公开(公告)号：US20230215769A1

公开(公告)日：2023-07-06

申请号：US17874450

申请日：2022-07-27

Applicant: Samsung Electronics Co., Ltd.

Inventor： Doory KIM ,  Jae Hwang JUNG ,  Wook Rae KIM ,  Nam Yoon KIM ,  Myung Jun LEE ,  SeokRan GO ,  Dokyung JEONG ,  Uidon JEONG

IPC: H01L21/66 ,  G01N21/95 ,  G01N21/956 ,  G01N21/64

CPC classification number: H01L22/12 ,  G01N21/9501 ,  G01N21/956 ,  G01N21/643 ,  G01N2021/6439

Abstract: A method for fabricating a semiconductor device is provided. The method for fabricating the semiconductor device includes forming a semiconductor pattern including a first layer and a second layer on a substrate, forming a coating layer on a surface of the first layer, forming a dyeing substance in which one of an antibody or a protein is combined with a fluorophore, attaching the dyeing substance to a surface of the coating layer to form a dyeing layer, and photographing the fluorophore with an ultra-high resolution microscope to detect the semiconductor pattern.

公开(公告)号：US20240212122A1

公开(公告)日：2024-06-27

申请号：US18528206

申请日：2023-12-04

Applicant: Samsung Electronics Co., Ltd.

Inventor： Namyoon KIM ,  Doory KIM ,  Wookrae KIM ,  Myungjun LEE ,  Jaehwang JUNG ,  Changhoon CHOI ,  Dokyung JEONG ,  Uidon JEONG

IPC: G06T7/00 ,  G02B21/00 ,  G06T5/30 ,  G06T7/13

CPC classification number: G06T7/0004 ,  G02B21/008 ,  G06T5/30 ,  G06T7/13 ,  G06T2207/10056 ,  G06T2207/10064 ,  G06T2207/30148

Abstract: A fluorescence microscopy metrology system includes an optical system configured to generate first light and second light having different wavelengths, a microscope body configured to irradiate a sample, coated with a fluorescent material, with the first light and the second light received from the optical system, and to receive fluorescence reflected from the sample, an image detection device configured to detect a fluorescence image corresponding to the received fluorescence, and a nanostructure analysis device configured to measure line edge roughness (LER) from the detected fluorescence image, to analyze power spectral density (PSD), or to detect a nanoparticle defect.