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公开(公告)号：US5469749A
公开(公告)日：1995-11-28
申请号：US411922
申请日：1995-03-28
IPC分类号： G01F1/38 , G01F1/36 , G01F1/37 , G01F1/42 , G01F1/44 , G01F1/50 , G01F15/02 , G01F23/14 , G01F23/16 , G01L9/00 , G01L19/00 , G01L7/08
CPC分类号： G01F1/363 , G01F1/372 , G01F1/383 , G01F1/44 , G01F23/164 , G01L19/0092 , G01L9/0054
摘要： A measuring and controlling system is provided which has a control function as well as a measurement function to perform the measurement and control of fluid amounts such as the flow rate, pressure, liquid level, weight and so on by itself in the same field. A pressure receiving unit is directly mounted on a pipe or a container, in which a fluid under measurement exists, in order to detect the temperature, differential pressure and static pressure of the fluid under measurement independently of each other. Means for storing the characteristic of fluids under measurement is provided such that the mass flow rate, weight and liquid level can be calculated. By providing the transmitter with the measurement and control functions, the measurement and control of fluid amounts such as flow rate, pressure, liquid level, weight and so on can be performed in a closed form, thereby making it possible to simplify a correction procedure for the static pressure and temperature, improve the responsibility, and enhance the control performance of the whole plant. Also, a measuring and controlling system can be realized which reduces a wiring amount for connecting with an upper level control unit.
摘要翻译： 提供了一种测量和控制系统，其具有控制功能和测量功能，以在相同的领域中自身进行流量，压力，液位，重量等流体量的测量和控制。 压力接收单元直接安装在其上存在测量流体的管道或容器上，以便彼此独立地检测待测流体的温度，压差和静压力。 提供了用于存储测量流体特性的装置，以便可以计算质量流量，重量和液位。 通过向变送器提供测量和控制功能，可以以封闭形式执行流量，压力，液位，重量等流体量的测量和控制，从而可以简化对 静态压力和温度，提高责任感，提高整厂的控制性能。 此外，可以实现减少与上位控制单元连接的配线量的测量和控制系统。
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2.发明授权Integrated multisensor and static and differential pressure transmitter and plant system using the integrated multisensor 失效集成多传感器和静压差压变送器和工厂系统采用集成式多传感器
公开(公告)号：US5259248A
公开(公告)日：1993-11-09
申请号：US672113
申请日：1991-03-19
申请人： Seiichi Ugai , Satoshi Shimada , Tomoyuki Tobita , Akira Sase
发明人： Seiichi Ugai , Satoshi Shimada , Tomoyuki Tobita , Akira Sase
CPC分类号： G01L19/0092 , G01L9/0054 , G01L9/065
摘要： In an integrated multisensor used in a differential and static pressure transmitter, a pair of static pressure gages are formed on a static pressure detecting diaphragm and another pair of static pressure gages are formed at positions on a fixed portion which are near to the center of a differential pressure detecting diaphragm. The second term generated by a differential pressure appearing in a static pressure sensor is a function of a distance. Therefore, equal influence is exerted on each static pressure gage. Accordingly, by constructing a static pressure sensor so as to form a bridge circuit, a static pressure value free of the influence of a differential pressure can be detected, thereby making it possible to determine an accurate differential and static pressure.
摘要翻译： 在用于差压静态压力变送器的集成多传感器中，静压检测膜上形成一对静压计，另一对静压计则形成在靠近中心的固定部位 差压检测膜片。 通过出现在静压传感器中的差压产生的第二项是距离的函数。 因此，对每个静压力表施加相等的影响。 因此，通过构造静压传感器以形成桥接电路，可以检测到不受压差影响的静压值，从而可以确定精确的差动静压。
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公开(公告)号：US4972716A
公开(公告)日：1990-11-27
申请号：US392298
申请日：1989-08-11
申请人： Tomoyuki Tobita , Akira Sase , Yoshimi Yamamoto , Satoshi Shimada
发明人： Tomoyuki Tobita , Akira Sase , Yoshimi Yamamoto , Satoshi Shimada
CPC分类号： G01L19/146 , G01L19/0076 , G01L19/147 , G01L9/0054
摘要： A semiconductor pressure converting device including a fixing table joined to a silicon diaphragm consists of 2 structures superposed on each other, in which the longitudinal elastic modulus of the first fixing table is significantly different from the longitudinal elastic modulus of the semiconductor diaphragm. The first fixing table is highly insulating and the linear expansion coefficient thereof is approximately equal to the linear expansion coefficient of the semiconductor diaphragm. The second fixing table is made of a material having a longitudinal elastic modulus and a linear expansion coefficient approximately equal to those of the semiconductor diaphragm.
摘要翻译： 一种半导体压力转换装置，包括与硅膜连接的固定台，由彼此重叠的2个结构构成，其中第一固定台的纵向弹性模量与半导体膜片的纵向弹性模量显着不同。 第一固定台是绝热的，其线膨胀系数近似等于半导体膜片的线膨胀系数。 第二固定台由纵向弹性模量和线膨胀系数近似等于半导体膜片的材料制成。
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公开(公告)号：US5554809A
公开(公告)日：1996-09-10
申请号：US318315
申请日：1994-10-05
CPC分类号： G01L19/146 , G01L19/0007 , G01L19/0038 , G01L19/02 , G01L19/0645 , G01L19/142 , G01L19/148
摘要： A compact pressure differential/pressure detector is a process detection apparatus for measuring a pressure, a level, a pressure differential of a process fluid. The detector is constructed of a pressure sensing block having sensors for sensing a pressure and a pressure differential, a signal processing block for processing signals from the pressure sensing block, and a terminal board block for receiving power supply from outside and transmitting signals to outside. These blocks are arranged along the same axis. Furthermore, an indicator indicating a process state is also arranged along the same axis and received in a covering case. The case is firmly attached to the pressure sensing block. The process detection apparatus permits a compact design and offers an excellent maintainability.
摘要翻译： 紧凑型压力差压/压力检测器是用于测量过程流体的压力，水平和压力差的过程检测装置。 检测器由具有用于感测压力和压力差的传感器的压力感测块，用于处理来自压力感测块的信号的信号处理块，以及用于从外部接收电力并将信号传输到外部的端子板块构成。 这些块沿同一轴线排列。 此外，指示处理状态的指示器也沿着相同的轴布置并被接收在覆盖壳体中。 壳体牢固地连接到压力传感块。 过程检测装置允许紧凑的设计并提供优异的可维护性。
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公开(公告)号：US5635649A
公开(公告)日：1997-06-03
申请号：US447705
申请日：1995-05-23
申请人： Tomoyuki Tobita , Yoshimi Yamamoto , Akira Nagasu , Ken'ichi Aoki
发明人： Tomoyuki Tobita , Yoshimi Yamamoto , Akira Nagasu , Ken'ichi Aoki
CPC分类号： G01L19/0084 , G01L19/0092 , G01L19/02 , G01L19/04 , G01L19/146 , G01L19/147
摘要： A multi-function differential pressure sensor includes a semiconductor chip, a stationary base having a joining portion joined to a thick wall portion of the semiconductor chip, and a housing joined to the stationary base. The semiconductor chip is provided with a differential pressure detection unit, a static pressure detection unit, and a temperature detection unit. The joining portion of the stationary base is not thicker than the semiconductor chip. The stationary base has one or more thin wall portions located, in a plan view, within a circular pressure sensitive diaphragm of the semiconductor chip.
摘要翻译： 多功能差压传感器包括半导体芯片，具有接合到半导体芯片的厚壁部分的接合部分的固定基座和连接到固定基座的壳体。 半导体芯片设置有差压检测单元，静压检测单元和温度检测单元。 固定基座的接合部分不比半导体芯片厚。 固定基座具有位于半导体芯片的圆形压敏膜内的平面图中的一个或多个薄壁部分。
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6.发明授权Process condition detecting apparatus and semiconductor sensor condition detecting circuit 失效工艺条件检测装置和半导体传感器状态检测电路
公开(公告)号：US5528940A
公开(公告)日：1996-06-25
申请号：US190847
申请日：1994-02-03
申请人： Yoshimi Yamamoto , Tomoyuki Tobita
发明人： Yoshimi Yamamoto , Tomoyuki Tobita
CPC分类号： G01L9/065 , G01L19/02 , G01L19/147 , G01L9/0054
摘要： A differential pressure transmitter having a differential pressure sensor, a temperature sensor and a static pressure sensor all provided on the semiconductor substrate of a single semiconductor chip. A reference resistor is provided in a part of the chip. Resistances of the differential pressure sensor and the reference resistor are compared periodically in order to determine the condition including service life of the differential pressure sensor.
摘要翻译： 一种具有差压传感器，温度传感器和静压传感器的差压变送器，其全部设置在单个半导体芯片的半导体衬底上。 在芯片的一部分中提供参考电阻。 定期比较差压传感器和参考电阻的电阻，以确定包括差压传感器使用寿命的条件。
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公开(公告)号：US5672826A
公开(公告)日：1997-09-30
申请号：US648747
申请日：1996-05-16
申请人： Hideo Suzuki , Ken Takahashi , Yukio Takahashi , Yoshimi Yamamoto , Kenichi Aoki , Tomoyuki Tobita
发明人： Hideo Suzuki , Ken Takahashi , Yukio Takahashi , Yoshimi Yamamoto , Kenichi Aoki , Tomoyuki Tobita
CPC分类号： G01L19/147 , G01L19/0038 , G01L19/0645 , G01L19/148 , G01L9/0054
摘要： The present invention provides a semiconductor pressure sensor having a glass base and a metal base bonded together satisfactorily so that a silicon diaphragm may not be affected by residual strain, and an intelligent differential pressure and pressure transmitting device employing the semiconductor pressure sensor. The semiconductor pressure sensor comprises a silicon diaphragm (1) provided with a strain-sensitive element, a glass or ceramic base (2) bonded to the silicon diaphragm (1), and a metal base (4) bonded to the glass or ceramic base (2) with a bonding glass (3). The thermal expansion coefficient of the metal base (4) at a temperature corresponding to the strain point of the bonding glass (3) is not greater than that of the glass or ceramic base (2).
摘要翻译： 本发明提供一种半导体压力传感器，其具有玻璃基座和金属基座，令人满意地结合在一起，使得硅膜片不会受到残余应变的影响，并且采用半导体压力传感器的智能差压和压力传递装置。 半导体压力传感器包括设置有应变敏感元件的硅隔膜（1），接合到硅隔膜（1）的玻璃或陶瓷基体（2），以及接合到玻璃或陶瓷基底的金属基底（4） （2）用粘合玻璃（3）。 在与玻璃（3）的应变点对应的温度下，金属基体（4）的热膨胀系数不大于玻璃或陶瓷基体（2）的热膨胀系数。
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公开(公告)号：US5621175A
公开(公告)日：1997-04-15
申请号：US601494
申请日：1996-02-14
申请人： Akira Nagasu , Yoshimi Yamamoto , Tomoyuki Tobita
发明人： Akira Nagasu , Yoshimi Yamamoto , Tomoyuki Tobita
CPC分类号： G01L19/142 , G01L13/025 , G01L19/0038 , G01L19/0645
摘要： A differential pressure transmitter for detecting a difference between a pressure of a first detection fluid in a first pressure-receiving chamber and a pressure of a second detection fluid in a second pressure-receiving chamber, including a first diaphragm for sealing the first detection fluid, a second diaphragm for sealing the second detection fluid which is installed almost in parallel to the first diaphragm, a first isolation chamber communicated to the first pressure-receiving chamber, a second isolation chamber communicated to the second pressure-receiving chamber, a third diaphragm installed between the first and the second chambers and in a direction different from those of the first and second diaphragms, and a differential pressure detection sensor installed on and connected to at least one of the first and the second isolation chambers. The differential pressure transmitter having a symmetrical construction has a high sensitivity because difference between transmitting coefficients in pressure transmitting paths in high and low pressures is minimized.
摘要翻译： 一种差压变送器，用于检测第一受压室中的第一检测流体的压力与第二受压室中的第二检测流体的压力之差，包括用于密封第一检测流体的第一隔膜， 用于密封大致平行于第一隔膜安装的第二检测流体的第二隔膜，与第一受压室连通的第一隔离室，与第二受压室连通的第二隔离室，安装有第三隔膜的第三隔膜 在第一和第二室之间并且沿与第一和第二隔膜的方向不同的方向，以及安装在第一和第二隔离室中的至少一个隔离室上并连接到其上的差压检测传感器。 具有对称结构的差压变送器具有高灵敏度，因为在高压和低压下的压力传递路径中的传输系数之间的差异最小化。
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9.发明授权
公开(公告)号：US5412992A
公开(公告)日：1995-05-09
申请号：US986023
申请日：1992-12-04
申请人： Tomoyuki Tobita , Akira Sase , Yoshimi Yamamoto , Kenichi Aoki
发明人： Tomoyuki Tobita , Akira Sase , Yoshimi Yamamoto , Kenichi Aoki
CPC分类号： G01L19/146 , G01L15/00 , G01L9/065
摘要： A differential pressure sensor is disclosed, and in particular, there is disclosed a multiple function type differential pressure sensor capable of reducing a zero-point-change and a span change of means for detecting a differential pressure when applying a static pressure and being readily manufactured at high accuracy. The multiple function type differential pressure sensor is constructed by a semiconductor chip 1 for detecting a differential pressure, a fixing base 2 which has a joining part 21 joined to a thick part of the semiconductor chip 1 and which has a thickness less than or equal to that of the semiconductor chip 1, and also which has at least one thin part 22 in an outer periphery other than the joining part 21, and a housing 4 joined to the fixing base.
摘要翻译： 公开了一种差压传感器，特别是公开了一种多功能型差压传感器，其能够降低在施加静压时易于制造的用于检测压差的装置的零点变化和跨度变化 高精度。 多功能型差压传感器由用于检测差压的半导体芯片1构成，固定座2具有接合部分21，该接合部21接合到半导体芯片1的厚部，并且具有小于或等于 半导体芯片1，以及在接合部21以外的外周具有至少一个薄部22，以及与固定基部接合的壳体4。
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公开(公告)号：US4995266A
公开(公告)日：1991-02-26
申请号：US399916
申请日：1989-08-29
申请人： Tomoyuki Tobita , Yoshimi Yamamoto
发明人： Tomoyuki Tobita , Yoshimi Yamamoto
CPC分类号： G01L19/0645 , G01L13/025 , G01L19/0038
摘要： In a differential pressure transmitter having pressure receiving diaphragms forming recesses, a center diaphragm therebetween so as to define two chambers filled with pressure transmission medium, first communication passages respectively connecting the two chambers to the recesses and second communication passages respectively connecting the two chambers to pressure measuring chambers. The diameters of the first communication passages are less than predetermined values determined by the viscosity and volume modulus of the pressure passages, and the volume of the pressure-measuring chamber. The frequency of characteristic vibration and gain of the pressure-measuring chamber and the second communication passage in one side is respectively and substantially equal to that in the other side. A drastic transient pressure transmitted to sensors in the pressure-receiving recesses is absorbed by the communication passages and is not transmitted to the sensor in the form of a differential pressure.
摘要翻译： 在具有形成凹部的压力接收膜片的差压变送器中，其间具有中心隔膜，以限定两个填充有压力传递介质的室，分别将两个室连接到凹部的第一连通通道和分别将两个室连接到压力的第二连通通道 测量室。 第一连通通道的直径小于由压力通道的粘度和体积模量和压力测量室的体积确定的预定值。 一侧的压力测量室和第二连通通路的特征振动和增益的频率分别基本上等于另一侧的频率。 传递到压力接收凹部中的传感器的剧烈的瞬时压力被连通通道吸收，并且不以差压的形式传递到传感器。
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