公开(公告)号：US10295564B2

公开(公告)日：2019-05-21

申请号：US15407660

申请日：2017-01-17

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sung-Yong Park ,  Sang-Boo Kang ,  Jae-Geun Kim ,  Sung-Hyup Kim ,  Jeong-Min Na ,  Jae-Hyoung Park ,  Sang-Kyu Yoo ,  Jae-Hoon Joo

IPC: G01R1/073 ,  G01R1/04 ,  G01R31/28

Abstract: An apparatus for clamping a probe card may include a body portion, an inner clamping portion and a plurality of outer clamping portions. The body portion may be arranged between a printed circuit board (PCB) of the probe card and a test head. The inner clamping portion may be integrally formed with an upper surface of the body portion. The inner clamping portion may be configured to affix a central portion of the PCB to the test head. The outer clamping portions may be integrally formed with side surfaces of the body portion. The outer clamping portions may be configured to affix a portion surrounding the central portion of the PCB to the test head. Thus, a contact area between the clamping apparatus and the PCB may be increased.

公开(公告)号：US20190013218A1

公开(公告)日：2019-01-10

申请号：US15870456

申请日：2018-01-12

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sung-Yong Park ,  Sung-Hyup Kim ,  Sung-Gwang Lee ,  Kwang-Sung Lee

IPC: H01L21/67 ,  H01L21/02

Abstract: A megasonic cleaner includes a water tank that includes a pair of opposite inner walls and a bottom wall connected thereto, and that accommodates a fluid therein; a plurality of supporting units arranged in the water tank at predetermined positions that support a wafer; and at least one transducer arranged on the bottom wall that transmits energy in the form of waves into the fluid, where each of the opposite inner walls has a first protrusion that protrudes into an internal space of the water tank, the first protrusion being spaced above the bottom wall and positioned at an height that is greater than or equal to a height of the centers of the plurality of supporting units.

公开(公告)号：US11137442B2

公开(公告)日：2021-10-05

申请号：US16535433

申请日：2019-08-08

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sang-Ik Lee ,  Sung-Yong Park

IPC: G01R31/28 ,  G01R1/073

Abstract: A stiffener of a probe card includes: a body plate arranged between a test head and a printed circuit board (PCB) of the probe card, wherein the test head is configured to apply a test signal to an object, and the PCB is configured to receive the test signal; a plurality of ribs radially extending from the body plate; an inner rim configured to surround the body plate to connect middle portions of the ribs with each other; and a plurality of contact members arranged on upper surfaces of at least two ribs among the ribs, and configured to make contact with the test head.

公开(公告)号：US10937670B2

公开(公告)日：2021-03-02

申请号：US15870456

申请日：2018-01-12

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sung-Yong Park ,  Sung-Hyup Kim ,  Sung-Gwang Lee ,  Kwang-Sung Lee

IPC: H01L21/67 ,  H01L21/02 ,  B08B3/12

Abstract: A megasonic cleaner includes a water tank that includes a pair of opposite inner walls and a bottom wall connected thereto, and that accommodates a fluid therein; a plurality of supporting units arranged in the water tank at predetermined positions that support a wafer; and at least one transducer arranged on the bottom wall that transmits energy in the form of waves into the fluid, where each of the opposite inner walls has a first protrusion that protrudes into an internal space of the water tank, the first protrusion being spaced above the bottom wall and positioned at an height that is greater than or equal to a height of the centers of the plurality of supporting units.