公开(公告)号：US09917161B2

公开(公告)日：2018-03-13

申请号：US15238721

申请日：2016-08-16

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jungwoo Song ,  Jaekyu Lee ,  Jaerok Kahng ,  YongJun Kim

IPC: H01L27/108 ,  H01L29/40 ,  H01L29/78 ,  H01L29/66 ,  H01L29/423 ,  H01L27/22

CPC classification number: H01L29/408 ,  H01L27/10811 ,  H01L27/10823 ,  H01L27/10852 ,  H01L27/10855 ,  H01L27/10891 ,  H01L27/228 ,  H01L29/4236 ,  H01L29/66666 ,  H01L29/7827

Abstract: A semiconductor device includes active pillars protruding from a semiconductor substrate and spaced apart from each other in a first direction and a second direction that is perpendicular to the first direction, a word line extending in the first direction between the active pillars, a drain region disposed in an upper portion of each of the active pillars, and a separation pattern provided between the word line and the drain region. A bottom surface of the separation pattern is disposed at a lower level than a bottom surface of the drain region.