SYSTEM FOR SUPPLYING PHOTORESIST AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME

    公开(公告)号:US20230115351A1

    公开(公告)日:2023-04-13

    申请号:US17804732

    申请日:2022-05-31

    IPC分类号: G03F7/20

    摘要: A photoresist supplying system includes a pump that includes a first tube phragm that stores a photoresist and a filter that filters the photoresist, a second tube phragm that stores the photoresist and is disposed outside the pump, where the second tube phragm transfers the photoresist to the first tube phragm, a storage unit that stores the photoresist, where the storage unit provides the photoresist to the second tube phragm, and a tube phragm drive unit that is connected to the first tube phragm. The tube phragm drive unit adjusts an interior volume of the first tube phragm and applies a pressure to a flexible outer wall of the first tube phragm to transfer the photoresist from the first tube phragm to a nozzle installed in the chamber. At least a part of the photoresist stored in the first tube phragm is transferred to the second tube phragm.

    Cooking appliance
    4.
    发明授权

    公开(公告)号:US11143411B2

    公开(公告)日:2021-10-12

    申请号:US16586738

    申请日:2019-09-27

    摘要: A cooking appliance capable of preventing a user's unintended rotation of a knob assembly includes: a main body including a control panel; a valve positioned inside the main body, and including a valve shaft being pushable and rotatable; and a knob assembly including an inner knob coupled with the valve shaft, and an outer knob being movable with respect to the inner knob in a first direction in which the outer knob approaches the inner knob, wherein, when the outer knob moves by a first push distance in the first direction, the valve shaft and the inner knob are prevented from rotating.

    SEMICONDUCTOR MEMORY DEVICE
    5.
    发明公开

    公开(公告)号:US20240292602A1

    公开(公告)日:2024-08-29

    申请号:US18462614

    申请日:2023-09-07

    IPC分类号: H10B12/00

    摘要: A semiconductor memory device includes a bit line extended in a first direction on a substrate, a first word line extended in a second direction on the bit line, a second word line extended in the second direction on the bit line and spaced apart from the first word line in the first direction, a back gate electrode between the first word line and the second word line and extended in the second direction, a first active pattern between the first word line and the back gate electrode on the bit line, and a second active pattern between the first word line and the back gate electrode on the bit.

    System for supplying photoresist and method for fabricating semiconductor device using the same

    公开(公告)号:US11733616B2

    公开(公告)日:2023-08-22

    申请号:US17804732

    申请日:2022-05-31

    IPC分类号: G03F7/20 G03F7/00

    CPC分类号: G03F7/70908

    摘要: A photoresist supplying system includes a pump that includes a first tube phragm that stores a photoresist and a filter that filters the photoresist, a second tube phragm that stores the photoresist and is disposed outside the pump, where the second tube phragm transfers the photoresist to the first tube phragm, a storage unit that stores the photoresist, where the storage unit provides the photoresist to the second tube phragm, and a tube phragm drive unit that is connected to the first tube phragm. The tube phragm drive unit adjusts an interior volume of the first tube phragm and applies a pressure to a flexible outer wall of the first tube phragm to transfer the photoresist from the first tube phragm to a nozzle installed in the chamber. At least a part of the photoresist stored in the first tube phragm is transferred to the second tube phragm.

    SECURITY SYSTEM AND METHOD OF PROVIDING SECURITY SERVICE BY USING THE SAME
    7.
    发明申请
    SECURITY SYSTEM AND METHOD OF PROVIDING SECURITY SERVICE BY USING THE SAME 审中-公开
    使用该安全系统和提供安全服务的方法

    公开(公告)号:US20150199894A1

    公开(公告)日:2015-07-16

    申请号:US14596499

    申请日:2015-01-14

    IPC分类号: G08B25/01 G08B25/10

    摘要: A security system and a method of providing a security service are provided. The method includes receiving, by a mobile terminal, sensor data from a plurality of sensors included in a first plug-in type sensor module; integrating, by the mobile terminal, the sensor data based on a correlation between pieces of sensor data of the plurality of sensors to generate integrated information; analyzing, based on the integration information, a security situation of a place into which the first plug-in type sensor module is plugged; and providing, by the mobile terminal, a result of the analysis to a user.

    摘要翻译: 提供了一种安全系统和提供安全服务的方法。 该方法包括:通过移动终端从包括在第一插入式传感器模块中的多个传感器接收传感器数据; 基于所述多个传感器的传感器数据之间的相关性,由所述移动终端对所述传感器数据进行积分,以生成综合信息; 基于所述集成信息,分析所述第一插件式传感器模块插入的位置的安全状况; 以及由所述移动终端向用户提供所述分析的结果。