公开(公告)号：US08815616B2

公开(公告)日：2014-08-26

申请号：US13844582

申请日：2013-03-15

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sang Kyu Bang ,  Sung Don Kwak ,  Choo-Ho Kim ,  Won Soo Ji

IPC: G01R31/26 ,  B65G53/46 ,  H01L33/00 ,  C23C16/455 ,  F16K3/02

CPC classification number: C23C16/455 ,  C23C14/56 ,  C23C16/54 ,  F16K3/02 ,  F16K3/0218 ,  F16K25/00 ,  F16K51/02 ,  G01M3/226 ,  H01L33/005 ,  Y10T137/8158

Abstract: There is provided a slit valve unit including: a body disposed on an outer side of a process chamber and having an entrance connected to an opening of the process chamber; a slit valve provided in an internal space of the body and selectively opening and closing the entrance; a plurality of packing members provided along the circumference of the entrance on an inner side of the body and tightly attached to the slit valve when the slit valve shields the entrance; and a connection pipe having one end exposed between the plurality of packing members on the inner side of the body so as to be connected to an airtight space formed among the plurality of packing members, the body, and the slit valve, and the other end exposed to the outer side of the body, the connection pipe penetrating the body.

Abstract translation: 提供了一种狭缝阀单元，其包括：主体，其设置在处理室的外侧，并且具有连接到处理室的开口的入口; 设置在所述主体的内部空间中并选择性地打开和关闭所述入口的狭缝阀; 多个密封构件，其沿着入口的圆周设置在主体的内侧，并且当狭缝阀屏蔽入口时紧密地附接到狭缝阀; 以及连接管，其一端暴露在主体内侧的多个包装件之间，以与多个包装件，主体和狭缝阀中形成的气密空间连接，另一端 暴露在身体的外侧，连接管穿透身体。

公开(公告)号：US20140106478A1

公开(公告)日：2014-04-17

申请号：US13844582

申请日：2013-03-15

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sang Kyu Bang ,  Sung Don Kwak ,  Choo-Ho Kim ,  Won Soo Ji

IPC: C23C16/455 ,  H01L33/00 ,  F16K3/02

CPC classification number: C23C16/455 ,  C23C14/56 ,  C23C16/54 ,  F16K3/02 ,  F16K3/0218 ,  F16K25/00 ,  F16K51/02 ,  G01M3/226 ,  H01L33/005 ,  Y10T137/8158

Abstract: There is provided a slit valve unit including: a body disposed on an outer side of a process chamber and having an entrance connected to an opening of the process chamber; a slit valve provided in an internal space of the body and selectively opening and closing the entrance; a plurality of packing members provided along the circumference of the entrance on an inner side of the body and tightly attached to the slit valve when the slit valve shields the entrance; and a connection pipe having one end exposed between the plurality of packing members on the inner side of the body so as to be connected to an airtight space formed among the plurality of packing members, the body, and the slit valve, and the other end exposed to the outer side of the body, the connection pipe penetrating the body.

Abstract translation: 提供了一种狭缝阀单元，其包括：主体，其设置在处理室的外侧，并且具有连接到处理室的开口的入口; 设置在所述主体的内部空间中并选择性地打开和关闭所述入口的狭缝阀; 多个密封构件，其沿着入口的圆周设置在主体的内侧，并且当狭缝阀屏蔽入口时紧密地附接到狭缝阀; 以及连接管，其一端暴露在主体内侧的多个包装件之间，以与多个包装件，主体和狭缝阀中形成的气密空间连接，另一端 暴露在身体的外侧，连接管穿透身体。