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公开(公告)号:US20240324190A1
公开(公告)日:2024-09-26
申请号:US18611146
申请日:2024-03-20
Applicant: Samsung Electronics Co., Ltd.
Inventor: Yunho SONG , Jooncheol KIM , Bosu KIM , Yeji KIM , Subin SON , Hyundon YUN , Namkyeong LEE
IPC: H10B12/00
CPC classification number: H10B12/50 , H10B12/482
Abstract: An integrated circuit device includes a substrate including a cell array area and a peripheral circuit area next to the cell array area, an isolation layer defining an activation region of the substrate in the peripheral circuit area, the isolation layer including a first insulation pattern and a second insulation pattern surrounding the first insulation pattern, and a gate structure on the substrate in the peripheral circuit area, wherein the second insulation pattern includes one or more surfaces defining a recess into an upper surface of the substrate in a vertical direction, the vertical direction extending perpendicular to the upper surface of the substrate.