公开(公告)号：US20240212122A1

公开(公告)日：2024-06-27

申请号：US18528206

申请日：2023-12-04

Applicant: Samsung Electronics Co., Ltd.

Inventor： Namyoon KIM ,  Doory KIM ,  Wookrae KIM ,  Myungjun LEE ,  Jaehwang JUNG ,  Changhoon CHOI ,  Dokyung JEONG ,  Uidon JEONG

IPC: G06T7/00 ,  G02B21/00 ,  G06T5/30 ,  G06T7/13

CPC classification number: G06T7/0004 ,  G02B21/008 ,  G06T5/30 ,  G06T7/13 ,  G06T2207/10056 ,  G06T2207/10064 ,  G06T2207/30148

Abstract: A fluorescence microscopy metrology system includes an optical system configured to generate first light and second light having different wavelengths, a microscope body configured to irradiate a sample, coated with a fluorescent material, with the first light and the second light received from the optical system, and to receive fluorescence reflected from the sample, an image detection device configured to detect a fluorescence image corresponding to the received fluorescence, and a nanostructure analysis device configured to measure line edge roughness (LER) from the detected fluorescence image, to analyze power spectral density (PSD), or to detect a nanoparticle defect.