公开(公告)号：US11538701B2

公开(公告)日：2022-12-27

申请号：US16791564

申请日：2020-02-14

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Taehyoung Lee ,  Byeongsang Kim ,  Sung Chai Kim ,  Wooram Kim ,  Kyungwon Yun ,  Keonho Lee ,  Sangil Im ,  Namyoung Cho

IPC: H01L21/67 ,  G05B19/406 ,  G06T7/00 ,  G01N21/88 ,  G01N21/954

Abstract: A method of inspecting a semiconductor processing chamber includes providing a vision sensor into the semiconductor processing chamber, aligning the vision sensor on a target in the semiconductor processing chamber, obtaining an object image of the target using an image scanning module of the vision sensor, generating a three dimensional model of the target based on the object image, and obtaining a physical quantity of the target from the three dimensional model. The obtaining of the object image of the target includes projecting a pattern onto the target using an illuminator of the image scanning module, and scanning an image of the target in which the pattern is projected, using a camera of the image scanning module.

公开(公告)号：US12074051B2

公开(公告)日：2024-08-27

申请号：US17713541

申请日：2022-04-05

Applicant: Samsung Electronics Co., Ltd.

Inventor： Taehyoung Lee ,  Hohyun Lee ,  Jongmin Song ,  Young Yoon ,  Jaemoo Choi

IPC: H01L21/683 ,  B25J9/16 ,  H01L21/67 ,  H01L21/677

CPC classification number: H01L21/6833 ,  B25J9/1679 ,  B25J9/1697 ,  H01L21/67259 ,  H01L21/67742

Abstract: A teaching apparatus includes a chamber; an electrostatic chuck in the chamber, the electrostatic chuck including a sidewall surrounding a loading area; an aligner configured to be loaded onto the loading area of the electrostatic chuck; a vision sensor configured to obtain measurement data by measuring separation distances of separation regions between the aligner and the sidewall of the electrostatic chuck and to transmit the measurement data; a transfer robot configured to load the aligner onto a reference position of the loading area and to position the vision sensor above the electrostatic chuck; and controller configured to reset the reference position and to equalize the separation distances based on the measurement data transmitted from the vision sensor.

公开(公告)号：US11639906B2

公开(公告)日：2023-05-02

申请号：US17185559

申请日：2021-02-25

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Shashank Shrikant Agashe ,  Gaurav Kumar ,  Priya Ranjan Sinha ,  Lakshmi Narayana Pedapudi ,  Avadhut Dipakrao Chaudhari ,  Dongwoo Lee ,  Taehyoung Lee

IPC: H01J37/09 ,  G01N23/2273 ,  G01N23/2251

Abstract: Provided is a method for virtually executing an operation of an energy dispersive x-ray spectrometry (EDS) system in real time production line by analyzing a defect included in a material undergoing inspection based on computer vision, the method including receiving a scanning electron microscope (SEM) image of the material including the defect, extracting an image-feature from the SEM image of the material, classifying the extracted image-feature under a predetermined label, predicting, based on the classified image-feature, an element associated with the defect included in the material and a shape of the predicted element, and grading the defect included in the material based on comparing the predicted element with a predetermined criteria.