公开(公告)号：US20050164285A1

公开(公告)日：2005-07-28

申请号：US11082634

申请日：2005-03-18

申请人： Sanjay Patel ,  Bernd Fruhberger ,  Robert Warmack ,  Todd Mlsna ,  David Baselt ,  Erno Klaassen

发明人： Sanjay Patel ,  Bernd Fruhberger ,  Robert Warmack ,  Todd Mlsna ,  David Baselt ,  Erno Klaassen

IPC分类号： G01N27/22 ,  C12Q1/68 ,  C12M1/34

CPC分类号： G01N27/227

摘要： A sensor for determining the presence of an analyte is disclosed comprising a reactive layer disposed between a base plate and a movable plate. The reactive layer is configured to interact with an analyte effecting a change in capacitance between the base plate and movable plate. When the analyte has a polarity or overall Hildebrand solubility parameter that is similar to the reactive layer, the change in capacitance is caused by a swelling of the reactive layer as analyte is absorbed into the reactive layer. This results in a decrease in capacitance. When the analyte has a solubility parameter not near the reactive layer, the absorbed analyte causes the reactive layer's total polarity to increase, an effect that dominates swelling. This causes an increase in capacitance. A capacitive sensing circuit is included for measuring the change in capacitance which is indicative of the analyte exposed to the sensor.

公开(公告)号：US20070194406A1

公开(公告)日：2007-08-23

申请号：US11542741

申请日：2006-10-02

申请人： Sanjay Patel ,  Bernd Fruhberger ,  Erno Klaassen ,  Todd Mlsna ,  David Baselt

发明人： Sanjay Patel ,  Bernd Fruhberger ,  Erno Klaassen ,  Todd Mlsna ,  David Baselt

IPC分类号： H01L29/00

CPC分类号： B81C1/00341 ,  B81B2201/0214 ,  B81C1/00182 ,  G01N27/227 ,  H01G5/18

摘要： A fixed parallel plate micro-mechanical systems (MEMS) based sensor is fabricated to allow a dissolved dielectric to flow through a porous top plate, coming to rest on a bottom plate. A post-deposition bake ensures further purity and uniformity of the dielectric layer. In one embodiment, the dielectric is a polymer. In one embodiment, a support layer is deposited onto the top plate for strengthening the sensor. In another embodiment, the bottom plate is dual-layered for a narrowed gap. Integrated circuit arrays of such sensors can be made, having multiple devices separated from each other by a physical barrier, such as a polycrystalline containment rim or trough, for preventing polymer material from one sensor from interfering with that of another.

摘要翻译： 制造基于固定平行板微机械系统（MEMS）的传感器，以使溶解的电介质流过多孔顶板，停留在底板上。 沉积后烘烤确保了电介质层的进一步纯度和均匀性。 在一个实施方案中，电介质是聚合物。 在一个实施例中，支撑层沉积在顶板上以加强传感器。 在另一个实施例中，底板是双层的，用于狭窄的间隙。 可以制造这种传感器的集成电路阵列，其具有通过物理屏障（例如多晶容纳边缘或槽）彼此分离的多个装置，用于防止来自一个传感器的聚合物材料与另一传感器的干扰。

公开(公告)号：US20070264741A1

公开(公告)日：2007-11-15

申请号：US11725609

申请日：2007-03-20

申请人： Sanjay Patel ,  Bernd Fruhberger ,  Erno Klaassen ,  Todd Misna ,  David Baselt

发明人： Sanjay Patel ,  Bernd Fruhberger ,  Erno Klaassen ,  Todd Misna ,  David Baselt

IPC分类号： H01L21/20

CPC分类号： B81C1/00341 ,  B81B2201/0214 ,  B81C1/00182 ,  G01N27/227 ,  H01G5/18

摘要： A fixed parallel plate micro-mechanical systems (MEMS) based sensor is fabricated to allow a dissolved dielectric to flow through a porous top plate, coming to rest on a bottom plate. A post-deposition bake ensures further purity and uniformity of the dielectric layer. In one embodiment the dielectric is a polymer. In one embodiment, a support layer is deposited onto the top plate for strengthening the sensor. In another embodiment, the bottom plate is dual-layered for a narrowed gap. Integrated circuit arrays of such sensors can be made, having multiple devices separated from each other by a physical barrier, such as a polycrystalline containment rim or rough, for preventing polymer material from one sensor from Interfering with that of another.

摘要翻译： 制造基于固定平行板微机械系统（MEMS）的传感器，以使溶解的电介质流过多孔顶板，停留在底板上。 沉积后烘烤确保了电介质层的进一步纯度和均匀性。 在一个实施方案中，电介质是聚合物。 在一个实施例中，支撑层沉积在顶板上以加强传感器。 在另一个实施例中，底板是双层的，用于狭窄的间隙。 可以制造这种传感器的集成电路阵列，其具有通过物理屏障（例如多晶容纳边缘或粗糙物体）彼此分离的多个装置，用于防止来自一个传感器的聚合物材料与另一个传感器干扰。

公开(公告)号：US06864692B1

公开(公告)日：2005-03-08

申请号：US10177133

申请日：2002-06-20

申请人： Sanjay V. Patel ,  Bernd Fruhberger ,  Robert J. Warmack ,  Todd E. Mlsna ,  David R. Baselt ,  Erno Klaassen

发明人： Sanjay V. Patel ,  Bernd Fruhberger ,  Robert J. Warmack ,  Todd E. Mlsna ,  David R. Baselt ,  Erno Klaassen

IPC分类号： G01N27/22 ,  G01R27/26 ,  H01G5/16

CPC分类号： G01N27/227

摘要： A sensor for determining the presence of an analyte is disclosed comprising a reactive layer disposed between a base plate and a movable plate. The reactive layer is configured to interact with an analyte effecting a change in capacitance between the base plate and movable plate. When the analyte has a polarity or overall Hildebrand solubility parameter that is similar to the reactive layer, the change in capacitance is caused by a swelling of the reactive layer as analyte is absorbed into the reactive layer. This results in a decrease in capacitance. When the analyte has a solubility parameter not near the reactive layer, the absorbed analyte causes the reactive layer's total polarity to increase, an effect that dominates swelling. This causes an increase in capacitance. A capacitive sensing circuit is included for measuring the change in capacitance which is indicative of the analyte exposed to the sensor.

摘要翻译： 公开了一种用于确定分析物存在的传感器，其包括设置在基板和可移动板之间的反应层。 反应层被配置为与分析物相互作用，影响基板和可移动板之间的电容变化。 当分析物具有类似于反应层的极性或整体Hildebrand溶解度参数时，电容的变化是由反应层的溶胀引起的，因为分析物被吸收到反应层中。 这导致电容降低。 当分析物具有不在反应层附近的溶解度参数时，吸收的分析物导致反应层的总极性增加，这是影响溶胀的作用。 这导致电容增加。 包括电容感测电路，用于测量表明分析物暴露于传感器的电容变化。

公开(公告)号：US07489017B2

公开(公告)日：2009-02-10

申请号：US11542741

申请日：2006-10-02

申请人： Sanjay V. Patel ,  Bernd Fruhberger ,  Erno Klaassen ,  Todd E. Mlsna ,  David R. Baselt

发明人： Sanjay V. Patel ,  Bernd Fruhberger ,  Erno Klaassen ,  Todd E. Mlsna ,  David R. Baselt

IPC分类号： H01L29/00

CPC分类号： B81C1/00341 ,  B81B2201/0214 ,  B81C1/00182 ,  G01N27/227 ,  H01G5/18

摘要： A fixed parallel plate micro-mechanical systems (MEMS) based sensor is fabricated to allow a dissolved dielectric to flow through a porous top plate, coming to rest on a bottom plate. A post-deposition bake ensures further purity and uniformity of the dielectric layer. In one embodiment, the dielectric is a polymer. In one embodiment, a support layer is deposited onto the top plate for strengthening the sensor. In another embodiment, the bottom plate is dual-layered for a narrowed gap. Integrated circuit arrays of such sensors can be made, having multiple devices separated from each other by a physical barrier, such as a polycrystalline containment rim or trough, for preventing polymer material from one sensor from interfering with that of another.

摘要翻译： 制造基于固定平行板微机械系统（MEMS）的传感器，以使溶解的电介质流过多孔顶板，停留在底板上。 沉积后烘烤确保了电介质层的进一步纯度和均匀性。 在一个实施方案中，电介质是聚合物。 在一个实施例中，支撑层沉积在顶板上以加强传感器。 在另一个实施例中，底板是双层的，用于狭窄的间隙。 可以制造这种传感器的集成电路阵列，其具有通过物理屏障（例如多晶容纳边缘或槽）彼此分离的多个装置，用于防止来自一个传感器的聚合物材料与另一传感器的干扰。

公开(公告)号：US07393740B2

公开(公告)日：2008-07-01

申请号：US11725609

申请日：2007-03-20

申请人： Sanjay V. Patel ,  Bernd Fruhberger ,  Erno Klaassen ,  Todd E. Mlsna ,  David R. Baselt

发明人： Sanjay V. Patel ,  Bernd Fruhberger ,  Erno Klaassen ,  Todd E. Mlsna ,  David R. Baselt

IPC分类号： H01L29/00 ,  H01L21/8244 ,  H01L21/8242 ,  H01L21/20

CPC分类号： B81C1/00341 ,  B81B2201/0214 ,  B81C1/00182 ,  G01N27/227 ,  H01G5/18

摘要： A fixed parallel plate micro-mechanical systems (MEMS) based sensor is fabricated to allow a dissolved dielectric to flow through a porous top plate, coming to rest on a bottom plate. A post-deposition bake ensures further purity and uniformity of the dielectric layer. In one embodiment the dielectric is a polymer. In one embodiment, a support layer is deposited onto the top plate for strengthening the sensor. In another embodiment, the bottom plate is dual-layered for a narrowed gap. Integrated circuit arrays of such sensors can be made, having multiple devices separated from each other by a physical barrier, such as a polycrystalline containment rim or trough, for preventing polymer material from one sensor from interfering with that of another.

摘要翻译： 制造基于固定平行板微机械系统（MEMS）的传感器，以使溶解的电介质流过多孔顶板，停留在底板上。 沉积后烘烤确保了电介质层的进一步纯度和均匀性。 在一个实施方案中，电介质是聚合物。 在一个实施例中，支撑层沉积在顶板上以加强传感器。 在另一个实施例中，底板是双层的，用于狭窄的间隙。 可以制造这种传感器的集成电路阵列，其具有通过物理屏障（例如多晶容纳边缘或槽）彼此分离的多个装置，用于防止来自一个传感器的聚合物材料与另一传感器的干扰。

公开(公告)号：US07115969B1

公开(公告)日：2006-10-03

申请号：US10242966

申请日：2002-09-13

申请人： Sanjay V. Patel ,  Bernd Fruhberger ,  Erno Klaassen ,  Todd E. Misna ,  David R. Baselt

发明人： Sanjay V. Patel ,  Bernd Fruhberger ,  Erno Klaassen ,  Todd E. Misna ,  David R. Baselt

IPC分类号： H01L29/00

CPC分类号： B81C1/00341 ,  B81B2201/0214 ,  B81C1/00182 ,  G01N27/227 ,  H01G5/18

摘要： A fixed parallel plate micro-mechanical systems (MEMS) based sensor is fabricated to allow a dissolved dielectric to flow through a porous top plate, coming to rest on a bottom plate. A post-deposition bake ensures further purity and uniformity of the dielectric layer. In one embodiment, the dielectric is a polymer. In one embodiment, a support layer is deposited onto the top plate for strengthening the sensor. In another embodiment, the bottom plate is dual-layered for a narrowed gap. Integrated circuit arrays of such sensors can be made, having multiple devices separated from each other by a physical barrier, such as a polycrystalline containment rim or trough, for preventing polymer material from one sensor from interfering with that of another.

摘要翻译： 制造基于固定平行板微机械系统（MEMS）的传感器，以使溶解的电介质流过多孔顶板，停留在底板上。 沉积后烘烤确保了电介质层的进一步纯度和均匀性。 在一个实施方案中，电介质是聚合物。 在一个实施例中，支撑层沉积在顶板上以加强传感器。 在另一个实施例中，底板是双层的，用于狭窄的间隙。 可以制造这种传感器的集成电路阵列，其具有通过物理屏障（例如多晶容纳边缘或槽）彼此分离的多个装置，用于防止来自一个传感器的聚合物材料与另一传感器的干扰。

公开(公告)号：US06977511B2

公开(公告)日：2005-12-20

申请号：US11082634

申请日：2005-03-08

申请人： Sanjay V. Patel ,  Bernd Fruhberger ,  Robert J. Warmack ,  Todd E. Mlsna ,  David R. Baselt ,  Erno Klaassen

发明人： Sanjay V. Patel ,  Bernd Fruhberger ,  Robert J. Warmack ,  Todd E. Mlsna ,  David R. Baselt ,  Erno Klaassen

IPC分类号： G01N27/22 ,  G01R27/26 ,  H01G5/16

CPC分类号： G01N27/227

摘要： A sensor for determining the presence of an analyte is disclosed comprising a reactive layer disposed between a base plate and a movable plate. The reactive layer is configured to interact with an analyte effecting a change in capacitance between the base plate and movable plate. When the analyte has a polarity or overall Hildebrand solubility parameter that is similar to the reactive layer, the change in capacitance is caused by a swelling of the reactive layer as analyte is absorbed into the reactive layer. This results in a decrease in capacitance. When the analyte has a solubility parameter not near the reactive layer, the absorbed analyte causes the reactive layer's total polarity to increase, an effect that dominates swelling. This causes an increase in capacitance. A capacitive sensing circuit is included for measuring the change in capacitance which is indicative of the analyte exposed to the sensor.

摘要翻译： 公开了一种用于确定分析物存在的传感器，其包括设置在基板和可移动板之间的反应层。 反应层被配置为与分析物相互作用，影响基板和可移动板之间的电容变化。 当分析物具有类似于反应层的极性或整体Hildebrand溶解度参数时，电容的变化是由反应层的溶胀引起的，因为分析物被吸收到反应层中。 这导致电容降低。 当分析物具有不在反应层附近的溶解度参数时，吸收的分析物导致反应层的总极性增加，这是影响溶胀的作用。 这导致电容增加。 包括电容感测电路，用于测量表明分析物暴露于传感器的电容变化。

公开(公告)号：US07340941B1

公开(公告)日：2008-03-11

申请号：US10677908

申请日：2003-10-01

申请人： Bernd Fruhberger ,  David R. Baselt

发明人： Bernd Fruhberger ,  David R. Baselt

IPC分类号： G01N27/00

CPC分类号： G01N29/036 ,  G01N2291/0256

摘要： Sensors for determining the ambient amount (e.g., concentration) of a chemical (e.g., molecular hydrogen in a gas or vapor) are disclosed. Preferred embodiments of these sensors comprise a dense thin metal (e.g., palladium or a palladium alloy) film disposed on a microcantilever beam that is suspended above a stationary baseplate. The dense thin metal film is configured to absorb, for example, hydrogen, thereby causing the film to expand which in turn causes the microcantilever beam to deform. The deformation can be measured, for example, as a change in capacitance between the microcantilever beam and the stationary baseplate. The measured change in capacitance is indicative of the ambient hydrogen concentration.

摘要翻译： 公开了用于确定化学物质（例如气体或蒸气中的分子氢）的环境量（例如浓度）的传感器。 这些传感器的优选实施例包括设置在悬架在固定基板上方的微悬臂梁上的致密薄金属（例如，钯或钯合金）膜。 致密的薄金属膜被配置为吸收例如氢，从而导致膜膨胀，这又导致微悬臂梁变形。 可以测量变形，例如，作为微悬臂梁和固定基板之间的电容变化。 测量的电容变化表示环境氢浓度。