公开(公告)号：US20240424457A1

公开(公告)日：2024-12-26

申请号：US18393917

申请日：2023-12-22

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyunjoong Kim ,  Sebin Choi ,  Myeongjun Gil ,  Sunghyup Kim ,  Sunjoo Lee ,  Cheol-Jae Lee ,  Donghwy Chin ,  Donghee Han

IPC: B01F25/314 ,  B01F23/10 ,  B01F25/31

Abstract: A gas mixing device may include a main conduit and a gas transferring device connected to the main conduit. The gas transferring device may include a distribution device surrounding the main conduit, a supplying conduit connected to the distribution device and defining a supplying path, and a plurality of connection conduits connecting the first distribution device to the main conduit. The distribution device may include inner and outer cylinders, which are sequentially provided to surround the main conduit and are sequentially spaced apart from the main conduit in a radial direction. A distribution space may be defined between the inner and outer cylinders, and the supplying conduit may be coupled to the outer cylinder, such that the supplying path is connected to the distribution space. The connection conduits may be spaced apart from each other in a circumferential direction.

公开(公告)号：US20240376604A1

公开(公告)日：2024-11-14

申请号：US18660546

申请日：2024-05-10

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyunjoong Kim ,  Jongchan Lee ,  Junho Lee ,  Jinman Park ,  Sengyeop Kim ,  Youngjoo Kim ,  Seounghwan Byun ,  Hana Seu ,  Sunjoo Lee ,  Cheoljae Lee ,  Dongchul Choi

IPC: C23C16/46 ,  H01J37/32

Abstract: A substrate processing apparatus includes a processing chamber including a processing space where a substrate is processed and a heater provided in the process chamber to support the substrate and configured to heat the substrate, wherein the heater includes a body, a first protrusion portion protruding upward in a vertical direction from a center of the body, and a second protrusion portion protruding upward from a center of the first protrusion portion, first embossings are formed in a region which does not overlap the first protrusion portion in a vertical direction on an upper surface of the body, second embossings are formed in a region which does not overlap the second protrusion portion in a vertical direction on an upper surface of the first protrusion portion, and third embossings are formed on an upper surface of the second protrusion portion.