公告)号：US20240219848A1

公开(公告)日：2024-07-04

申请号：US18519497

申请日：2023-11-27

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sanghwan LEE ,  Dohyung KIM ,  Jinhong PARK ,  Hachul SHIN ,  Seongchul HONG

IPC: G03F7/00 ,  G03F1/42

CPC classification number: G03F7/7085 ,  G03F1/42 ,  G03F7/70175 ,  G03F7/702 ,  G03F7/70558 ,  G03F7/70716

Abstract: A mask stage, including a body, a support on a lower surface of the body including an attachable extreme ultraviolet mask, a fiducial mark on the lower surface of the body and spaced apart from the support, and a sensor area including a plurality of measurement sensors configured to measure an energy of a portion of extreme ultraviolet light incident on the body, wherein the sensor area is on the lower surface of the body and is spaced apart from the support in a scan direction of the extreme ultraviolet light, and the plurality of measurement sensors are spaced apart from one another in a direction perpendicular to the scan direction.