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    METHOD AND ELECTRONIC DEVICE WITH NON-LINEAR FUNCTION
    1.
    发明申请
    METHOD AND ELECTRONIC DEVICE WITH NON-LINEAR FUNCTION 有权

    公开(公告)号：US20250045054A1

    公开(公告)日：2025-02-06

    申请号：US18781624

    申请日：2024-07-23

    Applicant: SAMSUNG ELECTRONICS CO., LTD. ,  POSTECH Research and Business Development Foundation

    Inventor： Jin HYUN ,  Youngjoo LEE ,  Seungwoo HONG

    IPC: G06F9/30

    Abstract: A processor-implemented method includes determining a first width, the first width being a minimum width of a plurality of sectors into which an input range for a non-linear function is divided, and a plurality of second widths dividing the plurality of sectors each into one or more segments, determining a final width of a target sector, the target sector being one of the plurality of sectors, for approximating the non-linear function, based on one or more among the first width and the plurality of second widths, and dividing the non-linear function into one or more segments comprised in the target sector and approximating the divided non-linear function for each of the one or more segments to a linear function.

    SEMICONDUCTOR SUBSTRATE MEASURING APPARATUS AND PLASMA TREATMENT APPARATUS USING THE SAME
    2.
    发明申请
    SEMICONDUCTOR SUBSTRATE MEASURING APPARATUS AND PLASMA TREATMENT APPARATUS USING THE SAME 有权

    公开(公告)号：US20210074594A1

    公开(公告)日：2021-03-11

    申请号：US16847727

    申请日：2020-04-14

    Applicant: SAMSUNG ELECTRONICS CO., LTD.

    Inventor： Junbum PARK ,  Younghwan KIM ,  Jongsu KIM ,  Youngjoo LEE ,  Yoojin JEONG

    IPC: H01L21/66 ,  G01B11/06 ,  H01J37/32 ,  G01N21/95

    Abstract: A semiconductor substrate measuring apparatus includes a light source to generate irradiation light having a sequence of on/off at a predetermined interval, the light source to provide the irradiation light to a chamber with an internal space for processing a semiconductor substrate using plasma, an optical device between the light source and the chamber, the optical device to split a first measurement light into a first optical path, condensed while the light source is turned on, to split a second measurement light into a second optical path, condensed while the light source is turned off, and to synchronize with the on/off sequence, and a photodetector connected to the first and second optical paths, the photodetector to subtract spectra of first and second measurement lights to detect spectrum of reflected light, and to detect plasma emission light emitted from the plasma based on the spectrum of the second measurement light.

    METHOD FOR CONTROLLING POWER OF ELECTRONIC DEVICE AND SERVER THEREFOR
    3.
    发明申请
    METHOD FOR CONTROLLING POWER OF ELECTRONIC DEVICE AND SERVER THEREFOR 有权

    公开(公告)号：US20210012398A1

    公开(公告)日：2021-01-14

    申请号：US17041218

    申请日：2019-04-01

    Applicant: Samsung Electronics Co., Ltd.

    Inventor： Youngjoo LEE ,  Byungsoo KIM ,  Seungyeon EOM ,  Dooman LEE

    IPC: G06Q30/02 ,  G06Q10/06 ,  H02J3/00

    Abstract: Disclosed is a server comprising: at least one processor; a communication circuit electrically connected to the at least one processor and transmitting or receiving a signal to/from an external device; and a memory electrically connected to the at least one processor and storing group information and control information, the group information representing at least one group including a group comprising a first electronic device and a second electronic device, and the control information being associated with each of the at least one group, wherein the at least one processor is configured so as to acquire demand response (DR)-associated information, and as a response to the DR-associated information, transmit the control information associated with the group to the first electronic device and the second electronic device. In addition, various embodiments are possible as identified in the specification.

    OPTICAL EMISSION SPECTROSCOPY CALIBRATION DEVICE AND SYSTEM INCLUDING THE SAME
    4.
    发明申请
    OPTICAL EMISSION SPECTROSCOPY CALIBRATION DEVICE AND SYSTEM INCLUDING THE SAME 审中-公开

    公开(公告)号：US20200319025A1

    公开(公告)日：2020-10-08

    申请号：US16751356

    申请日：2020-01-24

    Applicant: SAMSUNG ELECTRONICS CO., LTD.

    Inventor： Jongsu KIM ,  Younghwan KIM ,  Junbum PARK ,  Youngjoo LEE ,  Sungho JANG

    IPC: G01J3/02 ,  G01J3/10 ,  G02B27/14

    Abstract: An optical emission spectroscopy (OES) calibration system includes a chamber, an adapter, an OES device, a calibration device, and a spectrometer. The chamber includes a viewport. The adapter is fastened to the viewport, and includes a first beam splitter and a second beam splitter. The OES device detects plasma light generated in the chamber and transmitted through the adapter and generates OES data based on the detected plasma light. The calibration device includes a light source, and generates correction data for compensating for deviations in the OES data. The spectrometer detects light emitted from the light source and split by the first beam splitter or the second beam splitter. Each of the OES device, the calibration device, and the spectrometer is fastened to the adapter through an optical cable, and the calibration device generates the correction data using an intensity of light detected by the spectrometer.

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