公开(公告)号：US09874435B2

公开(公告)日：2018-01-23

申请号：US14667930

申请日：2015-03-25

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sangwook Park ,  Sang-Hyun Park ,  Taekyu Son ,  Sangdon Jang

IPC: G01B11/14 ,  G01B9/02

CPC classification number: G01B11/14 ,  G01B9/02016

Abstract: Measuring systems and methods using the same may be provided. For example, the measuring system including a first reference member located at one of a first target member and a second target member, the first and second target members being configured to make a relative movement with respect to each other and the first reference member having a first length, a second reference member located at the other of the first target member and the second target member and having a second length, and a measuring unit located at a distance from the first reference member and the second reference member, the measuring unit configured to measure a relative location of one of the first reference member and the second reference member with respect to the other may be provided.

公开(公告)号：US09691601B2

公开(公告)日：2017-06-27

申请号：US15168995

申请日：2016-05-31

Applicant: SAMSUNG ELECTRONICS CO., LTD. ,  KNU-INDUSTRY COOPERATION FOUNDATION

Inventor： Sang-Hyun Park ,  Sangdon Jang ,  In Bae Chang

IPC: H01F1/00 ,  H01L21/00

CPC classification number: H01L21/00 ,  H01L21/68 ,  H01L21/68785 ,  H01L21/68792

Abstract: A supporting unit is provided. The supporting unit includes a body, an alignment member, at least one sensor, and a controller. The body has a top surface supporting a target object. The alignment member is disposed in the body and adjusts a position of the target object. The sensor senses the position of the target object. The controller controls the alignment member and the sensor member. The alignment member includes a magnet that adjusts the position of the target object according to an electromagnetic force; and a coil that applies the electromagnetic force to the magnet.

公开(公告)号：US09690200B2

公开(公告)日：2017-06-27

申请号：US14867292

申请日：2015-09-28

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sangjoon Hong ,  Jongjin Lee ,  Hikuk Lee ,  Sangdon Jang ,  Inbae Chang

IPC: G03B27/54 ,  G03F7/16 ,  G03F7/20

CPC classification number: G03F7/16 ,  G03F7/70383 ,  G03F7/70791 ,  G03F7/7085

Abstract: An optical apparatus and a manufacturing method using the optical apparatus are disclosed. The optical apparatus includes a stage supporting a substrate, first optical systems providing a first light onto the substrate, a gantry supporting the first optical systems to transfer them on the stage, and second optical systems disposed between the gantry and the stage and detecting displacement of the first optical systems. Each of the second optical systems includes a beam source generating a second light different with the first light, and sensor arrays for sensing the second light provided to the first optical systems to detect displacement of the first optical systems.