公开(公告)号：US07096547B2

公开(公告)日：2006-08-29

申请号：US10688281

申请日：2003-10-17

申请人： Sang Kyeong Yun ,  Dong Hoon Kim ,  Sung June Park

发明人： Sang Kyeong Yun ,  Dong Hoon Kim ,  Sung June Park

IPC分类号： H04R17/00 ,  H01L41/083 ,  G03C5/00

CPC分类号： H01L41/33 ,  H01L41/1876 ,  H04R17/00 ,  Y10S29/016 ,  Y10T29/42 ,  Y10T29/49128 ,  Y10T29/49155 ,  Y10T29/49156

摘要： A manufacturing method for a ceramic device using a mixture with a photosensitive resin includes: providing a ceramic substrate, forming a lower electrode on the substrate using a mixture of a photosensitive resin and metal, masking and exposing the lower electrode to pattern the lower electrode, forming a piezoelectric/electrostrictive layer on the lower electrode using a mixture of photosensitive resin and piezoelectric/electrostrictive ceramic, masking and exposing the piezoelectric/electrostrictive layer to pattern the piezoelectric/electrostrictive layer, forming an upper electrode on the piezoelectric/electrostrictive layer using the mixture of photosensitive resin and metal, and exposing the upper electrode to pattern the upper electrode.

摘要翻译： 使用与感光性树脂的混合物的陶瓷器件的制造方法包括：提供陶瓷基板，使用感光性树脂和金属的混合物在基板上形成下部电极，对下部电极进行掩模和曝光以对下部电极进行图案化， 使用感光性树脂和压电/电致伸缩陶瓷的混合物在下部电极上形成压电/电致伸缩层，对压电/电致伸缩层进行掩模和曝光以对压电/电致伸缩层进行图案化，在压电/电致伸缩层上形成上电极，使用 感光树脂和金属的混合物，并暴露上电极以对上电极进行图案化。

公开(公告)号：US06662418B1

公开(公告)日：2003-12-16

申请号：US09444128

申请日：1999-11-19

申请人： Sang Kyeong Yun ,  Dong Hoon Kim ,  Sung June Park

发明人： Sang Kyeong Yun ,  Dong Hoon Kim ,  Sung June Park

IPC分类号： H04R1700

CPC分类号： H01L41/33 ,  H01L41/1876 ,  H04R17/00 ,  Y10S29/016 ,  Y10T29/42 ,  Y10T29/49128 ,  Y10T29/49155 ,  Y10T29/49156

摘要： A manufacturing method of ceramic device comprising the steps of forming by layer accumulation of a lower electrode, a piezoelectric/electrostrictive layer, and an upper electrode on a substrate using a mixture of photosensitive resin and metal or piezoelectric/electrostrictive ceramic; and patterning by light exposure at a single time, thereby, producing a ceramic device of high shape ratio can be produced and precision degree is very high so as to produce a ceramic device very precise in arrangement between layers or with infrastructure so that another effect may be made to systematically prevent the short between upper and lower electrodes.

摘要翻译： 一种陶瓷器件的制造方法，包括以下步骤：使用感光性树脂和金属或压电/电致伸缩陶瓷的混合物在基板上形成下层电极，压电/电致伸缩层和上电极的层积累; 并且通过单次曝光进行图案化，从而可以制造高形状比的陶瓷器件，并且精度非常高，以便在层之间或与基础设施之间布置非常精确地制造陶瓷器件，使得另一种效果可以 系统地防止上下电极之间的短路。

公开(公告)号：US06378995B1

公开(公告)日：2002-04-30

申请号：US09444119

申请日：1999-11-19

申请人： Sang Kyeong Yun ,  Sung June Park

发明人： Sang Kyeong Yun ,  Sung June Park

IPC分类号： B41J2045

CPC分类号： B41J2/1628 ,  B41J2/162 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1646

摘要： The present invention relates to methods of manufacturing a nozzle plate using a silicon process comprising the steps of providing a silicon substrate; forming a silicon oxide film on one side of the silicon substrate; patterning the silicon oxide film; performing an anisotropic wet etching on the silicon substrate after shielding the surface of the silicon substrate where silicon oxide film has not been formed; forming a boron layer on surface where silicon oxide film has been formed in the silicon substrate; etching the silicon substrate where the boron layer has been formed; and removing the silicon oxide film and the boron layer formed on the silicon oxide film by etching the silicon oxide film, or comprising the steps of: providing a silicon substrate; forming a boron layer on one surface of the silicon substrate; masking another surface of the silicon substrate where boron layer is not formed, into a desired pattern; performing an anisotropic wet etching of the patterned silicon substrate; masking the boron layer into a desired pattern; and forming a straight part at the boron layer by way of dry etching of the masked boron layer, nozzle plates manufactured by the methods, and ink jet printer heads applying the nozzle plates.

摘要翻译： 本发明涉及使用硅工艺制造喷嘴板的方法，包括以下步骤：提供硅衬底; 在硅衬底的一侧上形成氧化硅膜; 图案化氧化硅膜; 在对未形成氧化硅膜的硅衬底的表面进行屏蔽之后，对硅衬底进行各向异性湿蚀刻; 在硅衬底中形成氧化硅膜的表面上形成硼层; 蚀刻形成有硼层的硅衬底; 或通过蚀刻氧化硅膜去除氧化硅膜和形成在氧化硅膜上的硼层，或者包括以下步骤：提供硅衬底; 在所述硅衬底的一个表面上形成硼层; 将未形成硼层的硅衬底的另一表面掩蔽成所需图案; 对图案化硅衬底进行各向异性湿蚀刻; 将硼层掩蔽成所需的图案; 以及通过干法蚀刻掩模的硼层，通过该方法制造的喷嘴板，以及喷涂喷嘴板的喷墨打印头，在硼层上形成直的部分。

公开(公告)号：US06343849B1

公开(公告)日：2002-02-05

申请号：US09442513

申请日：1999-11-18

申请人： Sang Kyeong Yun ,  Sung June Park ,  Myung Song Jung

发明人： Sang Kyeong Yun ,  Sung June Park ,  Myung Song Jung

IPC分类号： B41J204

CPC分类号： B41J2/14

摘要： The present invention relates a manufacturing method of a microactuator for an ink jet printer head using a shape memory alloy, the method comprising steps of: providing a silicon substrate; forming an insulating film on the surface of the silicon substrate; forming a shape memory alloy layer by independent repetitive molding of each layer of respective component element constituting the shape memory alloy on the insulation film; bestowing a shape memory property by thermally treating the shape memory alloy layer; and forming a lower space part by etching the silicon substrate, and a microactuator manufactured by the method, whereby it is easy to control the composition constituting the shape memory alloy layer so that shape memory property of shape memory alloy layer is enhanced; and also it makes effect that it is eminent in repetition uniformity of ingredient composition ratios compared to traditional methods in which simultaneous vapor deposition or sputtering of all formation components is carried out because now each component element thickness and film growth sequence are independently controlled.

摘要翻译： 本发明涉及使用形状记忆合金的用于喷墨打印机头的微致动器的制造方法，该方法包括以下步骤：提供硅衬底; 在硅衬底的表面上形成绝缘膜; 通过在所述绝缘膜上独立地重复地形成构成所述形状记忆合金的各构成要素的各层来形成形状记忆合金层; 通过热处理形状记忆合金层赋予形状记忆性; 并且通过蚀刻硅衬底形成下部空间部分，以及通过该方法制造的微致动器，由此易于控制构成形状记忆合金层的组成，从而增强形状记忆合金层的形状记忆特性; 并且与其中进行同时气相沉积或全部形成成分的溅射的传统方法相比，其在成分组成比的重复均匀性方面是显着的，因为现在各组分元素厚度和膜生长顺序是独立控制的。

公开(公告)号：US06584708B2

公开(公告)日：2003-07-01

申请号：US09845484

申请日：2001-04-30

申请人： Sang Kyeong Yun ,  Sung June Park ,  Dong Hoon Kim

发明人： Sang Kyeong Yun ,  Sung June Park ,  Dong Hoon Kim

IPC分类号： B41J2045

CPC分类号： H01L41/0973 ,  H01L41/313 ,  H01L41/332

摘要： The present invention relates to a membraneless piezoelectric/electrostrictive microactuator comprising: a chamber; a chamber plate in which the chamber is formed; a lower electrode formed on the chamber plate and covering the chamber; a bonding layer formed between the chamber plate and the lower electrode and bonding the chamber plate and the lower electrode; a piezoelectric/electrostrictive film formed on the lower electrode and vibrating when electrified; and an upper electrode formed on the piezoelectric/electrostrictive film, and a manufacturing method thereof, which is membraneless so that structure is simple so that manufacturing method is simple and production cost is reduced to effect eventually the productivity improvement, so also which produces effect of reliability and yield ratio improvement as it is membraneless so that there occur no deformation, crack or void at the bonding part of vibration plate and piezoelectric/electrostrictive film.

摘要翻译： 无膜压电/电致伸缩微致动器技术领域本发明涉及一种无膜压电/电致伸缩微致动器，包括：腔室; 形成腔室的室板; 形成在所述室板上并覆盖所述室的下电极; 形成在所述室板和所述下电极之间并且接合所述室板和所述下电极的接合层; 形成在下电极上并在通电时振动的压电/电致伸缩膜; 以及形成在压电/电致伸缩膜上的上电极及其制造方法，其结构简单，制造方法简单，生产成本降低，生产效率提高，因此也是无膜的，因此也产生效果 可靠性和屈服比提高，因为它是无膜的，使得在振动板和压电/电致伸缩膜的接合部分处不发生变形，裂纹或空隙。

公开(公告)号：US06481821B1

公开(公告)日：2002-11-19

申请号：US09442514

申请日：1999-11-18

申请人： Sang Kyeong Yun ,  Sung June Park ,  Hae Yong Choi

发明人： Sang Kyeong Yun ,  Sung June Park ,  Hae Yong Choi

IPC分类号： B41J2045

CPC分类号： B41J2/14 ,  B41J2002/14346

摘要： The present invention relates to an actuator for an ink jet printer head using a shape memory alloy which includes a lower space part; a silicon substrate where said lower space part is formed; an insulating film formed on said silicon substrate surface and made of a silicon oxide film which acts to push the shape memory alloy film to nozzle side direction and a silicon nitride film which acts to pull the shape memory alloy film in a direction opposite to nozzle side; and a shape memory alloy layer formed upon said insulation film so as to cover said lower space part. The invention can make effect to prevent print state deterioration by repetitive use as it can minimize actuator fatigue phenomenon by repetitive use by way of initial transformation direction and magniture control according to insulation film formation of adequate composition and thickness.

摘要翻译： 本发明涉及一种使用形状记忆合金的喷墨打印头的致动器，该形状记忆合金包括下部空间部分; 形成所述下部空间部分的硅基板; 在所述硅衬底表面上形成的绝缘膜，其由用于将形状记忆合金膜推向喷嘴侧方向的氧化硅膜和用于将形状记忆合金膜沿与喷嘴侧相反的方向拉动的氮化硅膜 ; 以及形成在所述绝缘膜上以覆盖所述下部空间部分的形状记忆合金层。 本发明可以通过重复使用来实现防止打印状态恶化，因为它可以通过根据初始转换方向和根据具有足够组成和厚度的绝缘膜形成的幅度控制重复使用来最小化致动器疲劳现象。

公开(公告)号：US06265139B1

公开(公告)日：2001-07-24

申请号：US09334127

申请日：1999-06-15

申请人： Sang Kyeong Yun ,  Sung-June Park ,  Yeon Kyoung Jung

发明人： Sang Kyeong Yun ,  Sung-June Park ,  Yeon Kyoung Jung

IPC分类号： B81C100

CPC分类号： H01L41/331 ,  H01L41/0477 ,  H01L41/0973 ,  H01L41/1875 ,  H01L41/314

摘要： Disclosed is a method for fabricating a piezoelectric/electrostrictive thick film, using photolithography. On a vibrating plate is formed a bottom electrode. Over the bottom electrode, a photoresist is coated, exposed to light and developed to form molds in fine patterns. Separately, a ceramic paste is prepared by mixing a ceramic oxide powder and a ceramic sol solution. The ceramic oxide powder has a particle size of 5 &mgr;m or less and is prepared from Pb and Ti-based ceramic oxide powder by a non-explosive oxidation-reduction combustion reaction at 100-500° C. while the ceramic sol solution, identical or similar in composition to the ceramic oxide powder, uses water or an organic solvent as an base. Next, the ceramic paste is filled in the molds to form a piezoelectric/electrostrictive film, followed by conducting a thermal treatment at 100 to 300° C. to sinter the film. Finally, a top electrode is formed on the film. Alternatively, the bottom electrode may be not formed if the vibrating plate is of electroconductivity. In the micro actuator, a high aspect ratio of fine patterns and a significant improvement in the bonding properties between the film and the infrastructure are achieved. Also, the film is protected from external damage, such as scratching, because the molds surround the film.

摘要翻译： 公开了使用光刻法制造压电/电致伸缩厚膜的方法。 在振动板上形成底部电极。 在底部电极上，涂覆光致抗蚀剂，暴露于光并显影以形成精细图案的模具。 另外，通过混合陶瓷氧化物粉末和陶瓷溶胶溶液来制备陶瓷浆料。 陶瓷氧化物粉末的粒径为5μm以下，通过在100-500℃下的非爆炸性氧化还原燃烧反应由Pb和Ti系陶瓷氧化物粉末制成，同时陶瓷溶胶溶液相同或 与陶瓷氧化物粉末的组成相似，使用水或有机溶剂作为碱。 接下来，将陶瓷膏填充到模具中以形成压电/电致伸缩膜，然后在100至300℃下进行热处理以烧结该膜。 最后，在膜上形成顶部电极。 或者，如果振动板具有导电性，则可能不形成底部电极。 在微致动器中，实现了精细图案的高纵横比和薄膜与基础设施之间的粘结特性的显着改善。 此外，由于模具围绕胶片，因此该胶片可以防止外部损坏，例如划伤。

公开(公告)号：US08742688B2

公开(公告)日：2014-06-03

申请号：US13505179

申请日：2010-10-29

申请人： Dong Won Lee ,  Chang Soo Lim ,  Tae Eung Kim ,  Sang Kyeong Yun ,  Yong Min Jung ,  Tae Keun Oh

发明人： Dong Won Lee ,  Chang Soo Lim ,  Tae Eung Kim ,  Sang Kyeong Yun ,  Yong Min Jung ,  Tae Keun Oh

IPC分类号： H05B37/02

CPC分类号： H05B37/0272 ,  H05B33/0842

摘要： A harbor lighting control apparatus is provided, which includes a plurality of slaves to perform on control or off control, and dimming control with respect to a light emitting diode (LED) array light source mounted to a lighthouse when an on control signal or off control signal, and a dimming control signal are received, and to transmit a result of the control as acknowledge signals, and a master to transmit the on control signal or off control signal and the dimming control signal to all of the plurality of slaves by a broadcast scheme, to transmit the on control signal or off control signal and the dimming control signal to an individual slave by a unicast scheme, and to recognize operational states of the plurality of slaves by receiving the acknowledge signals from the plurality of slaves. Accordingly, stable and reliably control of the harbor lighting is enabled.

摘要翻译： 提供了一种港口照明控制装置，其包括多个从动装置，用于执行控制或关闭控制，以及相对于安装在灯塔上的发光二极管（LED）阵列光源的调光控制，当开启控制信号或关闭控制 信号和调光控制信号，并将控制结果作为确认信号发送，并且主机通过广播向所有多个从设备发送接通控制信号或关断控制信号和调光控制信号 方案，通过单播方案将接通控制信号或关闭控制信号和调光控制信号发送到各个从机，并通过从多个从机接收确认信号来识别多个从机的操作状态。 因此，能够稳定可靠地控制港口照明。

公开(公告)号：US20120274236A1

公开(公告)日：2012-11-01

申请号：US13505179

申请日：2010-10-29

申请人： Dong Won Lee ,  Chang Soo Lim ,  Tae Eung Kim ,  Sang Kyeong Yun ,  Yong Min Jung ,  Tae Keun Oh

发明人： Dong Won Lee ,  Chang Soo Lim ,  Tae Eung Kim ,  Sang Kyeong Yun ,  Yong Min Jung ,  Tae Keun Oh

IPC分类号： H05B37/02

CPC分类号： H05B37/0272 ,  H05B33/0842

摘要： A harbor lighting control apparatus is provided, which includes a plurality of slaves to perform on control or off control, and dimming control with respect to a light emitting diode (LED) array light source mounted to a lighthouse when an on control signal or off control signal, and a dimming control signal are received, and to transmit a result of the control as acknowledge signals, and a master to transmit the on control signal or off control signal and the dimming control signal to all of the plurality of slaves by a broadcast scheme, to transmit the on control signal or off control signal and the dimming control signal to an individual slave by a unicast scheme, and to recognize operational states of the plurality of slaves by receiving the acknowledge signals from the plurality of slaves. Accordingly, stable and reliably control of the harbor lighting is enabled.

摘要翻译： 提供了一种港口照明控制装置，其包括多个从动装置，用于执行控制或关闭控制，以及相对于安装在灯塔上的发光二极管（LED）阵列光源的调光控制，当开启控制信号或关闭控制 信号和调光控制信号，并将控制结果作为确认信号发送，并且主机通过广播向所有多个从设备发送接通控制信号或关断控制信号和调光控制信号 方案，通过单播方案将接通控制信号或关闭控制信号和调光控制信号发送到各个从机，并通过从多个从机接收确认信号来识别多个从机的操作状态。 因此，能够稳定可靠地控制港口照明。

公开(公告)号：US07832877B2

公开(公告)日：2010-11-16

申请号：US11393260

申请日：2006-03-30

申请人： Sang Kyeong Yun ,  In Jae Yeo ,  Haeng Seok Yang ,  Chun Gi Kim ,  Kyu Bum Han ,  Seung Won Ryu

发明人： Sang Kyeong Yun ,  In Jae Yeo ,  Haeng Seok Yang ,  Chun Gi Kim ,  Kyu Bum Han ,  Seung Won Ryu

IPC分类号： G03B21/28 ,  G03B21/00 ,  G02B26/00 ,  G02B5/18

CPC分类号： G02B26/0808 ,  H04M1/0214 ,  H04M1/0235 ,  H04M1/0272 ,  H04N5/7458 ,  H04N9/3114 ,  H04N9/3141

摘要： A mobile terminal includes an optical modulation projector. The mobile terminal also includes a control system, a projection control unit, and an optical modulation system. The control system outputs a projection control signal and image data. The projection control unit receives the image data from the control system, and generates and outputs a drive control signal depending on the image data received. The optical modulation system generates and modulates light and generates an image in response to the drive control signal and then scans the image for projecting onto a screen.

摘要翻译： 移动终端包括光调制投影仪。 移动终端还包括控制系统，投影控制单元和光调制系统。 控制系统输出投影控制信号和图像数据。 投影控制单元从控制系统接收图像数据，并根据所接收的图像数据产生并输出驱动控制信号。 光调制系统产生并调制光并且响应于驱动控制信号产生图像，然后扫描图像以投影到屏幕上。