PIXEL ARRAY AND AN IMAGE SENSOR INCLUDING THE SAME

    公开(公告)号:US20250107261A1

    公开(公告)日:2025-03-27

    申请号:US18976574

    申请日:2024-12-11

    Abstract: A pixel array including: a plurality of pixel groups, each pixel group including: a plurality of unit pixels respectively including photoelectric conversion elements disposed in a semiconductor substrate; trench structures disposed in the semiconductor substrate and extending in a vertical direction from a first surface of the semiconductor substrate to a second surface of the semiconductor substrate to electrically and optically separate the photoelectric conversion elements from each other; and a microlens disposed above or below the semiconductor substrate, the microlens covering all of the photoelectric conversion elements in the plurality of unit pixels to focus an incident light to the photoelectric conversion elements.

    IMAGE SENSOR
    3.
    发明公开
    IMAGE SENSOR 审中-公开

    公开(公告)号:US20230282668A1

    公开(公告)日:2023-09-07

    申请号:US18117166

    申请日:2023-03-03

    Abstract: An image sensor includes a substrate having first and second surfaces opposing each other; a circuit interconnection structure provided below the first surface of the substrate; a group provided in the substrate and including a plurality of pixel substrate regions; and an isolation structure provided in the substrate, wherein the isolation structure includes an isolation portion surrounding the group and extension portions extending from the isolation portion to a region between the plurality of pixel substrate regions of the group, wherein, in the group, the extension portions have end portions spaced apart from each other, and wherein at least one of the extension portions includes a width reduction region in which a width decreases in a direction away from the isolation portion.

    IMAGE SENSOR AND MANUFACTURING METHOD OF THE SAME

    公开(公告)号:US20230299096A1

    公开(公告)日:2023-09-21

    申请号:US17987172

    申请日:2022-11-15

    Abstract: An image sensor including a substrate including a first and second surface; a pixel isolation structure penetrating the substrate, arranged in a pixel isolation trench extending from the first to second surface of the substrate, and defining a pixel region; a plurality of sub pixel regions on the pixel region; a plurality of photoelectric conversion regions on the plurality of sub pixel regions; a signal separation structure between the plurality of sub pixel regions, the signal separation structure being in a signal separation trench extending from the second surface of the substrate toward the first surface of the substrate into the substrate; and a micro lens on the second surface of the substrate, the micro lens corresponding to the pixel region, wherein the signal separation structure includes an insulating layer, and the pixel isolation structure includes a conductive layer; and a liner layer between the conductive layer and the substrate.

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